VXD21/22/23

59 59 60 P Port size Rc VXD2140 Q R a b c d e f M L K J H F E D C B A N 69 (76) 77 (84) 87 (97) Q N 61 69 79 Q N 61 (68) 69 (76) 79 (89) N 61 (68) 69 (76) 79 (89) Normally open Normally closed VXD2142 , 30 30 35 59 59 62 57 74 81 34 51 58 29 37 43 34 43 47 20 20 23 92 92 95 104 (116) 26 44 59 66 28 35 40 3 8 8 14 23 39 47 47 48 39 65 78 86 42 46 56 52 56 66 63 80 90 3 8 1 2 32.5 118 (136)

VDW Series

How to find the flow rate for water Formula based on Cv factor Q = 14.2 Cv 10.2 P l/min Formula based on effective area (Smm) Q = 0.8 S 10.2 P l/min Q: Flow rate (l/min), P: Pressure differential (P1P2), P1: Upstream pressure (MPa) P2: Downstream pressure (MPa), S: Effective area (mm), Cv: Cv factor 17 Compact Direct Operated Series VDW 2/3 Port Solenoid Valve for Water and Air Safety

VHK

Do not use any other agent except a seal tape. q Contact SMC if using fluids other than air. w Do not supply air pressure from 2(A) port. The air will leak to 1(P) port. e Since the valve may have slight air leakage, it may not be suitable for holding pressure in a pressure vessel.

ZQ

Actuation Warning 1 Normally closed q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, the workpiece may not be released.)

2/3 Port Solenoid Valve for Chemicals

3 Sleeve 7 Iron Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 3 Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM10/100 Construction/Base Mounted Type LVM13R LVM14R LVM16R !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM115 Description No.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

MXQ

8 q @0 !2 e !3 !5 MX MTS t !6 r u y w !

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

5 Port Air Operated Valve

e (B)2 4(A) SYA w (B) 2 (A) 4 (A) 4 (B) 2 w y SYJA 1 (P) (EB)3 5(EA) VFA3000 VFA5000 VZA t (A)4 2(B) 3 (EB) 5 (EA) 1 (P) 5 (EA) 3 (EB) 1 (P) VFA VFA r y 1 (P) (EA)5 3(EB) VFRA 2 position double VPA4 Symbol 2 position double SYJA r t q q VFA1000 (B)2 4(A) w w (A) 4 (B) 2 (A) 4 (B) 2 VZA 5(EA) 1 (P) (EB)3 VTA VFA3000 VFA5000 2(B) (A)4 VGA 3 (EB) 5 (EA) 1 (P) 1 (P) 5 (EA) 3 (EB) t r (EA)5 1

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

2 q o !4 !7 !

Compact Hydraulic Cylinder

0 i q y !3 !2 !1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

9 @0 @1 Nickel plated Hexagon socket head plug Hard anodized Hexagon socket head plug Chrome molybdenum steel $1 Cylinder tube gasket Piston seal Scraper NBR NBR NBR NBR $2 $3 $4 $5 Hard anodized Electroless nickel plated Body (rodless cylinder) gasket 8-16-15 15 Series CY1F Dimensions QA Q + Stroke CY1F 1/2 (Q + Stroke) (LL) LA 6-YB through hole 6-YA recessed area 4-MM thread depth ML Adjustment

Slider Type/Ball Bushing Bearing

1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

Process Valve

VO307 5 D 1 Q CE-compliant CE-compliant Coil rated voltage Coil rated voltage CE-compliant Nil Q CE-compliant Nil Q 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 1 2 3 Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only Note) Electrical

Plug-in Unit

(arrangement as seen from lead wire side) 2-M2.6 x 0.45 D-sub Connector Cable Assembly Terminal No. q !5 !4 @4 !3 !2 @3 @2 !1 !0 o i !6 !7 w e r !8 Lead wire color Dot marking Terminal no. @1 @6 @5 Black None q !9 Brown None w y t @0 u Red None e Orange None r Yellow None t Pink None y Circular Connector Cable Assembly Terminal No.

XLAQ/XLDQ

Bellows seal O-ring seal Standard 468 Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series How to Order XLAQ M9N 16 A q w e r t y w Indicator/Actuator port direction q Flange size Size 16 25 40 50 Symbol Nil A F G J K L M Indicator Without indicator Actuator port direction Rear flange surface Flange side Flange side Left flange surface

Non-contact Gripper

Description Material Note 1 Body (R, L) Aluminum alloy (Black hard anodized) XT661-2A, 3A w 2 Body M Aluminum alloy (Black hard anodized) 741 XT661 Series Construction [Bernoulli Type] Size: 40 Size: 60 Size: 80, 100 A-A A-A A A q w w i u y t e e A B i A B r A A q A-A B-B t y u q u y t e w r r Size: 120, 150 B-B A-A A B B q r e w t y u i r C-C C C r A Guide assembly Component Parts A-A o