Electromagnetic Digital Flow Switch

LFE Series How to Order p. 3 Specifications (Integrated Display Type) p. 4 Specifications (Remote Type Sensor Unit) p. 5 Flow Rate Characteristics (Pressure Loss) p. 6 Internal Circuits and Wiring Examples p. 7 Parts Description p. 8 Fluid Passage Structure p. 8 Dimensions p. 9 3-Color Display Digital Flow Monitor LFE0 Series How to Order p. 10 Specifications (Remote Type Monitor Unit) p. 11

Digital Gap Checker

N None 1 2 n T 7 Digital Gap Checker With Control Unit ISA3 Series 3-Color Display RoHS How to Order G C N M B 2 ISA3 L 1 Rated distance range F 0.01 to 0.03 mm G 0.02 to 0.15 mm H 0.05 to 0.30 mm 2 port solenoid valve Rated voltage Piping specifications Output specifications Nil 24 VDC 1 *11 100 VAC 2 *11 110 VAC *11: Made to Order N NPN output P PNP output Supply side Detection side Unit

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

20 15 4(A) 4(A) 5 46 12.5 P=11 L plug connector (L) Dimensions n: Stations L n 19 226 218 20 237 229 13 160 152 15 182 174 17 204 196 5 72 64 6 83 75 7 94 86 9 116 108 11 138 130 L2 L1 2 39 31 3 50 42 4 61 53 16 193 185 18 215 207 10 127 119 12 149 141 14 171 163 8 105 97 601

Air cylinder (Series compatible with secondary batteries)

Description Qty 1 Rod cover 1 2 Head cover 1 3 Cylinder tube 1 4 Piston rod 1 5 Piston 1 6 Cushion ring 1 7 Cushion ring B 1 8 Bushing 1 9 Cushion valve 2 10 Tie-rod 4 11 Retaining ring 2 12 Spring washer 8 13 Tie-rod nut 8 14 Wear ring 1 15 Cushion seal 2 16 Rod seal 1 17 Piston seal 1 18 Cushion valve seal 2 19 Cylinder tube gasket 2 20 Piston gasket 1 21 Rod end nut 1 22 Magnet (1) 25

JXCx-OMT0032CN

ID 2 3 3 2 4 2147483647 0.01mm 4 1 5 0 6 H 2 065500 mm/s 7 L 8 H 2 0300 % 9 L 10 3 ID1 11 2 4 2147483647 0.01mm 12 1 13 0 14 0255 15 0255 4 16 0255 17 0255 18 IF(ID=1) 19 ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 33 - / Bit No.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

N.C. auto drain not available for AM650 Options J: With drain guide T: With element service indicator HAl AT IDl Element service indicator AMG Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 55 6 6 7 7 9 9 9 11 N 35

AMG

Model AMG250 AMG350 AMG450 AMG550 AMG650 AMG850 AMG150 (1) Flow rate (l /min (ANR)) 750 1500 2200 3500 6000 12000 300 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 3/4, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow is at 0.7MPa. Max. flow depends on operating pressure.

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

ALB900

To booster lube From booster lube To booster lube From booster lube A B 63 63 80 85 90 100 C Port size Rc INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model 1 4 3 8 15 15 15 20 22 22 141 164.5 170 180 230 251 , , 1 4 3 8 1 2 B C D E F Port size Rc Part no. A 3 4 , 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 1 1 3 4 ALBA90-10 ALBA90-20 14-13-19

Cylinder with Lock Series CLS

Refer to pages 23 through 25 for auto switch precautions.

Hand Valve Series VH

1 3 (R) 40 3.6-11 Hand Valve Series VH Panel Mounted/Dimensions VH21l-02 VH31l-02 to 03 4 (B) 2 (A) 25 25 25 4 (B) SlA 1 (P) 3 (R) 1 (P) l74 l62 62 49 VlA 2 (A) 49 4-5.5 4-6.6 SlA VlA 62 134 97 VM/VR 125 94 VH 1.5 45 1.5 106 88.5 92 73 56 1 (P) 3 (R) 1 (P) 27 23 13.5 3 (R) 12 4-Rc 1/4, 3/8 12 4-Rc1/4 VH33l-02 to 03 (Bottom piping) 2 (A) 44 Panel cut dimension 1 (P) 3 (R) 2-A +0.3 0

I

voltage: 1V or less ZSE401 T1-26 Vacuum Analog output 1~5V (+ 5%F.S.), load impedance : 1k ZSE401 T1-65 PNP output PNP open collector 80mA ISE4L01 T1-25 Positive Pressure NPN output NPN open collector 30V, 80mA, residual voltage: 1V or less ISE4L01 T1-26 100kPa Analog output 1~5V (+ 5%F.S.), load impedance: 1k ISE4L01 T1-65 (14.5PSI) Type PNP output PNP open collector 80mA ISE401 T1-25 Positive

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-l01 G49-4-l02 0.4 MPa G49-2-l01 G49-2-l02 0.2 MPa Round type Note 2) G49-7-l01 G49-7-l02 0.7 MPa Pressure gauge ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Modular Type Air Filter Series AF

18 20 24 24 B 67 97 129 165 169 245 258 A 25 40 53 70 75 90 95 M 2.3 2.3 2.3 2.3 3.2 3.2 L 40 53 70 70 90 90 K 8.4 8 10.5 10.5 13 13 J 5.4 6.5 8.5 8.5 11 11 H 22 23 26 25 35 35 G 27 40 54 54 66 66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specification Model With barb fitting B 137

Air Cylinder NCM Series Stainless Steel Cylinders

s o.50 o.8e4 o93 0.75 0.18 %-18 0.50 0.95 2.94 106 (1 0.312 %-24 0.50 o.624 0.25 1.12 o.12 0.88 0.88 0.24 %-8 0.62 1.17 3.25 0.la7 Wzo 0.75 0.7i19 o 1.t2 0.25 1.06 'L06 o.25 %-16 ora 1.62 400 150 t1%l o.87 1h-20 o_75 o.749 0.38 1.56 0.25 1.25 1.25 o.25 3l-16 0.88 '1.50 3.69 Double End : NC.

IN20267

Figure 11-1 MPC Group Power Connections The diagram illustrates the Ethernet communication and power cable connections required to support 21 MPCs when daisy chaining is in use. The MPCs in the dashed box form a single Power daisy chain group. Note that power daisy chaining supports a maximum of 20 MPCs in one power group.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

13 90 3.2 1 3.2 43.3 1/8 44.5 95 4.5 129.6 44 46 80.3 70 43.3 66 65.8 11 13 90 3.2 Note 1) The dimension of B is the length when the filter regulator knob is unlocked.

Series AP3100

: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating pressure Knob Cv 0.7 1.3 1.0 1.0 1.0 Option (AP3150 only) Ports 2 ports Code 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 3000 psig (20.7 MPa) 1) 1300 psig (9.0 MPa) 1300 psig (9.0 MPa) 00 02 25