High Vacuum L Type Valve Period and Scope of Warranty 13 7. Parts Replacement Procedure 14 1 XL-OMS0001-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.
The buttons cannot be operated. 13 Product failure Replace the product. Rework the piping. If the tightening torque is exceeded, the mounting screws, brackets and the pressure switch may be damaged. Air or liquid leakage Check if air or liquid are leaking from the piping. 14 The product is noisy. Product failure Replace the product. -52NO.TQ1050188-OM002 Error No.
Center of gravity .12 4.Product Specifications .13 4-1.Magnet Gripper .13 4-2. 3-port solenoid valve .14 4-3. Auto switch .15 5.Operating method or operation .16 5-1Precautions for Design .16 5-2. Installation .17 5-3. Air supply .22 5-4. Piping .22 5-5. Operating environment .23 5-6. Lubrication .23 6. Maintenance or inspection .23 6-1. Maintenance or inspection .23 6-2.
-2No.PS-OMU0008CN-D 1 / *3) 1 1.5 3) 1 1 -3No.PS-OMU0008CN-D () () () () -4No.PS-OMU0008CN-D () * UL UL1310 2 UL1585 2 30 Vrms (42.4 V )(2 ) UL (1 20 ) N G -5No.PS-OMU0008CN-D SUS630SUS304 * FG (35 N () () TSJ(Swagelok URJ (VCR)/ Swagelok,VCRSwagelok Company *() 6 33 -6No.PS-OMU0008CN-D () () 30 m DC(-)() () * ( ) () CE -550(5) SUS630()SUS304() () / -7No.PS-OMU0008CN-D * 1015
(1015 ) <> 5 UnLLoC 5 5 (30 ) 5 000 (30 ) 41 / 1 -42No.PS-OMM0002CN-F ZSE80(F)/ISE80(H) ,, (), No.1 ON ON OFF Yes No.2 No ON OFF No.1 OFF No.3 No.4 No.5 No.6 No.7 -43No.PS-OMM0002CN-F No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 No.17 -44No.PS-OMM0002CN-F No.
0.05 to 0.7) Ambient and fluid temperature 23~140F (5 to 60C) (No freezing) Fluid Air Cracking pressure (Valve) psig (MPa) 3 (0.02) Construction Relief style Port size/Weight Model Porting Port size Weight lb (g) Small Size Pressure Gauge 15mm Reverse flow function available on the standard model IN OUT Total weight (n: stations) Regulator (Except manifold) (80 X n) + 23 Common IN 1 8 1 8 .13
IS400-1 (1S-1) IS400-2 (1S-2) Model Port size B C D E F G H I J A , 1 4 1 2 1 1 AL800-12 to 14-1 AL900-20-1 431 (481) 437 (487) 3-M5 x 0.8 x depth 6 3-M5 x 0.8 x depth 6 230 230 ( ): With float switch 117 117 60 60 100 100 2 59 63 166 162 73 73 14-13-5
2 x 3.4 33 IZH 30 30 52 46 44 26 17 11 40 5 8 x 3.4 20 26 12 2 x Hexagon socket head cap screw M3 x 6 (Accessory) Internal mounting Pivot mounting 21 33 (Mounting angle adjustable range) (90) 61 61 30 Pivoting bracket/IZN10-B2 20 3.4 56 64 28 20 (Mounting angle adjustablerange) 20 9.5 9 90 24 3.4 4 14 40 2 x Hexagon socket head cap screw M3 x 16 59 11 (Accessory) 18 457 IZN10 Series Dimensions
A,B),20(A,B),25(A)) (MXQ16(A,B),20(A,B),25(A)) 12 13 A 14 15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36 NBR 37 NBR 38 NBR 39 (MXQ6,8(C),12(C)) / 40 (MXQ6,MXQ8(C),MXQ12(C)) 41 NBR (MXQ6,MXQ8(C),MXQ12(C)) 42 (MXQ6,MXQ8(C),MXQ12(C)) 43 20 Revision history 4-14-1, Sotokanda,
Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures
Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures
Therefore, the amount of condensed water is as follows. 140 (60) 122 (50) 104 (40) 86 (30) Pressure dew point F (C) 68 (20) B A 50 (10) 218 psi (1.5 MPa) 189 psi (1.3 MPa) 160 psi (1.1 MPa) 131 psi (0.9 MPa) 102 psi (0.7 MPa) 73 psi (0.5 MPa) 44 psi (0.3 MPa) 15 psi (0.1 MPa) Atmospheric pressure 32 (0) 14 (10) 4 (20) 22 (30) 40 (40) 58 (50) C 76 (60) 76 (60) 58 (50) 40 (40) 22 (30) 4 (20
Manifold Specifications for 20 Type Manifold Specifications for 20 Type Port size Flow characteristics SS5Y5-20 52-SY520 SS5Y7-20 Model 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model 52-SY720 4,2 Applicable valve (A,B) c[dm3/(sbar)] c[dm3/(sbar)] Cv b b Cv (P,EA,EB) Single base / B mounting Manifold style SS5Y5-20 1/4 C8 1.90 0.28 0.53 0.20 0.48 2.20 1 (SUP) / 3/5 (EXH) Common SUP / Common
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
Consult factory for avaitability. fttnlfibftilmm'solM 1/8', 5t32 311d' 114" 5/16' o o o c o o o 1 5 milbFffiHFmW 22 4 1 9 1 9 20 20 1 8 Plpe Reduclng Thrad Sizo Plp ThFad SEe 20 20 21 18 17 't7 | ."
digits1 2(3 4)7 digits 21=2(3=4) -20No.PF-OMO0007CN [d_1] [U_1] L/min 22 (OUT1) [o10] (OUT2) [o20] (OUT1) [1_n] 22 (OUT2) [2_n] [Anr] -21No.PF-OMO0007CN <> 2 [d_1] [d_2] SI [U_1] L/min L [U_2] CFM10 -2CFM10 -1 ft 310 -1 [U_2]24 (OUT1) 20) [o10] [o11] [o12] (OUT2) 20) [o20] [o21] [o22] () -22No.PF-OMO0007CN (OUT1) 20) [1_n] [1_P] (OUT2) 20) [2_n] [2_P] [Anr] 20 1 atm(
External Grip Internal Grip MHR3-10R/MDHR3-10 MHR3-10R/MDHR3-10 10 10 0.6 MPa Pressure Pressure 0.6 MPa 8 8 Gripping force (N) Gripping force (N) 0.5 MPa External grip 0.5 MPa 6 6 0.4 MPa 0.4 MPa 4 4 0.3 MPa 0.3 MPa 0.2 MPa 0.2 MPa 2 2 0 10 20 30 40 50 0 10 20 30 40 50 Gripping point L (mm) Gripping point L (mm) Internal grip MHR3-15R/MDHR3-15 MHR3-15R/MDHR3-15 20 20 0.6 MPa Pressure Pressure
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min 1m = 3.28ft 1l/min = 0.035SCFM Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
20 SUP=0.2MPa SUP=0.2MPa 10 10 0 0 10 30 40 50 20 60 10 20 Discharge rate l/min Discharge rate l/min Selection from flow rate characteristic graphs (PA3000) Required specification example: 3.
Allowable horizontal direction load l l m m0 l = 50mm Graph 1 l = 100mm Graph 2 v = 100mm/s or less Graph 6 v = 50mm/s or less Graph 5 300 300 MGF100 MGF100 50 200 200 MGF100 30 40 MGF100 MGF100 100 100 MGF63 30 MGF63 MGF63 20 50 40 50 40 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load weight m (kg) Load weight m (kg) 30 30 20 20 20 MGF40 MGF40 10 10 10 MGF40 MGF40 10 5 4 3 5 4 3 2 2 5