LJ1H

Note 2) To insert the T-nuts, remove the covers at both ends of the body and insert them into the T-slots.

Possible to transfer a workpiece at low-speed.

Y Y Y Y 20, 30, 40 Y J K K, T K, T K 10, 15, 20, 30, 40 K K K K, T K Z X X, Z J J J, Z Z J 20, 30, 40 Z J 10, 15, 20, 30, 40 T J Reversed shaft, Change of double shaft length X 20, 30, 40 Reversed shaft, Change of double shaft length Combination Chart of Made to Order Chart 4.

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

Stability of suction position,

Stroke 32 40 50 63 80 100 125 32 40 50 63 80 100 125 ZP3EU-(T/Y)F1JB10 10 V V V V ZP3EU-(T/Y)F1JB30 30 ZP3EU-(T/Y)F1JB50 50 ZP3EU-(T/Y)F2JB10 10 V V ZP3EU-(T/Y)F2JB30 30 ZP3EU-(T/Y)F2JB50 50 ZP3EU-(T/Y)F3JB10 10 V V V ZP3EU-(T/Y)F3JB30 30 ZP3EU-(T/Y)F3JB50 50 ZP3EU-(T/Y)F4JB10 10 V V ZP3EU-(T/Y)F4JB30 30 ZP3EU-(T/Y)F4JB50 50 ZP3EU-(T/Y)F5JB10 10 V V ZP3EU-(T/Y)F5JB30 30 ZP3EU-(T/Y)F5JB50

Table of Contents

2 u t o !3 q !1 y r i e Component Parts Description Material Material Note Note Description No. q w e r t y u No. i o !0 !1 !2 !

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Combination between -X and -X (S, W, X, Y, Z, T, J, K shaft) 20Shaft type Combination Applicable size Part no.

Made to Order

Double clevis CT 2 x N D E M Y CD hole H10, Axis d9 RR CW CU CX +0.4 +0 T L CZ 0.1 0.3 [mm] Part no.

High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Environment

How to Order w e r t q y u i o !0 !1 !2 !

MY1

Wall mounting z y Wd: Workpiece (500 g) P. 8-11-6 x y Wc: MHL2-16D1 (795 g) x z Wa: Connection plate t = 10 (880 g) x MY1M40-500 3. Ceiling mounting 4.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

lVFl 10

D I N 'E Terminal 'T Conduit Temlnal 'H 24' Lead hing 01 %'(AXSrd.) t M5 NOM 10-32 ilanual Overrida _Recessed, Nonlocking (Std.)

ITV_D-E

The expect ed perf orm ance and saf et y assurance w i l l be t he responsi bi l i t y of t he person w ho has det erm i ned t he com pat i bi l i t y of t he syst em .

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Compact

1 1 2N q w e r t y u i o !

Aluminum High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Indicator (Option) q Bonnet assembly (Maintenance parts) (Including w, t, y, u) Port 1(P) (Pressure port) Heater (Option) Port 3(R) (Exhaust port) Magnet (Option) Pilot port P Solenoid valve R u Bellows holder (Material: Stainless steel 304) e Exterior seal (Maintenance part) y Bellows (Material: Stainless steel 316L) t Valve (Material: Stainless

Air Cylinder

CS2 D-X Technical Data 207 CM2 Series Construction Spring return t y !1 q !3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

MY1

Wall mounting z P. 26 P. 58 y x y Wa: Connection plate t = 10 (880g) x z MY1C40-500 3. Ceiling mounting 4.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

y u i o !