Electric Actuators

: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18 5.5 12 Note 5) Motor cable mounting direction: U (Bottom

Non-contact Gripper

P PL M ML C H D L XT661-4C-X321 M5 x 0.8 5 M4 x 0.7 8 32 6 39 XT661-6C-X321 M5 x 0.8 6 M4 x 0.7 6 47 11 59 XT661-8C-X321 M5 x 0.8 6 M4 x 0.7 6 47 17 79 XT661-10C-X321 Rc 1/8 M4 x 0.7 6 47 23 99 XT661-120E-X322 Rc 1/8 M5 x 0.8 7 72 30.5 120 XT661-150E-X322 Rc 1/8 M5 x 0.8 7 72 37.5 150 744 Non-contact Gripper XT661 Series Dimensions [Bernoulli Type] With guide assembly Size: 120 Size

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Load factor: ((Load weight x 9.8) /Theoretical force) x 100% Note) 2 position single, 4/2 5/3 (A/B R1/R2) Conditions Base mounted Series CJ2 Series CM2 Series MB/CA1 TO604 x 1 m Tube x Length SQ1000 Speed controller AS3001F-06 Silencer AN110-01 Tube x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m Speed controller AS4001F-10 AS3001F-06 SQ2000 Silencer AN200-02 2-3-1 2 Series SQ1000/2000 Precautions

VFR

Description Pilot valve assembly AXT627-42-1(M5 x 50) AXT627-10-1 VFR51 AXT627-10-1 VFR52 AXT627-42-1(M5 x 50) AXT627-10-1 VFR53/54/55 NBR Hexagon socket head screw Gasket i AXT627-42-1(M5 x 50) Refer to How to Order Pilot Valve Assembly on page 3-5-78. Steel o !

Clamp Cylinder with Lock

5 12.5 114 226 45.5 50 64 64 20 55 78.5 58 17 58 M16 x 1.5 M4 x 7 87.5 52.5 5.5 14 118.5 230.5 51 63 74 74 20 69 82 72 17 58 M16 x 1.5 M5 x 7 91 53.5 5.5 19 122 234 58.5 Note) Refer to page 14 and 15 for Accessories.

MHL2

hole) 3H9 depth 3 +0.025 0 4-M4 x 0.7 thread depth 8 (Mounting thread) Dimensions of auto switch mounting groove (Enlarged view) 18H9 depth 3 +0.043 0 M5 x 0.8 (Finger closing port) Auto switch mounting groove (4 locations) 4-M5 x 0.8 (Piston rod and rack screw) M5 x 0.8 (Finger closing port) Width across flats 8 (4 locations) Closed E Open F 4-M4 x 0.7 through (Thread for mounting attachment

MHC2

4-M5 x 0.8 (Thread for mounting attachment) M5 x 0.8 (Finger opening port) When auto switches are used, through hole mounting is not available.

MHC2

4-M5 x 0.8 (Thread for mounting attachment) M5 x 0.8 (Finger opening port) When auto switches are used, through hole mounting is not available.

Compact Cylinder

Ends Tapped [mm] O1 thread R R Bore size O1 R 20 M4 x 0.7 7 25 M4 x 0.7 7 32 M5 x 0.8 8 40 M5 x 0.8 8 Minimum lead wire bending radius 10 Auto switch F Q H thread effective depth C 4 x N through 2 x M5 x 0.8 (Port size) I D E M Z A + Stroke B + Stroke L W G M K J 25 to 40 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through F Q 2 x M5 x 0.8 (Port size)

LCD Readout Digital Pressure Switch Series ZSE3 (For Vacuum)/ISE3 (For Positive Pressure) For General Pneumatics Easy pressure setting with the digital display Can be integrated with a vacuum unit, Series ZX ZSE ISE ZSP PS ISA PSE IS ISG ZSM Built-in fail

: M5 x 0.8 0XY: M6 x 1.0 771

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

With seal Note) In case that connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard. Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

Integrated Controller

M4 x 0.7 thread depth 7 M5 x 0.8 thread depth 10 25.5 0.5 10.5 B + Stroke A + Stroke 25.5 34 35 4 x M4 x 0.7 thread depth 7 35 Rod end male thread 6 x M4 x 0.7 thread depth 5.5 3 H9 (+0.025 0 ) depth 3 M8 x 1.25 Width across fats 174 16 23 MD XX 5 Width across fats 22 15 MC ML + Stroke 13 14 24.5 Required Space5 [mm] 4 3 H9 (+0.025 0 ) 3 Cable connector type J Straight 115 XX (2:1) 1 The

Rotary Table Series MSU

x 0.8 (10-32 nominal) M3 x 0.5 Port size Top ports M3 x 0.5 M5 x 0.8 (10-32 nominal) Deflection accuracy 0.03mm or less (0.0012") 2.

Flow Sensor Series PFMV

(mm) Type Port size Model Type Port size Model KQ2H04-M5 KJH04-M5 Male connector Male connector 4 M5 x 0.8 KQ2S04-M5 4 M5 x 0.8 KJS04-M5 Hex. socket head male connector Hex. socket head male connector KQ2L04-M5 KJL04-M5 Male elbow Male elbow Miniature Fitting/Series M Tubing O.D.

Compact Type

x 0.45 x 6 L (Hexagon socket head cap screw) M3 x 0.5 x 12.5 L (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 10 Series CXSJ Dimensions: 10 Standard Piping 4-M3 x 0.5 thread depth 4.5 16 12 + Stroke 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 28.5 8 Stroke 15 56 + Stroke 8 3.5 13 1 44.5 + Stroke M5 x 0.8 x 4 L (Hexagon socket head set

Compact Type Dual-Rod Cylinder Series CXSJ

x 0.45 x 6 L (Hexagon socket head cap screw) M3 x 0.5 x 12.5 L (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (12) (5 + Stroke) 2.75 2-M3 x 0.5 through 25 0.2 4 10 Series CXSJ Dimensions: 10 Standard Piping 4-M3 x 0.5 thread depth 4.5 16 12 + Stroke 3.5 8 7.5 2-M5 x 0.8 thread depth 4 (Piping port) 28.5 8 Stroke 15 56 + Stroke 8 3.5 13 1 44.5 + Stroke M5 x 0.8 x 4 L (Hexagon socket head set

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

bolt 2 5.5 or M5 2 x n x Mounting hole Pitch = 100 Mounting hole quantity n Quantity Stroke 100 2 4 200 3 6 300 4 8 A = (n 1) x pitch 400 5 10 30 500 6 12 600 7 14 LTF8 M6 bolt 3.5 2 x n x Mounting hole 6.6 or M6 Pitch = 100 Mounting hole quantity n n Quantity Quantity Stroke Stroke 100 2 4 600 7 14 200 3 6 700 8 16 A = (n 1) x pitch 36 300 4 8 800 9 18 400 5 10 900 10 20 500 6 12 1000

KB

X 0.8 M6 X 1 M5 X 0.8 M6 X 1 H (Hex.)

MVGQ

x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37 10 60 19 13 MVGQ Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3