45

P, R port SX3000 (Metric size) With One-touch fitting for 8 (Inch size) With One-touch fittings for 5/16" P, R port SX5000 (Metric size) With One-touch fitting for 10 (Inch size) With One-touch fittings for 3/8" For D side r End block assembly L SX3000-53-1A SX5000-53-1A For U side (Metric size) SX5000-51-1A (Inch size) SX3000-51-15A SX5000-52-1A (Metric size) SX3000-51-1A (Inch size) SX3000

EX500

24VDC/650mA 16 VOLTAGE INPUT US C TYPE1 IP CODE IP65 R C US R R R R R R R US C US C US C US C US C US C US C SERIAL NO.

ITV

The pressure in the pilot chamber e increases and operates on the upper surface of the diaphragm r. As a result, the air supply valve t linked to the diaphragm r opens, and a portion of the supply pressure becomes output pressure. This output pressure feeds back to the control circuit i via the pressure sensor u.

VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Grommet: G Conduit: C Conduit terminat: T Model Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

Series VCL

N Model Note) U Q V R Q R Q R S Q R S 83 22 23 45 44 43 58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107

Series VCS

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

SMC Pneumatic Clean Series

A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2-5.5 through A port B port 2-M5 x 0.8 2-M5 x 0.8 depth 10 Chamfer Chamfer (Single vane) (Double vane) If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Speed Controller: Standard Type Series AS In-line Type 1

1 14143 14144 14147 Stainless steel NBR 15-9-30 4 Speed Controller: Standard Type In-line Type Series AS Dimensions: AS1000-M3 Dimensions: AS1000-M5 Male M5 x 0.8 Female M5 x 0.8 Dimensions: AS2000/3000 Dimensions: AS4000 2-1/4 to 1/2 AS 2-port size ASP ASN AQ ASV Dimensions AK Max. Min.

Dedicated Controller

absorption unit LC7R-K1A Note) Select 6mA or less for resistor R after confirming the input capacity of the control equipment.

MXH

1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Description Material Note Description Material No. q w No. !2 !3 !4 !5 !

MHK2

M5 x 0.8 (Finger opening port) 22.5 2.3 12-6-13 13 Series MHK2 Dimensions MHK2-20: Standard type 18.6 20 2-M5 x 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 0.1 8 Open 26 +1.2 0 5 16 0.02 13.5 42 30 60 58 32 0 0.2 29 Closed

MHK2

groove (2 positions) S O 15 3 15 10 0 0.05 5 9 4 7.5 Note) For single acting, one port is used as a breather port. 21 M5 x 0.8 (Finger opening port) 2.5 MHKL2-20: Long stroke type 18.6 2-M5 x 0.8 thread depth 8 (Mounting thread) 24 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 x 0.8 thread depth 10 (Mounting thread) 24-M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through

rep-modular-e

5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

5 @7 r Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

AR20-B to AR60-B

IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

Type AS1200-M3 Direct cylinder elbow type 2 Bore size JIS Symbol Direct cylinder flat elbow type 4 Symbol Bore size Applicable series Control type AS1200-M3 AS1400-M3 M3 M3 x 0.5 Meter-out Meter-in 0 1 AS120-M5 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 M5 x 0.8 10-32UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 P.15-11-3 Thread type Cylinder side R Tube side Rc Symbol Metric thread (M3

ARM10/11

Torque recommended: (R 1/8: 7 to 14 Nm).

Pressure Gauge Guide

molybdenum coated Aluminum die-casted Black disulfide molybdenum coated 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 1.5 8 1 R Back side thread Cover ring assembly G46 4 1 R Page 14-11-6 Polycarbonate MPa 42.5 3 Rolled steel Black melamine painted Brass Vertical side thread 8 1 R GA46 4 1 R 0 to 0.2 0 to 0.3 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 Back side thread G33 30 8 1 R Page 14-11-8 Vertical