Output Specification: NPN Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter, Operation Manual: -

ZL3-OM00601

6 600L/min(ANR) P Port exhaust *2 *2: Port thread type is the same as the thread type selected for 3). 3) Supply (P), vacuum (V) port / one-touch fitting port size Vacuum (V) port Supply (P) port 5) Combination of the supply valve and the release valve 06 Rc3/4 K1 Supply valve (N.C.) + Release valve (N.C.) 04 2xRc1/2 K2 Supply valve (N.C.) 8() F06 G3/4*1 B1 Supply valve (N.O.) + Release

Regulator

Option/Semi-standard symble:When more than one specification is required, indicate in alphanumeric order. 1 3 4 5 6 2 Symble Description 0.020.2MPa 0 0 0 0 Set pressure range 1 1 1 1 0.020.4MPa 2 2 2 2 0.020.8MPa + 1 Exhaust direction 0 0 0 0 Bottom exhaust + 2 Nil Nil Nil Nil Rc Pipe thread type NPT N N N N F F F F G + 3 Port size 01 01 01 01 1/8 + 4 Nil Nil Nil Nil Without pressure gauge

E-P HYREG ® VY1 Series

2) Not conforming to ISO1179-1. 24 V 2 4 to 20 mA 120 3 0 to 20 mA 5 1 to 5 V 67 k 10 k 6 0 to 10 V 12 V 7 4 to 20 mA 120 8 0 to 20 mA Symbol Symbol B (Bracket) F (Foot) G (Pressure gauge) N (Silencer) Body size Port size Rc Option Mounting Port 1(P), 2(A) Port 3(R) Applicable pilot valve (4) 00 M5 00 M5 01 00 01 02 00 02 03 04 M5 01 02 02 03 04 04 06 10 10 12 14 20 Without sub-plate M5

3 Port Air Operated Valve

Nil V Standard For vacuum X505 VPA500 series Port size Symbol Port size VPA300 1/8 1/4 3/8 1/2 VPA500 VPA700 01 02 03 04 Bracket Nil F Without bracket With bracket Thread type Type of actuation A B N.C. (Normally closed) N.O. (Normally open) Nil F N T Rc G NPT NPTF VPA700 series Specifications Fluid Air Type of actuation N.C. or N.O.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

ASN AQ ASV Flow Rate and Sonic Conductance Symbol AK AS221F-01 AS121F-M5 AS221F-02 AS321F AS421F Model Tubing O.D.

Micro Mechanical Valve Series VM1000

VHS 2317 Series VZM400 How to Order 0 VZM45 01 01 S Made to Order (Refer to pages 2342 to 2345 for details.)

Speed Controller with One-touch Fitting

-23(S)A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2

JXCx-OMX0009

Unlock Hold External lock 0mm/s Speed T2: Communication cycle time: 2 times or more T3: 3 s or less (System initialize time Time required for reading position data) 79 - 15.

IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-23(S)A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-04(S)A 4 8.2 AS22l1FG-01-06(S)A 6 10.4 10 (9) AS22l1FG-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS22l1FG-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 17 (18) AS22l1FG-02-04(S)A 4 8.2 AS22l1FG-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS22l1FG

VZS

Sub-plate Assembly Plug-in Non plug-in VZS2000-P-01 VZS2000-S-01 Component Parts Mounting bolt and gasket are not attached. : Thread type No.

VM

of red, black, green, yellow VM430-01-32Y VM-33A Push button (Flush) VM430-01-33 VM-34AR Red VM430-01-34R VM-34AB Black VM430-01-34B Twist selector (2 position) VM-34AG Green VM430-01-34G VM-34AY Yellow VM430-01-34Y VM-36A Key selector (2 position) VM430-01-36 Note) Actuator replacement is available for all styles. 3.5-25 VM400 How To Order S 01 01 3 0 VM4 Suffix of actuator Actuator G

JXCx-OMY0004

JXC-OMY0004-A Byte8, 9: Current speed Byte Signal name Description Current speed of the actuator is shown in multiples of 1mm/s when numerical data can be read. (5) 8 E.g.) 300[mm/s](300d=012Ch) is output.

JXCx-OMY0008

Move the actuator from the origin to a point 100 mm away at 100 mm/s. (Step Data No.1 is used for this operation). From the 100 mm point, the actuator must start a pushing operation of 10 mm/s speed and 50% or less force. (the pushing distance is up to 5 mm).

EXxx-OMP0004CN

+24V 2 SV0 V 0 V 3 SI24 V +24 V 4 SI0 V 0 V 5 M12 SPEEDCON SPEEDCON SPEEDCON 1/2 SPEEDCON M12 -13No.EX-OMP0004CN-I SV SI DC24 V /28 SV DC24V SI DC24V A.

JXCx-OMY0006

Move the actuator from the origin to a point 100 mm away at 100 mm/s. (Step Data No.1 is used for this operation). From the 100 mm point, the actuator must start a pushing operation of 10 mm/s speed and 50% or less force. (the pushing distance is up to 5 mm).

SFOD-OMT0005CN

<> (01-144) D RESET SVON <> <>(M24V) (01-145) RESET SVON D <> <> <> RESET SVON (01-146) D <> -65- <> <>(C24V) RESET SVON (01-147) D <> <> <> (01-148) RESET SVON D <> <> (01-149) D RESET SVON <> () Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVONON) (01-193) E <>ON(SVON ON) <> Output current limit is exceeded set value (

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

-A18 ZPT40HNJ50-01-A18 ZPT40HNJ75-01-A18 ZPT50HNJ25-01-A18 ZPT50HNJ50-01-A18 ZPT50HNJ75-01-A18 ZPT63HNJ25-01-A18 ZPT63HNJ50-01-A18 ZPT63HNJ75-01-A18 ZPT80HNJ25-01-A18 Model Mass ZPT80HNJ50-01-A18 ZPT80HNJ75-01-A18 ZPT100HNJ25-01-A22 ZPT100HNJ50-01-A22 ZPT100HNJ75-01-A22 ZPT100HNJ100-01-A22 ZPT125HNJ25-01-A22 ZPT125HNJ50-01-A22 ZPT125HNJ75-01-A22 ZPT125HNJ100-01-A22 Pad dia.