Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

Speed Controller with Residual Pressure Release Valve: Standard Type Series AS



E In-line Type (Metal Body) 1

0 w !2 ASR ASF Component Parts Component Parts No. Model No.

Direct Operated Precision Regulator Modular Style Series ARP3000 1

t y q SUP OUT Component Parts Replacement Parts Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com No. q w No.

VZM400

0 w e Valve assembly Valve spring Return spring Spool spring Head cover Spool valve assembly End cover Piston Plunger NBR ZDC !1 Stainless steel r t ZDC Metallic plated !2 Stainless steel !

HEC-OM-S019

Year Jun T QT RT ST . ZT AT BT . Dec Z Qz RZ SZ . ZZ AZ BZ . Apr R QR RR SR . ZR AR BR . Jul U QU RU SU . ZU AU BU . Month Q R S . Z A B . Oct X QX RX SX . ZX AX BX . T With stand for vertical installation 8 1 15 9 D-sub 15 pin (Socket type) Fixed screw: M2.6 Description No.

CG1-SMV13_en

Ensure that the air supply is filtered to 5 m. 2 Specifications Tighten fittings to the specified tightening torque. Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: T (Power Saver), Voltage: 5 (24VDC), Electrical Entry: MN (M Plug Connector w/o Lead Wire), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: 02 (Body Ported 1/4, Base Mounted Sub-plate 1/4), Thread: T (

Stations: 6 Stations (Note: 2 Stations are Required for Terminal Box Mounting), Port Size: 02 (Rc1/4), Thread: T (NPTF), Kit Name: T (Terminal Box), Box Mounting Position: 0 (U Side Mounting), Control Unit: M (Air Filter w/Manual Drain, Regulator, Air Release Valve), Release Valve Rated Voltage: 1 (100VAC 50/60HZ)

Model: 33, Orifice: 4 (4mm), Style: 0 (N.C., Single Unit), Option: M (SS, Seals: FKM, Class B, Oil-free), Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 5 (24VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: Z (w/Light and Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Model: 33, Orifice: 4 (4mm), Style: 0 (N.C., Single Unit), Option: M (SS, Seals: FKM, Class B, Oil-free), Suffix: Standard, Port Size: 02 (1/4), Thread: T (NPTF), Voltage: 6 (12VDC), Electrical Entry: T (with Conduit Terminal), Surge Suppressor: S (w/Surge Voltage Suppressor), Rectifier: None (for DC or AC Class H Coil), Bracket: B (Bracket)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Pressure Specification: K (High-pressure, 1MPa), Coil Specification: T (Power Saving Circuit, DC Only), Voltage: 5 (24VDC), Lead Wire: MN (M Plug Connector w/o Lead Wire), Light/Surge Suppressor: Z (With light/surge voltage suppressor), Manual Override: Non-locking Push Type, Port Size: 02 (1/4), Thread: T

LZ-OM004xx

Cable length or less customer. + Speed with no load (mm/s) 33 or m ore 100 or m ore 200 or m ore Speed with no load (mm/s) 33 or m ore 100 or m ore 200 or m ore Please refer to Table 1 Applicable auto switch Select D, built-in magnet, when the auto switch is required. Select Nil, no magnet, when the auto switch is not required.

NAMUR

The used of turbine oil at temperatures lower than 0C leads to increased viscosity and may cause the valve to malfunction. d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping Torque Switching

VFM300

-02-06 VFM350-02-06S Toggle lever VFM350-02-08 VFM350-02-30R VM-30CR Red VM-30CB Black VFM350-02-30B Push button (Mushroom) VM-30CG Green VFM350-02-30G VM-30CY Yellow VFM350-02-30Y VFM350-02-32R VM-32CR Red VM-32CB Black VFM350-02-32B Push button (Extended) VM-32CG Green VFM350-02-32G VM-32CY Yellow VFM350-02-32Y With a set of red, black, green, yellow VM-33C Push button (Flush) VFM350-02

Dedicated Controller Series LC1 Uniaxial Type

T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

TA301

VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled. Screw tightening torque: 1.4 Nm 2.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: L (Bottom Ported), Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: M (M Plug Connector w/Lead Wire 0.3m), Surge Suppressor: None, Manual Override: D (Push-turn Locking Slotted Style), Port Size: 02 (Base Mounted w/Sub-plate 1/4), Thread: T (NPTF)