Electric Slide Table / High Precision Type 《 AC servo motor 》

-V5 LECYU2-V5 V6 AC servo motor 100 16 L Left side parallel V7 200 25 LECYM2-V7 LECYU2-V7 (Absolute encoder) (6)Motor option (5)Storke [mm] (4)Lead [mm] Size Size Nil Without option 16 25 16 25 * B With lock 50 12 16 (20) 100 6 8 (10) 150 *The values shown in ( ) are the lead for size 25 parallel mounting types.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 07, 08, 09, 10, 11 300 06 1.0 2 4 200 50 100 0.5 1 2 100 0 0 0 0 5 10 0 5 10 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations ASD530FG ASD630FG 1500 1000 Effective area (mm2) Effective area (mm2) 14 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 20 12 12 10,11 10, 11, 12 08, 09 1000 10 15 8

JA/JAH/JB/JS

A R Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4

JA/JAH/JB/JS

x 1.25 6 17 19.6 16.5 JS40 nut M14 x 1.5 8 22 25.4 21 H B JS63 nut M18 x 1.5 11 27 31.2 26 10-19-14

CC

min) 15 *Limited flow shows the limit of converter oil level speed (0.2m/s) which can maintain stability of converter oil level. 4.12-8 Air-hydro Converter Series CCT Air-hydro Converter/CCT63/CCT100/CCT160 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B ML1C REA REC RHC (mm) Model Air port size Rc (PT) Oil port size Rc (PT) A B lC DA DB DL H NL P QB QL S T W MTS CCT63-l CCT100-l CCT160-l 3/8 3/4 9.5 11

Electro-Pneumatic Valve NVEP/NVEF Series

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

Tamper Proof and Flat Head Screw

(Refer to CAT.E501-B "Air Fittings and Tubing" pages 143 and 144 for details.)

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

VQZ100V-OMT0001

No.VQZ100V-OM0001 VQZ V100 / / / / -2,3 -4,5 -4,5 -6 -6 -6 -6 -7 -7 -7 -814 -15,16 -1No.VQZ100V-OMT0001 *1) ISO 4414: Pneumatic fluid power ISO 4413: Hydraulic fluid power IEC 60204-1: Safety of machinery ISO 10218-1992: Manipulating industrial robots JIS B 8370: JIS B 8361: JIS B 9960-1: JIS B 8433-1993: *2) (ISO/IEC)(JIS) (JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

PSxx-OMG0001CN

kPa MPa(500 kPa kPa) ZS-28-A 2 m ZS-28-B (M35 L 2 ) ZS-28-C 1 ZS-27-C (M38 L 2 ) + ZS-27-D (M38 L 2 ) ZS-27-01 1 -8No.PS-OMG0001CN-H LCD OUT1 OUT2 UP SET DOWN (OUT1)() OUT1ON (OUT2)() OUT2ON LCD 4 (UP)ON/OFF (DOWN)ON/OFF (SET) -9No.PS-OMG0001CN-H M3X5 L(2) 0.50.7 Nm M35L ZS-28-B M35L M38 L(2 ) M38L ZS-27-01 ZS-27-C 90 2 -10No.PS-OMG0001CN-H 1 a a1DIN b (b -

EXxx-OMN0027CN

Byte0 1 Byte1 2 Byte2 3 Byte3 PROFIBUS DP Byte4 ID(14h) Byte5 ID(11h) Byte6 Header Byte7 System diag.1 Byte8 System diag.2 Byte9 System diag.3 Byte10 System diag.4 Byte11 Reserved : : Byte18 Reserved Byte19 Header Byte20 0~7 Byte21 8~9 Byte22 Reserved : : Byte27 Reserved Byte28 A Byte29 A Byte30 A Byte31 B Byte32 B Byte33 B : : Byte61 L Byte62 L Byte63 L -71No.EX-OMN0027CN-D 1 7 6 5

Compact Guide Cylinder

B 0.2 A 0.2 Bore size [mm] A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 7.

SL5200

FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 L L MPA MPA 2PW 3PW 4PW 10 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Other range available.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

Lateral Load Resisting Low Friction Cylinder Series MQM 6, 10, 16, 20, 25 Metal Seal How to Order MQML D B 10 15 Lateral load resisting low friction specification Action D Double acting Type Cylinder stroke L Lateral load resisting type (Built-in basic bushing) Bore size (mm) Standard stroke (mm) Mounting 6 15, 30, 45, 60 B L F G C Note 1) Basic type Foot type Front flange type Rear flange

ZSE40/ISE40

Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere A B 4 Max. A: Max. pressure value when a workpiece is adsorbed. ON = A A B 4 Min. B: Min. pressure value when a workpiece is not adsorbed. OFF = B + 16-2-21 8 Series ZSE40/ISE40 Calibration Procedures Auto Preset (In the case of confirming the supply pressure) 1. Auto preset mode 2. Preparation for auto preset 3.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

(or 3 kPa) Repeatability Note 2) 0.4 MPa setting (Ex.)10-ARP30-02BG 1 L/min [ANR] or less (at P2 = 0.4 MPa) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.6 L/min [ANR] or less (at P2 = 0.2 MPa) Air consumption 0.6 MPa setting (Ex.)10-ARP30-02BG-3 1.4 L/min [ANR] or less (at P2 = 0.6 MPa) 1/8 1/4 1/8 Pressure gauge port size 5 to 60C (No freezing) Ambient and fluid temperature With a digital pressure

Paddle Style Flow Switch Series IF3 For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.