Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(4 port) 22 (2 port) 22 (4 port) 22 (2 port) 2 12 14 4 14 4 2 12 50 80 95 SMC SMC A B SMC 50 80 SMC B A 95 Manual override 5 1 3 Manual override 2-8.5 mounting hole 8 5 1 3 71 65 8 2-8.5 mounting hole 65 71 Indicator light 84 79 Indicator light 84 79 M12 connector M12 connector 150.5 137 150.5 137 PE port PE port PE port PE port 65 39 EA EB P 27 65 39 EA EB 27 P 1/2, 3/4, 1 1 port 3/4-

SZ3000

22 22 SOL.A SOL.A SOL.A 21 21 21 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 4 4 4 SOL.A SOL.A SOL.A 3 3 3 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor SOL.B SOL.B SOL.B Station 1 Station 1 Station 1 2 2 2 SOL.A SOL.A Triangle mark SOL.A 1 1 1 Triangle

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

34 30 72 22 40 FT FX 40 89 22 50 (mm) L B + Stroke FZ A + Stroke Bore size (mm) Stroke range (mm) 4-FD A L 10 10 to 40 8 75 Rear flange type: MQQLG 10, 16, 20 25, 30, 40 16 10 to 60 10 88.5 2-FD 4-FD 20 10 to 60 10 97 25 10 to 50,75,100 12 104.5 30 10 to 50,75,100 12 124 FV FV 40 M 10 to 50,75,100 12 124 (Dimensions other than A and L are the same as the front flange type.)

Slide Tables MX Series

(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7

Compact Cylinder with Air Cushion Series RQ

50 22 44 8 33.5 M8 x 1.25 14 28 Refer to page 9 for details on rod end nut and accessories.

Compact Cylinder with Air Cushion and Lock Series RLQ

Applicable cylinder bore size (mm) ND NX Applicable pin Part No. 32, 40 50, 63 10 14 18 22 IY-G04 IY-G05 Part No.

VQ7-6/7-8

Proper tightening torque Nm Tightening torque for piping Connection threads Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 5.

Speed Controller with One-touch Fitting

) AS231F-02-08(S)A 8 13.2 34.9 (35) 23.5 46 14.2 22 (22) AS231F-02-10(S)A 10 15.9 20.9 38.1 (38.2) 24.7 47.3 15.6 23 (24) AS331F-02-06(S)A 6 8.2 16.5 29.9 (30) 17.5 40.1 AQ 1/4 17 (17.5) 12.9 13 ASV 13.3 42 (42) AS331F-02-08(S)A 8 13.2 37.1 23.5 59.9 14.2 43 (43) AS331F-02-10(S)A 10 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS331F-02-12(S)A 12 18.5 42.5 28.3 64.7 17 48 (48) AS331F-03-06(S)

Possible to transfer a workpiece at low-speed.

Applicable shaft type: X MSU CRJ Short shaft side X = Y = X = Y = Short shaft side Short shaft side CRA1 CRQ2 Long shaft side MSQ Long shaft side Long shaft side Y = Size 20, 30, 40 Size 10, 15 MSZ (mm) CRQ2X MSQX CRQ2X MSQX Y 1 to 17 1 to 19 1 to 28.5 1 to 30 1 to 34 X 3 to 10 3 to 11 3.5 to 16.5 4 to 20 4 to 22 (mm) Size 10 15 20 30 40 Y 1 to 19.5 1 to 22 1 to 25 Size 20 30 40 MRQ D327

7

VX3 Tightening Torque for Piping VXA Connection thread Rc1/8 Rc1/4 Rc3/8 Rc1/2 Rc3/4 Rc1 Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 Recommended Unacceptable 28 to 30 Fig. 2 Binding tubes with bands 36 to 38 Wiring 4. When connecting piping to a product Avoid mistakes regarding the supply port etc. Warning 5.

ZP

Form w 1 Material e Vacuum inlet r Connection A thread Width across flats 12 10 13 A5 59 38 22 2.5 M5 x 0.8 21 8 4 16 59.5 38.5 22.5 10 13 Width across flats 7 64 38 22 2.5 16 64.5 38.5 22.5 20 25 68 42 24 3.5 32 68.5 42.5 24.5 40 72.5 46.5 28.5 6 50 73.5 47.5 29.5 20 25 A8 M5 x 0.8 N S U F GN GS N4 N6 U4 U6 A6 M6 x 1 26 8 4 ZP Y U D2 Construction p. 117 58 42 24 3.5 M8 x 1 16 12 4 32 58.5

CNS

For details, refer to page 9-8-22.

LJ1H

8 9 Standard Motor/Horizontal Mount Specification Series LJ1H20 Dimensions/LJ1H202PA Scale: 10% 12.5 9.5 Work piece mounting reference plane LJ1 LG1 LC1 LX LC6D/LC6C Switches 110 4-M6 x 1 thread depth 15 67 20 4-M8 x 1.25 thread depth 20 8H8 depth 10 Cable entry side Body mounting reference plane 8H8 depth 8 Z section detail 130 200 52 52.5 Stroke + 150 (table movement range) Z section 22

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

4-channel Flow Monitor ( compatible)

For details of each setting, refer to page 22 to 69 of this manual. Do not touch the LCD during operation. The display can vary due to static electricity. Maintenance Turn OFF the power supply before maintenance. There is a risk of unexpected malfunction. Perform regular maintenance and inspections. There is a risk of unexpected malfunction.

HRX-OM-X071

Low temperature limit of temperature range monitoring function 22. Press the [] key. Displays Low temperature limit of temperature range monitoring function setting screen.

CRBB-OM00004

Various units 19 5.1 Switch block unit 20 5.2 Vertical auto switch unit 20 Part number for Auto switch unit 22 How to mount Auto switch unit 22 5.3 Angle adjustment unit 22 Part number for Angle adjustment unit 25 Mounting of angle adjustment unit 25 5.4 Joint unit for combining switch unit and angle adjusting unit 27 6.

LEY-OM007

/ [Nm] L[mm] [mm] LEY 16 M81.25 12.5 12 14 LEY 25 M141.5 65.0 20.5 17 LEY 32 M141.5 65.0 20.5 22 [mm] [mm] [mm] LEY 16 13 5 5 LEY 25 22 8 8 LEY 32 22 8 8 / [Nm] L[mm] LEY 16 M40.7 1.5 5.5 LEY 25 M50.8 3.0 6.5 LEY 32 M61.0 5.2 8.8 / [Nm] L[mm] LEYD LEY 16 M40.7 1.5 7 LEY 25 M50.8 3.0 8 LEY 32 M61.0 5.2 10 -44- LEYG / [Nm] [mm] M L M50.8 3.0 8 LEYG16 4 M L M61.0 5.2 11 LEYG25

MK

Note 3) When the rod is extended, the clamp stroke and rotary stroke are added to the appropriate dimensions. 4.1-18 Rotary Clamp Cylinder/Heavy Duty Series MK2 32, 40, 50, 63 MK/MK2 RSQ/RSG RSH CE1 CE2 ML2B Rear flange With arm Model E D C B G A C F A B F G D E Model ML1C 39 46 58 57.5 45 45 65 65 20 20 22 22 67 67 88 88 18 18 22 22 48 54 67 80 5.5 5.5 6.6 9 8 8 9 9 65 72 89 108 25 25 40

VQ7-6/7-8

22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size 1 Metal Seal/Rubber Seal Series VQ7-6 Prewired Connector Type 2 position single : VQ7-6-FG-SSC single (Reverse pressure): VQ7-6-YZ-SSC 120.5 120.5 68.5 52 Mounting hole 2-6.5 68.5 50 50 Manual override 42.5 42.5 13 (A port) 13 (B port)