0.1% F.S. or less, Enclosure: IP40, PSE200/300/530-560 OTHER SIZE, INSTRUMENTATION, PSE200/300/530-560, 1X, PSE200/300/530-560 OTHER SIZE, 0.57251 lb

0.2%F.S. or less, Enclosure: IP40, PSE200/300/530-560 OTHER SIZE, INSTRUMENTATION, PSE200/300/530-560, 1X, PSE200/300/530-560 OTHER SIZE, 0.16034 lb

PF2D

Port size: (inch) Output specification 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Symbol 1 2 Specification PF2D200/300 series PF2D300 series Applicable monitor unit (monitor) model Output for monitor unit + analog output (1 to 5 V) Output for monitor unit + analog output (4 to 20 mA) Refer to pages 202 and 203 for Flow Switch Precautions.

Low Profile

SX90/090 Series CAT.ES70-59A Low Profile 2/3-Port Solenoid Valve SX90/090 Series How to Order SX9 1 5 G 2-port valve q SX090 5 G 3-port valve w e r q Type of actuation w Power-saving circuit e Rated voltage r Electrical entry 1 Normally closed 2 Universal Nil Without power-saving circuit Y1 With power-saving circuit 5 24 VDC 6 12 VDC G Grommet (Lead wire length: 300 mm) Specifications Model

4/5 Port Air Operated Valve SYJA3000 Series

Lubrication Not required VFA Mounting orientation Unrestricted 300/50 Note 2) Impact/Vibration resistance (m/s2) VFRA Note 1) In case of single type, be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.

Series

mm) MN: Without lead wire L: With lead wire (length 300 mm) G: Lead wire length 300 mm + + + + W: With connector cable Note 1) LN: Without lead wire LO: Without connector MO: Without connector H: Lead wire length 600 mm + + Note) When placing an order for body ported solenoid valve as a single unit, mounting bolt for manifold and gasket are not attached.

How to Order

(With gasket and screws) Body option Electrical entry M: Main/Pilot valve common exhaust type 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Manual override Grommet L plug connector M plug connector M8 connector M: With lead wire (Length 300 mm) L: With lead wire (Length 300 mm) G: Lead wire length 300 mm MN: Without lead wire WO: Without connector cable Nil: Non-locking push

10-SYJ3000

Electrical entry 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Grommet L plug connector M plug connector M8 connector E: Push-turn locking lever type G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M: With lead wire (Length 300 mm) MN: Without lead wire WO: Without connector cable CE-compliant +Nil Q +CE-compliant Note) CE-compliant: For DC only. + + H: Lead

SYJ300

For sub-plate type, manifold type 41, S41, 42, S42, 42R, S42R (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Manual override 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Nil: Non-locking push type Grommet L plug connector M plug connector M8 connector R port P, E port G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M

Bore sizes: 25, 32 40, 50, 63 mm; Stroke lengths: 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 mm; Maximum stroke length: 1300 mm (25, 32, 40, 50 & 63 bore); Minimum operating pressure: 0.18 MPa (26 psi); Speed: 50 ~ 300 mm/sec.

CLA

S start and next stop, accuracy speCified (depending lIpon Ihe cases, but 300 rom will be the standard) sometimes will nOI come true, please take into consideration. 11 ConSlr1lclion/Pa~ts list e ~-Long stroke design Parts List Notes : I No. Description Notes Material Material No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 * Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

TMH ASD AS Maximum return speed (mm/s) 100 200 300 Speed Controller Cylinder Solenoid valve Tubing Silencer AS-FE 6 ASD230FG CJ2 SYJ500 TU0604 1 m AN11001 KE 10 16 Cylinder size AS-FG AS-FG 20 ASD330FG CM2 SYJ700 TU0604 1 m AN11001 Cylinder size 25 AS-FP 32 Values at 0.5 MPa and 20C.

Brake mechanism added

100 200 300 400 500 100 200 300 400 500 Piston speed (mm/s) Horizontal mounting Piston speed (mm/s) Vertical mounting Selection O.K. NO NO YES Is it possible for cable of stroke reading cylinder to be wired separately from the power line? Is there any influence of noise? YES NO YES NO Can the system be operated below 14.5 mT? Do not use it since it will result in a miscount.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Fittings & Tubing Air Cylinders Rotary Actuators ARP20(K) 1021 ARP20(K) 1021 Rc1/4 0.50 0.25 0.45 0.40 Outlet pressure (MPa) Outlet pressure (MPa) 0.35 Set point 0.30 0.20 0.25 0.20 0.15 0.10 0.05 0.15 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.00 0 50 100 150 200 250 300 Flow rate (L/min (ANR)) Inlet pressure (MPa) 1021 1021 ARP30(K) ARP30(K) Rc3/8 0.50 0.25 0.45 Air Preparation Equipment 0.40

3

Please contact SMC to check if the valve can be used in the application by providing the relevant fluid circuit. 223 VXS Series For Steam Dimensions/Body Material: C37, Stainless Steel Grommet Conduit terminal 34 D Q2 S2 F F Q 300 D 40 (42) 32 25 a h e Built-in full-wave rectifier type T R E (With surge voltage suppressor) C R E d g J C G1/2 f j J 2 x M depth 5 H B1 B 2 x M depth 5 H B1

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

Stability of suction position,

Qmax 55.5 C = Qmax: Max. suction flow rate [L/min (ANR)] C: Conductance [dm3/(sbar)] 397 Model Selection Vacuum Equipment Selection Example 7 P Transfer of Semiconductor Chips Selection conditions: (1) Workpiece: Semiconductor chips Dimensions: 8 mm x 8 mm x 1 mm, Mass: 1 g (2) Vacuum piping length: 1 m (3) Adsorption response time: 300 msec or less 1.

Vacuum Pad

Thus, from the formula on the front matter 9, the adsorption response time is as follows: T = (V x 60)/Q = (0.0031 x 60)/1.7 = 0.109 seconds = 109 msec It is possible to confirm that the calculation result satisfies the required specification of 300 msec. Front matter 15 Model Selection 8 Data #Selection Graph Selection Graph (2) Piping Capacity by Tube I.D.

Refrigerated Air Dryer

Terminal block K L H M N J 4-13 P [200 VAC specification] Power cord outlet (17) [100 VAC specification] Power cord (mm) A B C D E F G H J K L M N P Q Port size Model IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E 69 101 270 32 21 330 413 38 150 3/8 226 410 240 15 51 232 138 24 327 125 67 304 33 73 31 36 154 21 330 473 1/2 13 453 283 275 498 455 15 270 31 80 230 32 15 240 80 284 42 3/4 355 300