Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 5 to 40 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: G, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 0.5 to 4L/min, Flow Adjustment Valve: None, Thread: Rc, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: None, Thread: NPT, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: G, Port Size: 3/8, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Rated Flow Range: 2 to 16 L/min, Flow Adjustment Valve: Flow Adjustment Valve, Thread: G, Port Size: 1/2, Output Specification: OUT1: Analog 4 to 20mA, Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Units on Label: Instantaneous Flow Rate: L/min; Accumulated Flow: L; Temp: °C, Bracket: Bracket, Calibration Certificate: -, Made to Order: -

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R Width across flats 10 Width across flats 2 F E D C Y 2 A B Additional dimensions by stroke (mm) Dimensions/10mm stroke (mm) H I J Q: 4 Q: 6 Stroke Y I E A B C D F H J Model R S R S 20 +10 +38 +28 ZPR10F10-0-A10 30 10 12 10 12.5 23.4 39.5 50.5 84.5 1.5 +20 +48 23 ZPR13F10-0-A10 40 13 15 +30 +84 10.4 20.6 12.8 21.6 10.5 13 23.9 40 51 85 2 +54 ZPR16F10-0-A10 50 16 18 +40 +94 ZPR 20/25/

Lubrication Equipment

(Example) 23-R 1000cm3 tank 12 14 20 1 1 2 2 1 4 1 1000cm3 tank with switch (Bottom limit ON) 80 90 1 2 2 1 VY 1000cm3 tank with switch (Bottom limit OFF) Metal bowl With drain cock Nylon bowl (Including sight glass) Metal bowl with level gauge JIS Symbol G Thread Rc(PT) NPT G(PF) N F AL Option Combinations Available Not available Accessary, options Options Symbol 1 1S-1 1S-2 2 3 6 8 R 1

3 Port Solenoid Valve

The pressure differential between 3 (R) and 1 (P) is the maximum operating pressure differential for each type. 2 (A) 1 (P) Air supply (positive pressure) Vacuum pad Vacuum supply 3 (R) 2 Metal joint 2) Vacuum retention Please consult SMC if the allowable leakage is limited when the valve is used for vacuum retention of a vessel, even within the low vacuum range (1.33 102 Pa or above).

Compact Cylinder with Air Cushion

A A' A' R H R H Piston seals Wide size variations from 20 to 100 Model Counting Rod end configuration Standard stroke Auto switch 15 20 25 30 40 50 75 100 R(D)Q20 R(D)Q25 20 to 100 Direct mount auto switch 32 to 100 rail mount auto switch Through hole Double end tapped Foot type Front flange type Rear flange type Double clevis type R(D)Q32 R(D)Q40 Female threads Male threads R(D)Q50 R(D)Q63

CY1

7 e #3 #4 @1 @2 r t #1 @9 !2 o !1 #0 !4 #2 !3 !

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

(Same surface) 70 + 50 (n 2) n = 2, 4, 6, 8 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 85 + 50 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 With 1 pc. 70 75 80 85 90 10 With 2 pcs.

Compact Cylinder with Air Cushion Series RQ

D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63-30 -40 -50 -75 -100 R(D)QB80-40 -50 -75 -100 R(D)QB100-40 -50 -75 -100 9 8 9.5 13.5 15.5 10 15 17.5 776 Compact Cylinder with Air Cushion Series RQ Construction 20 to 40 With auto switch (Built-in magnet) A part 50 to

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size 3 4 5 6 1/8 standard 1/4 standard 3/8 standard 1/2 standard 07 09 11 13 06 08 10 12 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Type Port size 3 Universal Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2

IDX-OM-M050

1 1 . 2 Options of product . 1 2 1. 2. 1 Anti-corrosive treated copper tube (option C) . 1 2 1. 2. 2 Medium pressure type (option K) . 1 2 1. 2. 3 Metal name plate (option P) . 1 2 1. 2. 4 Ground fault circuit interrupter (option R) . 1 2 1. 2. 5 Timer type solenoid valve with auto drain (option V) . 1 2 1. 2. 6 Ventilation direction . 1 2 1 . 3 Name and function of parts . 1 3 Chapter 2

Electro-Pneumatic Valve NVEP/NVEF Series

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l

IDX-OM-W013

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 4 2 3 Cautions about Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W034

2 2 Installation . 2 2 2 2 1 Location . 2 2 2 2 2 Tie Down . 2 3 2 2 3 Air piping . 2 3 2 2 4 Drain Tube . 2 3 2 2 5 Electric Wiring . 2 4 2 3 Cautions for Reinstallation . 2 6 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation