Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: Flow Adj. Valve: None; Stop Valve: None, Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 20 (2 to 16 L/min), Return Unit Components: W (w/Flow Adj.
), Calibration Certificate: None, Series: Z (Flow Range: 04: 0.5 to 4 L/min , 20: 2 to 16 L/min, 40: 5 to 40 L/min, 11: 10 to 100 L/min)
Type: Speed Controller, Body Material: [Resin] Resin, Control Method: Meter-Out, Format: [Elbows] Plug-In Type, Environment, Applications: Standard, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Others, Applicable Tube O.D. mm(mm): 4, Body Size: M5 Standard
Type: Speed Controller, Body Material: [Resin] Resin, Control Method: Meter-In, Format: [Elbows] Plug-In Type, Environment, Applications: Standard, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Others, Applicable Tube O.D. mm(mm): 4, Body Size: M5 Standard
Type: Speed Controller, Body Material: [Resin] Resin, Control Method: Meter-Out, Format: [Elbows] Plug-In Type, Environment, Applications: Standard, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Others, Applicable Tube O.D. mm(mm): 4, Body Size: 01 Standard
Type: Speed Controller, Body Material: [Resin] Resin, Control Method: Meter-In, Format: [Elbows] Plug-In Type, Environment, Applications: Standard, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Others, Applicable Tube O.D. mm(mm): 4, Body Size: 01 Standard
Type: Quick Exhaust Valves, Body Material: [Resin] PBT, Input Side, Port Type P (P1): One-Touch Couplings, Output Side Port Type A: One-Touch Couplings, Exhaust Side Port Type R: One-Touch Couplings, Sonic Conductance IN -> OUT [dm3/(s/bar)]: 0.34, Applicable Tube O.D. d (inch): -, Applicable Tube O.D. d (mm): 4, EXH port: With Exhaust Port Fitting
Body Size: 10 (M5 Standard), Control: 1 (Meter-in), Rod and Applicable Tubing O.D.: ø4 - ø4
Body Size: 20 (01 Standard), Control: 0 (Meter-out), Rod and Applicable Tubing O.D.: ø4 - ø4
Body Size: 20 (01 Standard), Control: 1 (Meter-in), Rod and Applicable Tubing O.D.: ø4 - ø4
Body Size: 10 (M5 Standard), Control: 0 (Meter-out), Rod and Applicable Tubing O.D.: ø4 - ø4
Set Flow: 10 (1~10l/min), Thread: Rc(PT), Port Size: 04 (1/2), Terminal Box: 0 [w/o Terminal Box (Contact 1ab)], Neon Lamp: 4 [Neon Lamp (for 220VAC Green)]
Set Flow: 1~10l/min, Thread: Rc(PT), Port Size: 1/2, Terminal Box: 0 [w/o Terminal Box (Contact 1ab)], Neon Lamp: 4 [Neon Lamp (for 220VAC Green)], CE-compliant: -
Size: 2 (M5 Basis), Tube Size: Ø4, Exhaust Port: Ø4
Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GN (Conductive NBR), Vacuum Entry: A5 (Male Thread M5X0.8)
Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: A6 (Male Thread M6X1)
Pad Diameter: 10 (ø10), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A5 (M5X0.8)
Pad Diameter: 13 (ø13), Pad Styles: C (Flat w/Ribs), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)
Pad Diameter: 10 (ø10), Pad Styles: C (Flat w/Ribs), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)
Pad Diameter: 06 (ø6), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A5 (M5X0.8)