C95

2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5, D-J5 D-F5W, D-J59W D-F5BAL, D-F5NTL D-F59F D-A3, D-K39 D-G39 D-A44 D-Z7, D-Z80 D-Y59, Y7P D-Y7W D-A5 D-A6 D-A59W

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Y Z X N N Y X S + Stroke LS + Stroke ZZ + Stroke LX LZ Standard port Non-locking type manual release 45 Relief port 32, 40 (mm) LZ LX LT LD I DL B2 A 11 8 8 8 13 F Bore size H2 HC 30 28 28 25 LH LS G H H1 MM 134 104 102 102 AL K LC 22 17 17 13 B 41 32 32 26 B1 D 55 40 40 40 4 4 4 4 7 6.8 6.8 6.8 7 5.5 5.5 5 46.5 37.5 33.5 28 14 12 10 8 21 19.5 19.5 15.5 29.3 27 24 50 45 45 41 6 6 5 8 8 8

Rotary Clamp Cylinders

0.8 mA or less 3-wire NPN PNP IC circuit, Relay, PLC 5, 12, 24 VDC (4.5 to 28 V) 10 mA or less 28 VDC or less 40 mA or less 0.8 V or less at 10 mA (2 V or less at 40 mA) 100 A or less at 24 VDC Operating position .

Air Cylinder Series CA2

MM 16 22 24 10 55 M14 x 1.5 13 25 12 38 55.5 3 x 18l Polished round 12 40 Y-04D +0.3 +0.1 CJ1 E1 NX NZ L CJP 16 27 28 14 60 M18 x 1.5 15 27 12 38 55.5 3 x 18l Polished round 12 50, 63 Y-05D +0.3 +0.1 D1 CJ2 28 37 36 18 71 M22 x 1.5 19 28 18 55 76.5 4 x 25l Polished round 18 80 Y-08D +0.3 +0.1 A1 L1 U1 CM2 30 83 37 40 21 83 M26 x 1.5 21 38 20 61 4 x 30l Polished round 20 100 Y-10D +0.3 +0.1

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

4.5 80 ZPT80H-B10 82 16.5 28 M10 x 1.5 4.5 Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 Model A 63 ZPT63H-A16 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 1191 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Width across flats 60 M16 x 1.5 70 Hexagon width across flats 22 4 x M5 x 0.8 1/8 (Rc, NPT, NPTF) Width across

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

Applicable bore A J L B C D E F G H 0.25 K 1/4-28 NY-075 0.51 1/4-28 0.94 1.18 0.69 0.25 0.51 0.71 0.16 3/4", 7/8" NY-106 0.51 0.25 5/16-24 5/16-24 0.94 1.18 0.69 0.25 0.51 0.71 0.19 1 1/16" NY-125 0.75 0.38 7/16-20 7/16-20 1.31 1.69 0.94 0.38 0.75 1.02 0.25 1 1/4", 1 1/2" NY-G050 0.75 0.38 1/220 1/2-20 1.32 1.69 0.94 0.38 0.75 1.02 0.31 2" Material: Carbon steel Jam nut (Rod thread) (in)

Integrated Controller

(Red Green Red) Electrical entry direction In-line Wiring type 3-wire 2-wire Output type NPN PNP Applicable load IC circuit, Relay, PLC 24 VDC relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 V) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA (2 V or less

CJ5-S

18.3 20 20 5 8 19 5.5 2.5 33 20 42 8 5 28 M5 x 0.8 M12 x 1.0 12.5 9.5 47 75 R V Double clevis style (D): CJ5DS Piping port 2-M5 x 0.8 Clevis pin ( ) CDH9 + 0.030 0 Dd9 0.030 0.060 NB GA GB MM CA CB D NA A U BA S + Stroke BB H 0 0.3 CX + 0.2 + 0.1 R Z + Stroke ZZ + Stroke 0 0.3 CD (Cd) A BA BB CA CB CX D GA GB H MM NA NB R S U Z ZZ Bore size (mm) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7

CJ5-S

) 10 15 15 12 17 14 3.3 3.2 4 8 18 28 M4 x 0.7 12.5 22.5 5 46 8 82 87 16 15 18.3 18.3 20 20 5 6.5 5 8 23 28 M5 x 0.8 12.5 27.5 8 47 10 85 93 Clevis pin and snap ring are shipped together. 10-14-8 9 Stainless Steel Cylinder Series CJ5-S Accessory Dimensions Single Knuckle Joint Clevis Pin Knuckle Pin MM L ND hole H10 L l t t l t t m m R1 m m d Dd9 d Dd9 0.1 0.3 NX + 0.2 0 A1 U1 RE A B L1

Basic type / Direct mount type Series CY3B/CY3R

56 64 M2 26 85 96 M3 28 56 64 Model CY1H10 CY1H15 CY1H20 Model CY1H25 CY1HT25 CY1HT32 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm CY1S 10 10 2 2.5 3 4 5 3 4 5 CY1H10 CY1L M3 2 CY1H10 1.5 1 1 CY1H 0.5 0.5 70 100 300 500 1000 70 100 300 500 1000 M1 M2 Piston speed mm/s Piston speed mm/s CY1F Graph (3) Graph (2) CYP Moment generated by the workpiece weight even when the cylinder

Dual Rod Cylinder Series CXSJ/CXS

22 20.5 14.5 24.5 30.5 34 (32.5) 23 (21.5) 36 24.5 28 17 27 38 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Electric Actuator

120 180 16 (32) 24 (48) 32 (64) 40 (80) 3.5 17 14 14 28 28 40 40 130 210 Note) ( ): Long stroke Features 17 Controller/Driver Controller Driver Step data input type For step motor Programless type Pulse input type Step data input type For servo motor Series LECP1 Series LECPA Series LECP6 Series LECA6 Control motor Control motor Control motor Control motor Step motor (Servo/24 VDC) Servo

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

28 NN 2 2 3 3 3 GA 13 13 29 39 49 HA 16 26 20 28 28 I 9 9 9 16 9 J 17 27 37 48 65 K 21.5 31.5 41.5 51.5 61.5 M 42 52 62 80 90 Z 41.5 51.5 61.5 79.5 89.5 ZZ 64 74 84 102 112 13-/22-MXQ6L-10 13-/22-MXQ6L-20 13-/22-MXQ6L-30 13-/22-MXQ6L-40 13-/22-MXQ6L-50 Note) Note) Note) Refer to the bottom view of MXQ6-30. 1322803 MXQ 1322Air Slide Table Dimensions: MXQ6L / Symmetric Type 1322Axial piping

CA2

Cotter pin size CJ1 Flat washer 16 M14 x 1.5 13 55.5 3 x 18l Polished round 12 22 25 24 12 55 38 40 Y-04D +0.3 +0.1 CJP CJ2 16 M18 x 1.5 15 55.5 3 x 18l Polished round 12 27 27 28 12 60 38 50, 63 Y-05D +0.3 +0.1 CM2 28 M22 x 1.5 19 76.5 4 x 25l Polished round 18 37 28 36 18 71 55 80 Y-08D +0.3 +0.1 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

10

x 2 28.5 34 25 +0.084 0 32 0.10 0.30 Y-03MNote 1) 32 20 30 M10 x 1.25 10 16 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-04MNote 1) 40 22 40 M14 x 1.5 11 19 10 +0.058 0 14 +0.30 +0.10 28 0.10 0.30 Y-05MNote 1) 50, 63 28 50 M18 x 1.5 14 24 14 +0.070 0 20 +0.30 +0.10 40 0.10 0.30 Y-08MNote 1) 80 40 65 M22 x 1.5 20 34 22 +0.084 0 30 +0.30 +0.10 60 0.10 0.30 Y-10MNote 1) 100 40 65 M26 x 1.5 20

CXS

36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

24

52 128 200 300 42 54 92 128 178 100 M12 x 1.75 24 28 100 17.5 32.5 89 64 210 90 236 188 210 166 48 72 148 220 320 35 47 85 121 171 124 M14 x 2.0 28 11 MGPL (Ball bushing) MGPA (High precision ball bushing) A, DB, E Dimensions MGPM (Slide bearing) A, DB, E Dimensions [mm] [mm] Bore size [mm] A DB E 50 st or less Over 50 st 200 st or less Over 200 st 50 st or less Over 50 st 200 st or less

Compact

27.3 25A(28) 27 20 Motor cable length 300 102 0.3 LEC 7.5 LEC S Note 1) [ ] for when the direction of return to origin has changed.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

H W2 W1 K E E H J K L1 L1 L2 L2 M W2 Model t W1 M 4 3 6 10 8 12 19 25 LQ3P11 LQ3P12 LQ3P21 LQ3P31 LQ3P32 LQ3P41 LQ3P51 LQ3P61 M 11 6 14 10 9 14.5 23.5 22.5 56 58 8 16 17 16 7 20 17 16 20.5 28 27 67 69 8 21 24 H (E,E) (E,E) 21 7 25 22.5 19.5 24.5 39 36 83 89 8 26 28 L1,L1 KK L2,L2 24 32 41 9 9 10 29 37 49 24 22 30.5 44.5 42.5 96 100 117 136 8 13 13 32 41 50 36 43 55 Panel hole diameter K 26.5

Battery-less

1100 48 to 1400 48 to 1500 Actuator specifications Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.08 Lost motion [mm]*3 0.1 or less Equivalent lead [mm] 48 48 48 Impact/Vibration resistance [m/s2]*4 50/20 Actuation type Belt Guide type Linear guide Operating temperature range [C] 5 to 40 Operating humidity range [%RH] 90 or less (No condensation) Motor size 28