Length of gripping point: 25mm Operating pressure: 0.4MPa Model selection illustration When gripping a work piece as in the figure to the left and with the following definitions, F: Gripping force (N) : Coefficient of friction between attachments and work piece m: Work piece mass (kg) g: Gravitational acceleration (= 9.8m/s2) mg: Work piece weight (N) F F F F the conditions under which the
) G H 1 2 23 32.3 (A, B port) 1/8 0.8 1.6 16.2 (20) 15 EA P EB 28.1 [32] For manifold gasket positioning 22.2 die-cast hole (P, EA, EB port) 1/8 27.2 32.5 20.5 23 32.3 L plug connector: L SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector: M SY5120-M(-F ) DIN terminal (D): C4, N3 C6, N7 C8, N9 SY5120-W0(-F ) 1 2 M8 connector (W0): C4, N3 C6, N7 C8, N9 1 2 C4, N3 C6, N7 C8, N9 1 2 SY5120
2-1.8 (For monifold mounting) (Light/surge voltage suppressor) Bracket 2-3.2 equivalent (For mounting) (18.5) 28 [35] + (18.5) 22.1 13.5 12.6 15 (11.5) 0.5 10 R P R 1.2 (PE port) 14 M5 x 0.8 (P, R port) L plug connector (L): SYJ3220-L-M3 (-F) M plug connector (M): SYJ3220-M-M3 (-F) M8 connector (W0): SYJ3220-W0-M3 (-F) Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1]
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations
Pressure Setting Item Default setting [F 3] Setting of response time 2.5 ms Measurement mode The power is supplied [F 4] Setting of display resolution 1000-split Safety Instructions [F 5] Setting of auto-preset Manual The measurement mode is the condition where the pressure is detected and indicated, and the switch function is operating.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
override 34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For manifold mounting) (Light/Surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.
Blue .012 F-2815-121-NORYL Green .014 F-2815-141-NORYL Orange .016 F-2815-161-NORYL Grey .017 F-2815-171-NORYL Brown .019 F-2815-191-NORYL Red .020 F-2815-201-NORYL Dk.