ZMA

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nozzle diameter C C CN Lead wire length 0.6 m Lead wire length 3 m No lead wire 05 0.5 mm 07 0.7 mm 10 1.0 mm 13 1.3 mm 15 1.5 mm ZL Refer to Table (2) for lead wire with 4-wire connecor.

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Male Connsctor Plug-in Elbow 01 ,/g -/92 05 -/1 07 ,4 1 0 1 1 l l 1 1 3t ' o ' Pr. SAE propoad 3pci{icrto.i, all mal ttr.ad8 wltl incorporEt6 1 3 1; Male Branch Union 'Y" 18 " Note: 1/8 tub sizes ar6 de6onatEd by a KO sdos pad numb6( end arc not covgred undr tho OOt or SAE pcificetions, shce OOT doe not spcity prirmanc Fquiromehls.

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Use a tishrenirE toqu of 0.05-0.rN.m(05-1.o2kgl.cm)-As a rcuqh guide, tishten the screw thrcush a flrih. 9d after teelins a tisht screv, (M2.5 x 4x ) Compact Guide Cylinder : Series MGQ XBII long stroke 32, 40. 50, 63, 80, 100 Same specifrcations as page 1. 125 ,150 ,17 5,20A MGQM . MGQL Common Dimensions World Wide QS\E Support...

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:l EgLr oA50, 54 6$ lu8f.2l 1tLJ Bore size ds2iRSf Qi:a 32lln D 1-05 5l!

MU

Size B d d C l 0.040 0.076 0.040 0.076 0.040 0.076 0.050 0.093 8 10 10 14 M10 X 1.25 19.6 21.9 25.4 31.2 16.5 18 21 26 25 32 40 50, 63 6 7 8 11 23 27 31 38 25 32 40 50, 63 17 19 22 27 7.6 9.6 9.6 13.4 18.2 22.2 26.2 32.2 CD-MU02 CD-MU03 CD-MU04 CD-MU05 NT-03 NT-MU03 NT-04 NT-05 M12 X 1.25 M14 X 1.5 M18 X 1.5 A nut is attached with rod end male thread as standard.

DOT/J844 Nylon Tubing

Tube Size Packaging Table 01 03 05 07 09 11 13 15 19 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 3/4 Tube Size Type A (Monowall) Type B (Reinforced) TIV01 TIV03 TIV05 TIV07 TIV09 TIV11 TIV13 TIV15 TIV19 3/4 1/8 5/32 3/16 1/4 5/16 3/8 1/2 5/8 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 33 77 153 305 Length (Meters) S S S S S S S S

Table of Contents - Tubing

characteristics chart 4 to 140F (20 to 60C) (With no condensation) Nylon 11, Nylon 12 Shore D 70 Burst Pressure Characteristics Chart 1305 Burst Pressure psi 1015 725 T0425, T0604 Other than T0425, T0604 435 Max. operating pressure (T0425, T0604) 145 0 4 32 70 105 140 Operating temperature F Max. operating pressure (Except T0425, T0604) TUB-4 Polyurethane Tubing (Inch) How to Order TIUB 05

ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) D-A3/A4/K3/G3 D-A5/A6/F5/J5 D-Z/Y D-P5DWL 32 BMB2-032 40 BMB2-040 63 BMB1-063 50 BMB1-050 80 BMB1-080 100 BMB1-100 BT-03 BMB4-032 BMB3T-040 BT-05 BMB4-050 BMB3T-050 BT-06 BMB4-063 BMB3T-080 6-12-2 Series C95 Specifications Bore size (mm) 32 40 63 100 50 80 Action Double acting Fluid Air 1.5 MPa Proof pressure 1.0 MPa Max. operating pressure 0.05 MPa Min. operating pressure

AS

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 5 32" Control type 04 06 08 10 12 03 05 07 09 11 13 3 16" Meter-out Meter-in 0 1 AS-FG 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

Vacuum Module: Ejector System Series ZX

Release flow rate adjusting needle Ejector exhaust PV/V port size 05 07 0.5 mm 0.7 mm With silencer Port exhaust Rc Common exhaust (Manifold only) 1 Nil Nil Y M5 x 0.8 L Without lock nut 1 8 2 (1) 10 1.0 mm M6 x 1 (Option) With lock nut 3 (2) Vacuum switch electrical entry Note 1) When port exhaust is applied to the manifold, pilot exhaust is done by common exhaust.

ZM

How to Order ZM L Nozzle diameter 05 07 10 13 15 0.5 mm 0.7 mm 1.0 mm 1.3 mm 1.5 mm Release flow rate adjusting needle CE compliant Nil Q Nil L Without lock nut CE compliant With lock nut Compatible with release valves only. Vacuum port location Made to Order Refer to pages 1004 to 1006 for details.

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Note) Metric size 23 04 06 08 10 12 Inch size 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Made to Order (For details, refer to page 622.)

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVC How to Order Valves (Single Type) LVC LVA LVC 2 0 06 S LVH Option Body class Nil None LVD 1 With flow rate adjustment Body class Orifice dia. Symbol 2 With bypass ø4 2 2 Valve type LQ2

Inch sizes Metric 3, 4, 6 6, 8, 10 10, 12 19, 25 12, 19 03 05 07 11 13 19 25 1/8 3/16 1/4 3/8 1/2 3/4 1 Inch Valve type Symbol Type 1/4, 3/8 3/8, 1/2 3/4, 1 1/2, 3/4 1/8, 3/16, 1/4 Basic type N.C. PB PA PA N.O. PB B A B A B A Basic size With reducer Note) Applicable fittings for body class 6 is LQ1. N.C. N.O. Double acting Double acting With flow rate adjustment PA PA N.C.

Integral Fitting Type (Hyper Fittings) Series LVD How to Order LVC LVA LVD 1 0 03 S LVH Body class Option LVD Orifice dia. Body class Nil None Symbol 1 Valve type 1 1 ø2 With flow rate adjustment LVQ 2 2 2 ø4 With bypass 0 N.C. 3 3 With flow rate adjus

Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05

Regulator for Chemical Liquids Series LVR

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

Clean Regulator/Fluororesin Type SRF Series

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 04 06 08 10 12 19 03 05 07 11 13 19 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable

Series VV100 /D-sub Connector 3 Port Solenoid Valve Plug-in Connector Type Manifold

3 Port Solenoid Valve Series VV100/D-sub Connector Plug-in Connector Type Manifold How to Order Manifold U 1 VV100 10F C6 05 D A 2 D-sub connector type Mounting option Symbol A B Number of poles Symbol Mounting Connector block mounting position: D side 15 26 Manifold direct mounting type Nil Connector entry direction Upward Valve stations A: D-sub connector 15 pins With mounting nut M3 x

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 ø0.5 Part no. Symbol Applicable tubing O.D. 07 ø0.7 KJS23-M5 ø3.2 (Straight) 1 Solenoid valve combination (Refer to Table (1).) KJS04-

Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 07 0.5 0.7 Applicable tubing O.D. Part no. KJS23-M5 KJS04-M5 KJL23-M5 KJL04-M5 Symbol 1 2 4 5 3.2 (Straight) 4 (Straight) 3.2 (Elbow) 4 (Elbow) Solenoid valve combination (Refer to Table (1).)

Series ZB Compact Vacuum Unit

Latching Symbol 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 50.8 psi (0.35 MPa) 72.5 psi (0.5 MPa) 00 Note 1) 58 psi (0.4 MPa) 65.3 psi (0.45 MPa) Supply Valve/Release Valve Electrical Entry Note 4) 1 Single unit 03 04 05 06 0.3 mm PV, PD 0.4 mm PV, PD common port (PV = PD) L-type plug connector With lead wire 0.5 mm L 0.6 mm Note 1) Vacuum pump system only L-type plug connector Without

Vacuum Saving Valve Series ZP2V

Vacuum Saving Valve Series ZP2V How to Order ZP2V 03 A5 Connection thread symbol for the pad Fixed orifice size Male thread connection Applicable fixed orifice size Fixed orifice size (mm) Symbol Thread size Symbol 0.5 0.3 0.7 1.0 03 05 07 10 A5 A8 A01 AG1 AN1 0.3 M5 No.0.8 M8 0.5 R1/8 0.7 Male thread G1/8 1.0 Pad side NPT1/8 Female thread connection Applicable fixed orifice size Symbol