Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 3/8, Voltage: 24VDC, Lead Wire: Grommet Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/2, Voltage: 100VAC 50/60HZ, Lead Wire: DIN Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: Rc, Port Size: 1/2, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 3/8, Voltage: 24VDC, Lead Wire: Conduit Terminal, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 3/8, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPT, Port Size: 1/2, Voltage: 24VDC, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Size: ø15, Valve Type: 1 [NC (Operating Pressure 1MPa)], Sealant: NBR, Thread: NPTF, Port Size: 1/2, Voltage: 110VAC 50/60HZ, Lead Wire: Conduit Terminal w/Light & Surge Voltage Suppressor, Manual Override: Non-locking Push Style, Bracket: Bracket, X200: -, CE Compliant: -

Modular F.R.L. Units

For AC10-A For AC20-B For AC25-B For AC30-B For AC40-B For AC40-06-B For AC50-B For AC55-B For AC60-B For AC10A-A For AC20A-B For AC30A-B For AC40A-B For AC40A-06-B For AC50A-B For AC60A-B For AC10B-A For AC20B-B For AC25B-B For AC30B-B For AC40B-B For AC40B-06-B For AC50B-B For AC55B-B For AC60B-B For AC20C-B For AC25C-B For AC30C-B For AC40C-B For AC40C-06-B For AC20D-B For AC30D-B

Smooth Cylinder/Low Speed Cylinder

A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

5

D-K39 D-K39C D-A5m D-A6m D-A3m D-A3mC D-A44 D-A44C Auto switch model D-G5m D-K59 D-G5NT D-G5mW D-K59W D-G5BA D-G59F D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-B5m D-B64 D-A9m D-A9mV D-A59W D-F5NT D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B A B 40 9 9 5 5 2.5 2.5 4.5 4.5 2 2 5.5 5.5 3 3 10.5 10.5 0 0 1 1 0 0 50 9.5 8.5 5.5 4.5

SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

CA2

A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 40 37 38.5 69 81 69 71.5 31.5 81.5 38 31.5 73 3.5 1.5 6.5 4.5 0 0 0.5 0 2 0 4 2 11.5 9.5 50 42 42 77 86.5 77 76.5 35.5 86.5 42 35.5 78.5 6 5 9 2.5 1.5 3 2 8 4.5 3.5 6.5 5.5 14 13 63 49 46.5 91 93.5 91 83.5 43 93.5 47 43 85.5 9.5 7.5 4.5 12.5 6 4 6.5 4.5 8 6 10 8 17.5 15.5 80 107 57.5 53.5 107

REA/REB

LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

CE

phase J 24-M3 x 0.5 A B C D t A COM COM COM B DC12V GND F.G.

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

A B A B A B A B A B A B A B A B A B A B 40 10 8 6 4 4 1 5.5 3.5 3.5 0.5 0.5 0 1 0 7 4 2.5 0 4.5 1.5 12 9 50 10 8 6 4 3.5 1.5 5.5 3.5 3 1 0 0 0.5 0 6.5 4.5 2 0 4 2 11.5 9.5 63 12.5 11.5 8.5 7.5 6 5 8 7 5.5 4.5 2.5 1.5 3 2 9 8 4.5 3.5 6.5 5.5 14 13 80 16 14 12 10 9.5 7.5 11.5 9.5 9 7 6 4 6.5 4.5 12.5 10.5 8 6 10 8 17.5 15.5 100 17.5 16.5 13.5 12.5 11 10 13 12 10.5 9.5 7.5 6.5 8 7 14 13 9.5

CY1

(except for 50 and 63) b C CY1B6 -SCY1B, #1 CY1B10 -SCY1B, #2 CY1B15 -SCY1B, #3 CY1B20 -SCY1B20, #1 CY1B25 -SCY1B, #4 CY1B32 -SCY1B, #5 CY1B40 -SCY1B, #6 CY1B50 -SCY1B, #7 CY1B63 -SCY1B, #8 H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Brake mechanism added

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-