Nominal Size: 100mm, Stroke: 200mm, Size: L (High Flow Style), Control Valve: 1 (Speed Controller), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 63mm, Stroke: 100mm, Size: S (Small Flow Style), Control Valve: 3 (Speed Controller For Minimal Flow (CCVS Only)), Combination Valve: 3 (Skip Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 100mm, Stroke: 100mm, Size: S (Small Flow Style), Control Valve: 0 (None), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Nominal Size: 160mm, Stroke: 200mm, Size: L (High Flow Style), Control Valve: 0 (None), Combination Valve: 2 (Stop Valve), Voltage: 1 (100VAC), Electrical Entry: C (Conduit)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 32222 (32x222, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 4 (Cassette Type Full MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 2 (Cassette Type Standard), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 22 (Two Axes Bellows, Applicable Wafer Size 200mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 46236 (46x236, Applicable Wafer Size 200mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: High Vacuum Slit Valve, Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 3 (Cassette Type Half MESC), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Type: P (Parallel Seal Slit Valve), Valve Size: 31 (One Axis Bellows, Applicable Wafer Size 300mm), Valve Type: 1 (Non-Cassette Type), Opening Window Size: 50336 (50x336, Applicable Wafer Size 300mm), Gate O-ring Material: 1 (FKM), Auto Switch & Connector: C (2 pcs D-A93 w/Multiple Connector)
Solenoid: No.2 Solenoid, Body Option: 7 (32A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 12 [1 1/4 (35A)], Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.3 Solenoid, Body Option: 8 (40A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 40 (Flange 40A), Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.1 Solenoid, Body Option: 3 (10A), Style: 0 (Energized Open/N.C.), Option: C (Brass or BC6, Copper Body & Shading Coil, PTFE Seal, Class B Coil), Port Size: 02 [1/4 (10A)], Thread: Rc, Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)
Solenoid: No.3 Solenoid, Body Option: 8 (40A), Style: 0 (Energized Open/N.C.), Option: Brass, Copper or BC6 Body & Shading Coil, NBR Seal, Class B Coil, Port Size: 14 [1 1/2 (40A)], Thread: N (NPT), Voltage: 1 (100VAC 50/60HZ), Lead Wire: C (Conduit)