SMC Corporation of America
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0.1 Outlet50Hz Return port 0.0 0 10 20 30 Circulating fluid flow [L/min] Fig 9.6-1 Pump capacity(HRS018/030--20-R) 9.6.2 HRS018-A-20-T-R, HRS030-A-20-T-R 0.8 80 0.7 70 available area Circulating fluid pressure [MPa] 0.6 60 Pump head[m] 0.5 50 Outlet: 60Hz 0.4 40 0.3 30 Outlet: 50Hz 0.2 20 available area 0.1 10 Return port 0.0 0 0 5 10 15 20 25 Circulating fluid flow [L/min] Fig 9.6-2 Pump

VBA VBAT AP100 841 VEX13 Series 0 3 Specifications VEX1A33 VEX1B33 VEX113 0 3 VEX123 0 3 VEX133 0 3 VEX153 0 3 VEX173 0 3 VEX193 0 3 Model Port 1(P) 2(A) 3(R) M5 01 M5 01 01 02 01 02 03 02 04 04 06 10 12 14 10 20 1 8 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 2 3 4 2 1 1 1 1 1 Port size M5 M5 1 2 4 1 4 1 2 Operation Manual knob (Push locking slotted type) and Air operated type Manual knob (Push locking

1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C

Load Rotary actuator Flexible coupling Bearing Fig. (9) Flexible coupling 28 - Piping and operating direction Fig. (10) shows piping ports of the rotary actuator. Table (9) shows the port size. Table (9) Port size Size Port size 30 M5 50 Rc1/8 63 Rc1/8 B Port 80 Rc1/4 100 Rc3/8 A Port Fig. (10) Port location A fixed throttle is installed inside the actuator port.

: M-5N Width across flats 7 Width across flats 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Effective area: 4.0 mm2 Effective area: 4.0 mm2 Weight: 3.6 g Weight: 1.5 g Universal Nipple: M-5UN Bulkhead Union: M-5E M5 x 0.8 M8 x 0.75 Width across flats 8 M5 x 0.8 Mounting hole Width across flats 10 Width across flats 10 Width across flats 8 Mounting plate thickness 3.5 max.

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 1 2 Flow characteristics 2 3 V100 Valve model C[dm3/(sbar)] 0.037 0.076 0.054 0.099 C[dm3/(sbar)] 0.054 0.099 0.037 0.076 b 0.11 0.070 0.35 0.23 b 0.35 0.23 0.11 0.070 Cv 0.0080 0.016 0.015 0.024

Output deviation (%F.S.) 0.5 0.5 Out VE 40 0 0 Return VY G 60 0.5 0.5 AL 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Input signal (%F.S.)

Pad Diameter Vacuum Inlet / Mounting Buffer Stroke Page 20 25 35 50 Pad Unit 2 Male thread M5 x 0.8, M12 x 1.75 G1/8, G1/4, G3/8 With Adapter 3 Female thread M5 x 0.8 M8 x 1.25 With Buffer Female thread Vacuum inlet: M5 x 0.8, Rc1/8 Mounting: M10 x 1, M14 x 1 10 mm/20 mm 6 I N D E X Vacuum Pad 20, 25, 35, 50 M Pad Unit How to Order p. 2 Dimensions p. 2 M Vertical Vacuum Inlet, With Adapter

(mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q Note Hard

mA (2 V or less at 40 mA) 4V or less 0.8 V or less at 10 mA (2 V or less at 40 mA) Current leakage 0.8mA or less 100A or less at 24 VDC 0.8mA or less 100A or less at 24 VDC Indicator LED Red LED illuminates when turned ON.

of the rated voltage 12 V 10% of the rated voltage 100 V 10% of the rated voltage 110 V*1 [115 V] 10% of the rated voltage [15% to +5% of the rated voltage] 200 V 10% of the rated voltage 220 V*1 Allowable voltage fluctuation AC [230 V] 10% of the rated voltage [15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) 100 V 0.78 (With light

of the rated voltage 12 V 10% of the rated voltage 100 V 10% of the rated voltage 110 V*1 [115 V] 10% of the rated voltage [15% to +5% of the rated voltage] 200 V 10% of the rated voltage 220 V*1 Allowable voltage fluctuation AC [230 V] 10% of the rated voltage [15% to +5% of the rated voltage] Power consumption [W] DC 0.35 (With light: 0.4) 0.35 (With light: 0.45) 100 V 0.78 (With light

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 10 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

(Refer to Copy function on page 8.) 3 Series ZSE10(F)/ISE10 Dimensions ZSE10(F)/ISE10 M5 6.4 (7.7) (30) 2 x 3.3 M5 x 0.8 (12) 1.2 25 13 3.5 9.8 51.8 4.2 ZSE10(F)/ISE10 M5R 1.2 6.4 25 51.8 4.2 9.8 4.5 M5 x 0.8 4 Digital Pressure Switch Series ZSE10(F)/ISE10 ZSE10(F)/ISE10 01 6.4 2 x 3.3 1.2 Width across flats 10 Width across flats 12 11 13 13 25 3.5 8 R1/8 9.8 12.5 51.8 4.2 ZSE10(F)/ISE10

AXT662-1(1: M5, 2: M3) 1 2 Sub-plate Optional parts Gasket, screw: VQ100-GS-5 Note) 1 set includes: 1 gasket and 2 screws. Purchasing order is available in units of 10 pieces. 4-12-9 Series VQ100 How to Order Valves VQ1 1 0 5 L M5 Series VQ Compact 3 port valve Port size Type of actuation Without sub-plate With sub-plate With sub-plate Nil M3 M5 1 N.C. (Normally closed) N.O.

Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Port size lll5 10-32 Nom. (M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.