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Applicable manifold base Plug-in type With attachment plug lead wire: Type 51G Description Component parts Manifold block u, Junction box i, Lead wire assembly o Tie-rod y, O-ring e, r, Seal A q VVZS2000-1A-1-Port size (1) Manifold block assembly Manifold block u, Tie-rod y, O ring e, r, Seal A q Non plug-in type: Type 51 VVZS2000-1A-2-Port size (1) Plug-in type With D-sub connector: Type

1 e q !3 y !1 q @7 CXSJM20 to 32 CXSJL20 to 32 @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !5 t #0 Rod cover Head cover Rod cover Head cover Parts List: Standard Piping No. Description Material No.

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

q A (43) OUT IN e e 150 r B t 120 327 188 (519) w w 84 OUT 2-R 1 r IN 53 DRAIN G 1/4 Note Parts list Dimensions (mm) A B No.

Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5

N.O. q IFW50--75/76 e Color of lead wire Black Symbol Contact q w Power supply (Common) w Red Terminal (Relay terminal) 24 VDC Gray e Power supply (Light terminal) N.O. N.C. q IFW50--85/86 e Color of lead wire Black Symbol Contact q w Power supply (Common) White Terminal (Relay terminal) w 24 VDC Gray e Power supply (Light terminal) N.C. N.O.

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 L L VXA K VN K Conduit terminal: T LVC LVA F (Q) 34 LVH LVD LVQ 25 U LQ R C LVN G1/2 TI/ TIL E B A H D 2-P Port size (S) PA 2-M Thread depth N PAX L PB K (mm) Electrical entry P Port size B C A D E F H K L M N Grommet:G Conduit:C Conduit terminal:T Model Q R Q R Q R S U 13.5 28 64 1/8 31 6.5

Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area [mm] P: Pressure drop rate (P1P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

Nozzle Diameter: ø1.0, Exhaust: 3 [Common Exhaust (Only Manifold)], Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch

Nozzle Diameter: ø0.7, Exhaust: 2 [Port Exhaust Rc(PT) 1/8], Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: None, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch: Vacuum Switch, PNP

Nozzle Diameter: ø1.0, Exhaust: 2 [Port Exhaust Rc(PT) 1/8], Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch:

Nozzle Diameter: ø0.5, Exhaust: Silencer, Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug w/o Lead Wire, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch: Vacuum Switch, PNP, Lead

Nozzle Diameter: ø0.5, Exhaust: Silencer, Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug Lead Wire: 0.3m, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch: Vacuum Switch, PNP,

Nozzle Diameter: ø1.0, Exhaust: Silencer, Valve: K1 [Supply Valve: Solenoid (NC)/Release Valve: Solenoid (NC)], Pilot Valve: DC 1W (With Light: 1.05 W); AC or None in Case of No Valve, Voltage: 24VDC, Electrical Entry: L Plug w/o Lead Wire, Surge Suppressor: Light+Surge Suppressor, Manual Override: Non-locking Push Style (Or None if Air Operated or No Valve), Switch: Vacuum Switch, PNP, Lead

Nozzle Diameter: ø0.7, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: M (0.35 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: B (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual

Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor)

Nozzle Diameter: ø1.3, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: A (Side Entry), Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: A (Supply Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: H (Grommet Type w/0.6m Lead Wire), Light/Surge Voltage Suppressor: None, Manual Override: Non-locking Push Style

Nozzle Diameter: ø1.3, Body Style: 5 (Manifold w/Individual SUP Valve), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor