VPA4

Symbol 0 P Side 1 E Side Side Bottom (1) Side Other A, B Side 9 Note 1) Size of A, B port bottom ported: Rc 3/8, 1/2 Option Stations Base specifications 2 1 Individual exhaust Common exhaust 02 2 stations 10 10 stations How to Assemble Manifold To order valves and blanking plate assembly mounted onto the manifold, list valves and blanking plate assembly with manifold base part number.

VXH

2 VX3 ) VXA How to Order VN VXH2230 02 1 G LVC LVA Bracket Nil B 3 -B JIS Symbol LVH LVD Valve/Body 0 3 ' +0 Electrical option Nil 3 LVQ S ( L LQ Z + ( Port size 6 ( 2 (-' LVN 02 03 04 6 +" 6 &+$ 6 +! TI/ TIL Electrical entry G 8 PA Rated voltage C ) 2 ! >) +# = 1 >) +# = D 543 PAX T ) 3 >) +# = 6 ( 4 !! >) +# = PB 7 !"

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other than the above are produced upon receipt of order.

Stainless Steel Regulator Series NSR

Test data available upon request. 40-140'F (5 -60"C) Non relieving type (Standard), 'Relieving type (NSR1101, NSR1, NSR3101, NSR3111, NSR4101, NSR4111) only applicabl icr N2 gas or air HolIY TO ORDER F luid / Diaphrag m M aterinl a I allvt size M5-10-32Nom(t!

VQZ100/200/300

VQZ300 Port size Symbol VQZ200 VZ 1 One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 8 One-touch fitting for 10 M5 thread Rc (PT)1/4 C4 C6 C8 C10 M5 02 Metal seal Rubber seal 1 (P) 3 (R) VT (A) 2 N.O. 2 VT 1 (P) 3 (R) Note 1) Refer to p.2.10-18 for inch size Onetouch fittings. VP (A) 2 N.C. 3 VG 1 (P) 3 (R) Manual override (A) 2 N.O.

LZ-OM004xx

F G H [Tightening torque] No.LZ-OM00401 B (1/3) Electric Cylinder LZC series L[]ZC[]3[] 1.5 8 M4 x 0.7 x 6 deep [0.75Nm ] L[]ZC[]5[] 3 13 M5 x 0.8 x 8 deep [1.5Nm ] L[]ZC[]3[] M4 screw 0.75Nm M4 screw 0.75Nm L[]ZC[]3[] 4.5 8 2 7.5 11.5 12 L[]ZC[]5[] 6.5 13 3.2 10.7 16.7 15 L[]ZC[]5[] M5 screw 1.5Nm M6 screw 2.6Nm Model no.

AMPSeries

hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10

Exhaust Cleaner for Clean Rooms AMP Series

hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

AU

AU200/300 Effective thread depth 6.5 4-M5 x 0.8 AU200, 300 Float type auto-drain Port size H G F E D C B A Model Port size 1 4 / 3 8 AU200 / 50 70 61 30 40.5 31.5 164 165 AU300 50 70 61 30 40.5 31.5 188.5 165 14-3-12

AMP

hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10

        Series VKF300

01 M5 x 0.8 Rc 1/8 (A port) For the port size 01 only.

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for

Fluid: compressed air, Noise reduction: 25-35 dB(A) or more, Maximum operating pressure: 1.0MPa, Effective area mm 2 (Cv): AN*00 35-960 (1.9-53); AN*02 35-90 (1.9-5.0); AN*03 10-60 (0.6-3.3), Ambient and fluid temperature: 5 - 60 C, MUFFLER, M5 (NOM 10/32), AIRLINE EQUIPMENT, AN SILENCER, AB, AN M5, .01000 lb, Model SpecificationsPort size (1)Noise reduction (dB (A))FluidMax. operating

Series LECSB/LECSC/LECSS Absolute Type Series LECSA (Pulse Input Type/Positioning Type) Incremental Type AC Servo Motor Driver (Pulse Input Type) (CC-Link Direct Input Type) (SSCNET III Type)

Pulse input type/Positioning type (For incremental encoder) A LECSA LECSB LECSC LECSS Pulse input type (For absolute encoder) B Compatible motor type CC-Link direct input type (For absolute encoder) Encoder Capacity 100 W 200 W 400 W 100 W 200 W 400 W Type AC servo motor (S2) AC servo motor (S3) AC servo motor (S4) AC servo motor (S6) AC servo motor (S7) AC servo motor (S8) Symbol C S1 S3 S41

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 16 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 14 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 7 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: S (Solenoid on Same Side as A Port), Piping: 41 (Base Mounted), Stations: 12 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)

Valve Mounting Direction: Solenoid on Side Opposite to A Port, Piping: 41 (Base Mounted), Stations: 12 Stations, A Port Size: M3 (M3X0.5 Type 41, S41)