Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: Y [DIN Terminal w/Connector (DIN 43650C)], Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: G, Option: Side Bracket

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M Plug Connector w/o Lead Wire, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: G, Option: Side Bracket

Type of Actuation: 3 Position Exhaust Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: M Plug w/o Connector, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: G, Option: Side Bracket

Type of Actuation: 2 Position Double, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: YO [DIN Terminal w/o Connector (DIN 43650C)], Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: G, Option: Side Bracket

Type of Actuation: 2 Position Double, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 24VDC, Electrical Entry: Grommet Lead Wire 0.3m, Lead Wire Length: None, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: G, Option: Side Bracket

Type of Actuation: 3 Position Closed Center, Manifold Type: Body Ported Plug-in Integrated, Pilot: Internal Pilot, Specifications: Standard, Voltage: 110VAC 50/60HZ, Electrical Entry: DIN Terminal w/Connector, Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: Body Ported 1/8, Thread: G, Option: Side Bracket

Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Drip-Proof / Lubrication Free, Valve Type: 5-Port Valve, Actuation: Double, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Applicable Cylinder Diameter(Ø): -, Pipe Port Type: G, Port Size: 1/8, Connecting Tube Diameter: -,

of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: WO (M8 Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: F (G), Option: F2

Type of Actuation: 2 (2 Position Double), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: YO [DIN Terminal w/o Connector (DIN 43650C)], Lead Wire Length: None, Surge Suppressor: None, Manual Override: Non-locking Push Style, A, B Port Size: 01 (Body Ported 1/8), Thread: F (G), Option: F2 (Side Bracket

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Straight Symbol Port size Rated flow range 1 2 5 10 25 50 100 200 01 Rc1/8 V V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight w Flow adjustment valve/Piping entry direction valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V

LG1H

Applicable strokes: 150, 250, 350 Example) LG1H2021PA-150-F2-X2 100 5.3 8.3 400 7.7 12.0 5 to 40 (with no condensation) 200 6.1 9.6 300 6.9 10.8 mm kg kg C kg N mm/s mm Standard stroke Aluminum Stainless steel Body weight Operating temperature range Work load Rated thrust Maximum speed Performance 30 180 500 0.02 AC servomotor (100W) Incremental system Ground ball screw 15mm, 10mm lead High

5 Port Air Operated Valve Series SYA3000/5000/7000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 5 16" One-touch fitting for VR F2 With side bracket Series One-touch

5 Port Air Operated Valve Series SYA3000/5000/7000 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Nil Without bracket 1 4" One-touch fitting for One-touch fitting for 4 One-touch fitting for 6 One-touch fitting for 4 SYA7000 F1 With foot bracket (2 position single only) SYA3000 5 16" One-touch fitting for VR F2 With side bracket Series One-touch

E-P HYREG ® Series VY1 1

VY1A00 1, VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply (P to A) valve of valve y and the exhaust (A to R) valve close due to the balance between actuating forces F1 and F2.

E-P HYREG

VEX SRH VY1A00 1 , VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply [1(P) to 2(A)] valve of valve y and the exhaust [2(A) to 3(R)] valve close due to the balance between actuating forces F1 and F2.

DOC1023125

Methods of interrupting operation . 52 Alarm detection . 53 . Parallel signal output for the alarm group . 53 . Alarm details . 53 Troubleshooting . 57 Specifications . 62 . Basic specifications of the product . 62 . Parts Description . 63 . Power supply connector Specification . 64 . I/O connector specification . 65 .. Details of parallel input/output signals . 65 ..

High performance type Step Motor Controller (Servo/24 VDC)

INP is turned ON. 53 No.JXC-OMY0002-A 11. Alarm Detection The details of the alarm can be checked using the controller setting software or the teaching box. Please refer to the manuals of the controller setting software or the teaching box for details of the alarms.

SFOD-OMT0005CN

(PLC ) No. (01-051) <> (1)( )1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2 [2](P.53) No. B RESET <>(+) (-) (JOG ) <>(+) (-) (01-052) B RESET -63- () 12 (12 0 ) (2) (3) (4) (5) (6) (7) Alarm _Comment _058 (01-058) 3A B RESET <>No.

Step Motor Driver （ Pulse input type ）

Operation (example) . 52 9.1 Positioning operation . 52 9.2 Pushing operation . 53 9.3 Actions after pushing operation . 54 10. Operation instruction . 56 (1) Power on Return to origin . 56 (2) Positioning operation . 57 (3) Pushing operation . 58 (4) Alarm reset. 59 (5) Deviation reset . 59 (6) Stop (EMG) . 59 (7) Area output . 60 11.