5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported M5 thread) VV5QZ12lll VQZ1l20 VQZ1l21 addition Rc(PT) 1/8 Top VQZ1000 2 to 20 stations per 1 station: 18 SY 2 stations: 86 C4(4) C6(6) M5(M5 thread) VQZ2l20 VQZ2l21 addition Rc(PT) 1/8 Top VQZ2000 2 to 20 stations SYJ VV5QZ22lll per 1 station: 26 SX 2 stations: 181 C6(6) C8(8) C10(10) Rc(PT)1/4 VQZ3l20 VQZ3l21 addition Rc(PT) 1/4 Top VQZ3000 2 to 20 stations VK VV5QZ32lll per 1 station: 53
M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size Collar part arrow ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 8.5 14.4 15.5 50 15 17.5 24 12.5 22.5 53 26 48 Metric size Inch size 15.2 6 8 Transparent cover 9.5 16.6 17.5 61 16 19.5 27 13.5 24.5 65 28 52 57 8 10 18.5 11 18 21.5 65 17 21 29.5 14.5 27 69.5 30 3 16 ZFB101-05 ZFB101-07 ZFB201
Filter unit (F) ZX100-K8-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 8.8 4.8 1 10 19 Filter unit (Mounting hole) 13-2-53 53 Series ZX Vacuum Pump System/Manifold Specifications Function Max. number of units 8 units Vacuum supply from PV port of the manifold is common supply. Air supply from PS port is common supply.
mm Height: 1.81 in / 46 mm , Length: 2.83 in / 72 mm, Width: 2.09 in / 53 mm, Height: 1.81 in / 46 mm, Net Weight: .44 lbs. / .2 Kg Series Configured Datasheet.
Stations: 8 Stations, Port Size: L6 (ø6 One-touch Fitting, Top Ported Elbow), S Kit: SEB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Polarity: Positive Common, Option 1: None, DIN Rail Length: Standard (or None if w/o DIN Rail), Option 2: S (Built-in Silencer, Direct Exhaust)
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 3 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 4 Stations, P,E Port Location: D Side, SUP/EXH Block: Internal Pilot, A,B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 6 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A,B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: U Side, SUP/EXH Block: Internal Pilot, A,B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow, Mounting: D (DIN Rail Mounting w/o Name Plate)
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 12 Stations, P,E Port Location: B (Both Sides), SUP/EXH Block: R (External Pilot), A,B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Series: SS5Y3 (SY3000 Manifold), Model: 10 (Side-Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 6 Stations, P,E Port Location: U Side, SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A,B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 5 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 6 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Model: 10 (Side Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 8 Stations, P, E Port Location: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Model: 10T (Side Ported), Type: None, Valve Stations: 2 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 12 Stations, P,E Port Location: B (Both Sides, 2 to 24 Stations), SUP/EXH Block: S (Internal Pilot, built-in Silencer), A,B Port Size: L6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate)
Model: 10T (Side Ported), Type: C (Spring Type), Valve Stations: 5 Stations, P,E Port Entry: D (D Side), SUP/EXH Block Assembly: Internal Pilot, A,B Port Size: L6 (ø6 One-touch Fitting, Elbow, Upward, Metric)
Model: 10 (Side Ported), Number of Cores - Lead Wires: L1 (34 Cores), Lead Wire Length: 3 (3m), Valve Stations: 5 Stations, P, E Port Locations: U (U Side), SUP/EXH Block: Internal Pilot, A, B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow
Model: 10 (Side Ported), Number of Cores - Lead Wires: L2 (17 Cores), Lead Wire Length: 1 (0.6m), Valve Stations: 8 Stations, P, E Port Locations: D (D Sides), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow, Mounting: AA (Direct Mounting, Name Plate w/Station Number)
Model: 10 (Side Ported), Number of Cores - Lead Wires: L2 (17 Cores), Lead Wire Length: 3 (3m), Valve Stations: 3 Stations, P, E Port Locations: U (U Side), SUP/EXH Block: S (Internal Pilot/Built-in Silencer), A, B Port Size: L6 (ø6 One-touch Fitting), Upward Elbow