Modular F.R.L. Units

industries u u Alcohol Ethyl alcohol IPA Methyl alcohol Antifreeze Adhesives u Oil Gasoline Kerosene u Ester Phthalic acid dimethyl Phthalic acid diethyl Acetic acid Synthetic oil Anti-rust additives u Ether Methyl ether Ethyl ether Brake oil additives u Amino Methyl amino Cutting oil Brake oil additives Rubber accelerator u u Others Thread-lock fluid Seawater Leak tester u : Essentially

AC Servo Motor Driver (Pulse input type/Positioning type ）

Connect the driver power output (U/V/W) to the servo motor power input (U/V/W) directly. Do not let a magnetic contactor, etc. intervene. Otherwise, it may cause a malfunction. CAUTION Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U V V M V M V W W W W 3 2 3.

0.4

VVQ2000-3A-1<U-Side End Plate Assembly> y U-side end plate assembly no.

VQ5000

How to Order Manifold L 03 VV5Q 5 1 Option 08 U Option None Exhaust cleaner for Rc 1: D side exhaust Exhaust cleaner for Rc 1 1/2: D side exhaust Exhaust cleaner for Rc 1: U side exhaust Exhaust cleaner for Rc 1 1/2: U side exhaust Symbol Nil CD1 CD2 CU1 CU2 Series Electrical entry Cable (Length) 5 VQ5000 D U D side entry U side entry 0 1 2 Cable length 0.6 m Cable length 1.5 m Cable length

AC Servo Motor Driver

U CNP3 CNP3 V V W W 10 3 10.

AC Servo Motor Driver (Network card type ）

(U/V/W).

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Table of Contents

2 @7 t y o u @8 r #2 @1 @2 @5 @4 @3 CY1HT32 @6 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 No. !8 !

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Component Parts Replacement Parts No. u Description Material Part no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

/2 T T T DN: DIN terminal without connector WN: M12 connector E U E U T T [mm] Size Port size A B C D E F I K L M 70 1 1/4 132.6 26.5 42 125 21 51.5 43.5 67.5 57.5 53 80 1 1/2 139.3 30 42 132 21 54.5 46.5 72 60 60 90 2 150.3 35.5 42 150 21 59 52 81 69 71 Size Port size Grommet Grommet with PCB Conduit DIN terminal DIN terminal without connector M12 connector T U T U T U T U V T U T U 70

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

(b) Connection of driver and servo motor 1) The servo motor power supply terminals (U, V, W) of the driver match in phase with the power input terminals (U, V, W) of the servo motor. Driver Servo amplifier Servo motor U U V V M W W 2) The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

Hydraulic

U B A Approx. U A B D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NTL D-F7BAL SMC SMC Approx. U Approx. U Approx. U SMC SMC Approx. U A B B A Approx. U D-A73C D-A80C D-J79C B A A B Approx.

Aluminum High Vacuum Angle Valve

U type: DC only.

REA/REB

Dynamic moment MQQ M U: Maximum speed U RHC Calculation Example MK(2) Operating Conditions Cylinder: REAH15 Mounting: Horizontal wall mounting style Maximum speed: U = 300 [mm/s] Load weight: W = 1 [kg] (Except weight of arm section) L1 = 200 [mm] L2 = 200 [mm] W RS Q G RS H A L2 L1 RZQ Item Load factor n Note MI W S CEP1 1.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

0 B A u !7 !6 y q w t !5 r e i u !2 !3 In-line motor type: LEY D 25 32 63 !2 #0 @9 When rod end male thread selected u u !0 @6 @7 @8 @7 @5 Component Parts No. Description Material Note No.

Rotary Actuator

[mm] MSZ Size H N U UU 50 39 15 114 134 63 45 17 136 158 80 55 20 165 190 100 60 25 190 220 Size H N U 50 30 15 105 63 33 17 124 80 43 20 153 100 44 25 174 CRQ2X MSQX H MRQ FT F U Double shaft with key: ClRA1FY Double shaft with four chamfers: ClRA1FZ Note) Other dimensions are the same as the basic type.

REA/REB

Dynamic moment MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com U: Maximum speed U RHC Calculation Example MK(2) Operating Conditions Cylinder: REAH15 Mounting: Horizontal wall mounting style Maximum speed: U = 300 [mm/s] Load weight: W = 1 [kg] (Except weight

JXCx-OMT0023

Connection of driver and servo motor The servo motor power supply terminals (U, V, W) of the driver should match in phase with the power input terminals (U, V, W) of the servo motor. Driver Servo amplifier Servo motor U U V V M W W The power supplied to the driver should not be connected to the servo motor power supply terminals (U, V, W).

5 Port Solenoid Valve

U side D side B B Note) Do not enter the SI Unit part number and the end plate part number together.