VEX1

A B T1209 (12) DL12-02 C AS420 AN300 T1209 (12) DL12-03 VEX3 2 3 4 D AS420 AN400 SGP elbow 90 1 2 B SGP B 1 2 E AS420 AN400 90 elbow F G AS500 AN500 AN600 SGP B 90 elbow 90 elbow 90 elbow VEX350 3 4 SGP1B SGP1B AS600 VEX30 Port VEX31 VEX32 External pilot External pilot H AS600 AN600 I VEX370 External pilot Pilot exhaust Pilot exhaust SGP1 B 90 elbow 90 elbow 90 elbow 1 4 SGP1 B SGP2B AS700

5 Port Air Operated Valve

port] 12 11.5 1/8 [4 (A), 2 (B) port] (4) 26.4 5 5 B 2 B 2 26.4 12 12 1/8 (Pilot port: Upward) 1/8 (Pilot port: Upward) 4 A 4 A 5 (1.6) 11.5 45.5 (6) 40.5 55.5 1502 VFA1000/3000/5000 Series 5 Port Air Operated Valve Body Ported/Single Unit Dimensions: VFA3000 Series/Body Ported 2 position single VFA3130(-F)(-P) 01 02 2 position double VFA3230(-P) 01 02 63.5 23 1/8, 1/4 [4 (A), 2 (B) port

Hand Valve Series VH 1

Model JIS Symbol 2 position Port size Rc Number of positions Piping direction Model Effective area (mm2) Weight (kg) Series Body mounted Panel mounted (A) 2 (B) 4 VH210-02 VH200-02 3 (Closed center) 4 0.42 VH2 1 (P) 3 (R) VH211-02 VH201-02 3 (Exhaust center) 7.5 1/4 2 VH212-02 VH202-02 2 (Position) 3 1 Closed center VH300-02/03 VH310-02/03 3 (Closed center) (A) 2 (B) 4 4 3 VH301-02/03 VH311

Hand Valve Series VH

Model JIS Symbol 2 position Port size Rc Number of positions Piping direction Model Effective area (mm2) Weight (kg) Series Body mounted Panel mounted (A) 2 (B) 4 VH210-02 VH200-02 3 (Closed center) 4 0.42 VH2 1 (P) 3 (R) VH211-02 VH201-02 3 (Exhaust center) 7.5 1/4 2 VH212-02 VH202-02 2 (Position) 3 1 Closed center VH300-02/03 VH310-02/03 3 (Closed center) (A) 2 (B) 4 4 3 VH301-02/03 VH311

42

Connector location on U side (FU) 3.5 163 10.7 47 106 71.7 9 9 U side 27 Manual override n X 12 12 2 B 4 A 8 2 B 4 A A A B A B A B A B A B A 7 SMC SMC SMC SMC SMC SMC SMC A A A A A A A B B B 2 B 4 A Indicator light 6 2 B 4 A 5 L2 L1 2 B 4 A 4 B B 2 B 4 A 3 2 B 4 A 2 P = 25 2 B 4 A 1 50.5 44 X Stations 38 27 Connector location on D side (FD) 11.7 16.2 139.9 (Single) 43.2 49.7 D side 148.9

Size: 1/2, Reverse Flow Function: Standard, Thread: M Thread, Rc(PT), Port Size: 1/4, Accessory 1: -, Accessory 2: -, Option 1: -, Option 2: -, Option 3: -

Prevents Micro-Bubbles

A B 2-P C L L C A B A B LVA10 2-F B B K LVA60 LVA20 With flow rate adjustment With indicator (Max.

High Purity Chemical Valve

LVC B A B A B A PB Double acting N.C. N.O. Double acting LVA With flow rate adjustment PA PA N.C. B A PB B A Double acting LVH N.C. Double acting With bypass PA PA N.C. LVD PB B A B A Double acting N.C. Double acting With flow rate adjustment & bypass LVQ PA PA N.C. PB B A B A Double acting N.C. Double acting LQ1 With indicator PA N.C. B A LVN N.C.

0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

13

7.8 7.8 7.8 9.6 9.6 10.7 10.7 15.8 31.5 32.8 12 27 35 12 15.8 31.5 32.8 12 27 35 12 Screw-in connection Model A B C D E F G H Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05DS-01-01-01 ZH05DL-01-01-01 ZH07DS-01-01-01 ZH07DL-01-01-01 ZH10DS-01-01-01 ZH10DL-01-01-01 ZH13DS-01-02-02 ZH13DL-01-02-02 73.5 41.5 29.5 12 3.2 12 14.2 14.2 73.5 41.5 29.5 12 3.2 12 S type: White

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Elbow type Meter-out AS3201F-02 Meter-out AS3311F-02 Meter-out AS3301F-02 Component Parts Component Parts No.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

A, B port) (Light/surge voltage suppressor) 80 [87] 57.5 [64.5] + 64.6 42.1 36.5 25.5 20 12 43.6 22 22 11.5 34 18 1/4 (R1, R2 port) 31.5 63 L plug connector (L): SYJ7240-L01 02 M plug connector (M): SYJ7240-M01 02 DIN terminal (D): SYJ7240-D01 02 M8 connector (W0): SYJ7240-W001 02 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 91 83.5 57.5 [64.5] 72.2 42.1 M8 x 1 62 57.1 (

Hand Valve Series VH

Models Symbol Model Weight (kg) Body mounted Panel mounted 2 Position Number of positions Piping direction Effective area (mm2) (Cv factor) Series Port Size (A) 2 (B) 4 VH210-02 VH200-02 3 (Closed center) 1 (P) 3 (R) 4 3 (Exhaust center) 7.5(0.4) 0.42 VH211-02 VH201-02 1/4 VH2 Closed center 2 2 (Position) VH212-02 VH202-02 (A) 2 (B) 4 3 1 3 (Closed center) VH300-02, 03 VH310-02, 03 1 (P)

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

52-SY7140 (R) -TTMax.10 02 03 L 135 (Lead wire length) Lead wire marking No.1 (+), No.2 () 0.75 mm2 5.9 17 ATEX Compliant Base Mounted Type Series 52-SY7000 Dimensions 2-position double L plug connector (L) 52-SY7240 (R) -L21 22.5 02 03 13.5 4 61 41.7 2 x 4.3 (Mounting holes) M5 x 0.8 (External pilot port) 21.5 21 Manual override 38 4 Insulation: Black () B A 23 23 E P B A 46 X Insulation

Soft Start-up Valve

)-A AVA5000-(F,N)06~10(B,G,S)(-R,Z)-A AVL2000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL3000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL4000-(F,N)02(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A AVL5000-(F,N)06~10(B,G,S)-(1~6)(D,Y,DO,YO,WO)(Z)(-R,Z)-A Contents Page 1.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 P 1 P 1 X A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN

Standard Combinations

Metal bowl B B B B B Dimensions B B N.C.: Gray N.O.: Black B 1/8 1/4 10 One-touch fitting Barb fitting Applicable tubing: T0604 M5 x 0.8 Width across flats 17 Width across flats 17 Standard specifications Bracket mount Model Port size A B C D P E F G H1 H2 J K L L M (1) (1) (1) (1) ACG20 ACG30 ACG40 1/8, 1/4 126 87 36 60 28.5 41.5 43 30 24 5.5 3.2 1/4, 3/8 167 115 41 80 30 55 57 41 35 35

Speed Controller with One-touch Fitting

-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4 23.4 32.7 (32.8) AS221F-02-08(S)A 8 13.2 23.9 33.2 (33.3) 14.2 19 (20) AS221F-02-10(S)A 10 15.9 26.9 36.2 (36.3) 15.6 20 (21) AS321F-02-06(S)A 6 1/4 17 (17.5) 13 13.3 40 (40) AS321F-02-08(S)A 8 13.2 22.7 33 14.2 41 (41) AS321F-02-10(S)A 10 15.9 26.7 37 35.7 15.6

Fieldbus system EtherCAT compatible SI Unit

DX#B DY#B DM#E AXA AYA LBB1 SEC3 System Valve 32 Diag. Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 Unit 6 Diag.

I

ZSE5-02-27L Two Output NPN Open Collector 30V, 80mA ZSE5-02-67L Two Output PNP Open Collector 80mA ISE5-02-26L None (Analog Output) 1~5V(5%F.S.)