Ejector Valve Unit, Series ZYY/ZYX

Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)

LEC-T1_C

115 - 5 () 116 - 9.3 50mm 9.4 ( ) 117 - 9.5 9.6 D 100 9.7 118 - 10.

Smooth Cylinder Series CQSY

Smooth Cylinder Minimum 0.01 to 0.03 MPa operating pressure Minimum Minimum 0.01 to 0.03 MPa operating pressure 0.04 Minimum operating pressure MPa 12 16 0.03 20 25 32 40 0.02 50 63 80 100 0.01 0 0 10 20 30 40 60 50 70 80 90 100 Bore size mm (Measurement based on JIS B8377) Series CQSY/CQ2Y/CM2Y/CG1Y/CA2Y 12 to 25 32 to 100 20 to 40 20 to 100 40 to 100 Stable operation possible even at a

Compact End Lock Cylinder Series CBQ2

Series CBQ2 Allowable Kinetic Energy Allowable Rod End Lateral Load 0.5MPa 0.4MPa With rubber bumper With auto switch (lateral resistance) 200 100 100 50 50 40 30 Allowable lateral load W (N) 63 20 Load weight kg 50 10 63 40 32 10 5 4 3 50 5 2 40 1 0 10 20 30 40 50 60 70 80 90 100 32 Stroke St (mm) 1 50 100 200 500 300 Maximum speed mm/s (Mounting orientation: Horizontal) W

Rotary Actuator NCRA1 Series Single Rack and Pinion

8363C.A5 & @l w Gommd DA8 ,n e), s63 121t2) 00 {3 1/8), 0100 (a) HailTyp DA5 O D-46 o : Available, X: Nol avilad NCDRAIBW3o-O-A7 Re e d Sw ilc h Spe c ific atio ns [od6l I}472 D{72H tra?t. BATTI D Tdl sr80 , &ttdr &r51 tr56 trt6,w D-lft Rday, Seqlericer lC CircLiil Applc.ton Rlay, Sequenc6r tc Cir!

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Option J: With drain guide Bracket (Option) female thread Maintenance space Drain M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 166 187 187 218 218 241 241 277 334 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100

IP80-OM00019

E 4 IP8100 7 3 (1) (2) (1) 3-1 IP8000 3-1-1 IP600IP6000IP600IP6000 6 L 5 7 6 L 7 5 3-1-2 (1)50%(50%) 100% 0% (2)1030 50% 100% (0%) 8 (3)9 ( ) () () () 9 8 3-2 IP8100 3-2-1 IP610,IP6100IP610IP6100 IP6100H() OUT1 OUT2 OUT1 OUT2 10 11 10 11 3-2-2 (1) (P368010-23) (2) IP610 ( (P368010-24) M81.25 12 3-2-3 (1) ()DA ()RA DA RA 0 0 (2) () () 13 (3) A (4) (3.6 4.1N.m

AMG

Options J: With drain guide M Mounting Dimensions Model Port Size (Nominal size B) A G F E D C B S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 R 4.5 5 5 5 5 9 9 10 12 Q 26 28 28 34 34 50 50 60 76 P 70 84 84 100 100 110 110 130 180 O 54 66 66 80 80 88 88 102 136 N 35 40 40 50 50 55 55 65 85 L 9 12 12 14 14 14 14 16 20 K 5 8 8 8 8 10 10 10 15 J 15 20 17 22 19 25 21 30 40 I 56 66 66 80 80 90 90 100

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 1000mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 1000mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: P (Air Pressure Lock-up)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 125mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 150mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 250mm, Option: J [Nylon Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 350mm, Option: J [Nylon Tarpaulin, Cushion: Both Sides (Air-hydro has No Cushion)], Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 350mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: P (Air Pressure Lock-up)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 75mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: P (Air Pressure Lock-up)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 900mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: D (Built-in), Mounting: F (Front Flange), Style: Aluminum Tube, Bore Size: 50mm, Thread: Rc, Stroke: 200mm, Option: N [w/o Rod Boot, w/o Cushion (Not Valid for Air-hydro), Lock Operation: D (Spring/Air Pressure Lock)