Slit Valve XGT Series For 200 mm wafer For 300 mm wafer 529
Setting of the contact input signal 1 delay timer of reading Setting range: 0 to 300 seconds to Setting/Checking: Contact input signal 1 OFF detection timer 35. Press the [SEL] key once. Setting screen of contact input signal 1 OFF detection timer is displayed on the digital display. PV SV 36.
Speed Controller Cylinder Solenoid valve Tubing Silencer Maximum return speed (mm/s) 100 200 300 6 ASD230F CJ2 VJ500 TU0604 1 m AN11001 10 Mounting 16 Cylinder size Caution 20 1. If installing flow controls to valve ports, interference may occur with the fittings. Please consult the catalog before installing.
AD27-A With bowl guard AD27-C-A AD37-A AD47-A Normally open (N.O.)
Therefore, if the target temp. is 23.0 C and 1.5 C is set in this item, the warning [WRN] arises when temp. lowers 21.5 C. H i g h T e m p . 8. High Temp. Cutoff Setting range : 11.0 to 70.0 C Min. increment : 0.1 C Indicated content : High temp. cutoff by internal temp. C u t o f f M O D E < 7 0 . 0 C sensor (Ex. : 70.0 C).
69 26 M48 x 1.5 t +0.15 0 m 40 NTH-040 22 25.4 21 10 M16 x 1.5 C 50 NTH-050 27 31.2 26 12 M20 x 1.5 Df8 63 H 0 0.15 NTH-060 32 37 31 14 M24 x 1.5 C-series 80 NTH-080 41 47.3 40 17 M30 x 1.5 C L 100 NTH-100 55 63.5 54 20 M39 x 1.5 Material: Rolled steel Bore size (mm) C L m t H Df8 Part no. 32, 40 0.016 0.043 16 CDH-04 1 62 2.5 4.8 14 50 0.016 0.043 20 CDH-05 1 76.5 3.5 4.8 18 0.016 0.043
1 Support spring Stainless steel (2) Fluid temperature C Ambient temp. C Fluid Air Liquid Non-leak Vacuum (3) (3) Solenoid Specifications Air (Std.) Oil (Std.)
(a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
Specifications Standard specifications Port size Specifications Model P1 P2 A B C D E F G H I 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 EXH IN OUT OUT EXH Model IN, OUT VHS20 VHS30 VHS40 VHS40-06 1/8 1/4 3/8 1/2 66.4 80.3 104.9 110.4 22.3 29.4 38.5 42 40 53 70 75 37.5 49 63 63 14 19 22 22 46.6 52 58 58 33.6 38 44 44 28 30 36 44 37.5 49 63 63 C(dm3/sbar) 2.4 3.3 6.4 8.3 7.3 10.9 14.2 18.3 C(dm3
Note 8) Float type auto drain: The combination of C and D is not possible.
Content B series rod C series rod 7 Piston CH2E32B-PS CH2F32B-PS 32 CH2G32B-PS Cushion ring Cushion ring nut Bushing (B series rod) Bushing (C series rod) Piston rod (B series rod) Piston rod (C series rod) Tie-rod Tie-rod nut Cushion valve Lock nut Air release valve Check ball Snap ring Back-up ring Scraper (B series rod) Scraper (C series rod) Rod seal (B series rod) Rod seal (C series
Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz.
Supplv Pressure 220 PSIG (15 Kqflcmz) Operating Pressure 22-150 PS|G (1.5-9.9 Kqf/cm2) 15-150 PS|G (1-9.9 Kqf/cm2) Ooeratino TemDerature 40-140'F (5-60'C) Bodv Aluminum Die Cast Spool & Sleeve 440F Stainless Steel, passivated & heat treated to 58-63 Rockwell C. Sleeve O-Rinqs Buna N Soacer Delrin Shock Pad Urethane Rubber Max. Cycle Rate 300 cPM Weight (Valve Body Only) oz.
IDFAE Series Dimensions IDFA3E to 15E1 A B A D E Q C F G C M N L P K 4 x 13 In case of IDFA3E IDFA4E to 15E1 Dimensions (mm) B C D E F G K L M N P Q A Model Port size IDFA3E IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 15 Rc 3/8 226 410 473 67 125 304 33 36 154 21 330 13 Rc 1/2 453 498 283 275 455 270 31 42 80 240 80 15 15 Rc 3/4 485 568 355 300 300 314 41 54 87 43 101 16 603 578 396 380 Rc 1
H B Material: Carbon steel Knuckle pin Tolerance C (f8) Order no.
mm -24No.PF-OMO0010-C Lead wire and connector (Straight): ZS-37-A Lead wire and connector (Angle): ZS-37-B Bracket: ZS-29-T -25No.PF-OMO0010-C Revision history A: Revision.