Aluminum High Vacuum Angle Valve

D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 41 113 40 38 30 35 17 23 96 60 48 129 95 62 128.5 28 43 121.5 138.5 50 48 40 40 26 25.5 63 51 120.5 97 66 121.5 154.5 40 96 113 87 66.5 38 30 35 17 23 50 121.5 138.5 89.5 69 48 40 40 26 25.5 458 XL Series Common Option 1 Heater Valve heaters are common for

42

side U side D side n n U side 8 8 Manual override 7 7 A B A B A B A B A B A A A B A B A B A B A B A A B B B A A A A A A A 6 6 5 5 215 P = 25 44 L1 L2 L1 L2 4 4 B B Indicator light 3 3 2 2 P = 25 1 1 27 38 50.5 27 38 50.5 44 Stations Indicator light Stations 11.7 D side D side U side U side 16.2 43.2 11.7 Manual override 16.2 43.2 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610

Tie-rod Type Hydraulic Cylinder

W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) B C A a d E D F G GA J K M MA MM NA P R S T V W H ZZ 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 44 18 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 50 19 50 25 9 73 53 20

V

rib Deep type Pad Dia (mm) 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16, 20, 25, 32, 40, 50 10, 16, 25, 40 Material (Color) NBR (Black) Hardness 50 shore D I M E N S I O N S PA D D I A M E T E R S 20, 25, 32 D I M E N S I O N S PA D D I A M E T E R S 2, 4, 6, 8 F L AT T Y P E F L AT W I T H R I B H : M6x1 H : M8x1 Y Model A B D C E F G I C E F G I Flat Flat with rib F L AT T Y P

Stability of suction position,

D D D D D 40 26.5 31 31 26 26 2 3 53 50 6 40 6 35 32 6 Width across flats 6 2.5 14.5 Width across flats 6 Width across flats 6 43 19 19 19 D-D D-D D-D 16 16 16 8.5 8.5 8.5 Dimensions Dimensions Dimensions Model A B ZP3E-Y32UMlJB10 66.6 110.6 ZP3E-Y32UMlJB30 91.6 135.6 ZP3E-Y32UMlJB50 111.6 155.6 Model A B ZP3E-Y40UMlJB10 66.6 110.6 ZP3E-Y40UMlJB30 91.6 135.6 ZP3E-Y40UMlJB50 111.6 155.6 Model

Table of Contents

4 6 8 10 12 3 5 10 17 25 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 2-Applicable tubing D Inch Size Weight (g) Effective area (mm2) D L M Model Applicable tubing O.D.

CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 15mm 10mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 20mm 15mm 10mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Auto Switch Proper Mounting Height [mm] Auto switch model D-B5l D-B64 D-B59W D-G5l D-K59 D-G5NT D-G5lW D-K59W D-G5BA D-G59F D-Z7l D-Z80 D-Y59l D-Y7P D-Y7BA D-Y7lW D-M9l D-M9lW D-M9lA D-A9l D-A3l D-G39 D-K39 D-A44 D-A5l D-A6l D-A59W D-Y69l D-Y7PV D-Y7lWV D-P3DWA D-P4DW D-M9lV D-M9lWV D-M9lAV D-A9lV Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Hs Hs Hs Ht 40 30 30 34 30 31 30 30 30

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

0.4

, 25 pins, 16 outputs Digital output unit EX600-DYPE PNP output, D-sub connector, 25 pins, 16 outputs EX600-DYNF NPN output, Spring type terminal box, 32 pins, 16 outputs EX600-DYPF NPN output, Spring type terminal box, 32 pins, 16 outputs EX600-DMNE NPN input/output, D-sub connector, 25 pins, 8 inputs/outputs EX600-DMPE PNP input/output, D-sub connector, 25 pins, 8 inputs/outputs Digital

Cylinder with Lock Series CNG

Note 1) Note 2) Maximum available stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm) Model Long stroke (mm) 1 pc. 201 to 350 301 to 400 301 to 450 301 to 800 25, 50, 75, 100, 125, 150, 200 D-C7, C8 D-B5, B6 D-H7 D-G5N 10mm 15mm 1500 25, 50, 75, 100, 125, 150, 200, 250, 300 15mm 10mm 20mm 20mm D-B59W D-H7LF Note 1) Intermediate strokes other than the above are produced upon receipt

2–4

Minimum Auto Switch Mounting Stroke (mm) (mm) Auto switch model Auto switch model D-F7W Bore size (mm) D-A9V D-A9 D-F9W D-F9V D-F9WV D-M9 D-A7 D-F9BAL D-A7H D-A80H D-F7 Number of auto switch D-J79W D-A8 D-F7V D-J79C D-F7WV Bore size (mm) D-A79W D-F7LF D-P5DW D-F7BAL 5 15 15 10 2 pcs. 10 10 25 D-A73C D-A80C D-F7BAVL 12 to 25 Number of auto switch D-F7NT D-J79 5 15 15 5 1 ps. 10 10 25 D-F79F

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) (n = 2, 4, 6) Note 3) D-H7 D-H7W D-H7BA D-H7NF (n 2) 2 70 + 45 (n 2) 25 + 45 70 25 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-C73C D-C80C D-H7C (n 2) 2 80 + 50 (n 2) 30 + 50 80 5 30 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) D-B5 D-B64 D-G5 D-K59 (n 2) 2 70 + 50 (n 2) 25 + 50 5 70 25 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 75 + 50 (n 2) 30 + 50 D-B59W 10 75 30 (n = 2, 3, 4,

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

25.5 15 21.5 25 23.5 27 22 28.5 18.5 15.5 11.5 13.5 17 12 Auto switch mounting heights (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL D-B5 D-B6 D-B59W D-G5NTL D-G39 D-K39 D-A33 D-A34 D-C73C D-C80C D-H7C D-A44 Bore size (mm) HS HS HS HS HS 25 28 27.5 62 72 20 27 30 29.5 64 74 25 30.5 33.5 32.5 66 76 32 34.5 37.5 37.0 70.5 80.5 40 12 Auto Switch Specifications Contact Protection Boxes: CD-P11, CD-P12

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

MLGP

Modification method D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Number of auto switches D-Y69 D-Y7PV D-Y7WV D-Y7BAL D-P5DWL Part number 20, 25, 32 1 to 349 Applicable stroke (mm) 40 to 80 5 to 345 1 pc. 15 5 10 20 25 100 25 to 345 2 pcs. 15 5 15 20 25 Part no.: MLGPM2039F A 1mm spacer is installed in MLGPM2040F. Dimension C is 77mm. Note) Model D-P5DW can only be mounted with bore sizes 40 to 100.

Air Slide Table

D A [mm] Rubber Stopper A Model A B C D E MXQ6(A) 41.5 27 22 25 20 MXQ8(A, C) MXQ6B 41.5 27 21 25 19 MXQ12(A, C) MXQ8B 46.5 28 21 27 20 MXQ16(A) MXQ12B 51.5 30 21 28 20 MXQ20(A) MXQ16B 58.5 32 22 31 21 MXQ25(A) MXQ20B 65.5 34 22 33 21 Cap bracket RJ-X2300 A cap bracket is mounted to lengthen the A dimension.

Air Fittings & Tubing

D.

7ND9071en

_/I41 (* -50 to +85 C Note *) Not allowed with external junction box (J, -40 C) ND9_E1/I09 ND9...E1/I45 -25 to +60 C -25 to +75 C -25 to +85 C ND9_E1/I56 -25 to +60 C -25 to +75 C -25 to +80 C ND9_E1/I32 -25 to +60 C -25 to +70 C -25 to +70 C Table 14 Ambient temperatures, ND9_U 9.2 Installation on a valve controller Variant type IS Class I, Division 1, Groups A, B, C, D, T4...T6 IS Class

CNA

switch model D-A44 D-A44C D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-A5/A6 D-F5W D-J59W D-F5BAL D-A3 D-G39 D-K39 D-A3C D-G39C D-K39C D-A5 D-A6 D-A59W D-A3/A3C D-A44/A44C D-G39/ G39C D-K39/K39C D-B5/B6 Bore size (mm) Bore size (mm) A B A B A B A B A B A B A B Hs Hs Hs Ht Hs Hs Ht Hs Hw Hs Hw 31 40 40 40 9.5 81 2 10.5 0 72.5 31 4 2 8.5 69 0 0.5 11.5 1.5 38 73 69 38.5 0 0 80.5 3.5 35 43.5