Serial Transmission System Series EX250 Series EX500

Enclosure IP65 Enclosure Weight (g) IP65 [For M8: 20] [For M12: 40] [8 point integrated type, for M8: 55] Note) Weight (g) 100 (Input unit + end block) Note) Not including the DIN rail weight.

.· IDU-□E-10: Single-phase: 100 V AC (50 Hz), 100/110 V AC (60 Hz).· IDU-□E-20: Single-phase: 200 V AC (50 Hz), 200/220 V AC (60 Hz).· IDU-□E-23: Single-phase 230 V AC (50 Hz).

Thermo-chiller

Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series How to Order HRL A 20 100 Power supply Cooling capacity CH1 CH2 100 9 kW 1 kW 200 19 kW 1 kW 300 26 kW 1 kW 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Cooling method A Air-cooled refrigeration Specications

SYJ300

For sub-plate type, manifold type 41, S41, 42, S42, 42R, S42R (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Manual override 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Nil: Non-locking push type Grommet L plug connector M plug connector M8 connector R port P, E port G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

ZMA

Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.

Booster Relay Series IL100

0 Exhaust portr Adjusting springe Upper diaphragmw Upper diaphragm chamberq SIG Lower diaphragmy Lower diaphragm chambert OUT IN1 Springo Valvei Pistonu IN2 56 Series IL201/211/220 Construction 2 12 IL211 IL201 1 r r e t e !2 !2 u t u w w i !9 i !9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

2 r w e i !0 !5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !

MHR2/MDHR2, MHR3/MDHR3 Rotary Actuated Air Gripper (2 Finger) (3 Finger)

2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !

Electro-Pneumatic Regulator IT1000/2000/4000

t signai VDC 1 2 3 Input signalVDC 1 2 3 Hysteresis r c 0.5 z o E ! 0 E E ,o5 5 E 1 2 3 4 lnplrl signal VDC lrpul signa VDC 1 2 3 lnput slgna!

Series VCS

E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Vacuum Saving Valve

generator used. 1 40 30 From the flow-rate characteristics of the vacuum generator (Chart 1), calculate the suction flow (Q1) of the vacuum generator from the required vacuum pressure. 20 10 e 00 10 20 30 40 50 60 70 80 90 100 110 Vacuum pressure 50 kPa (qwe) = Suction flow (Q1) 31 l/min (ANR).

CV/MVGQ

CVM5/CVM5K MXU 20 Standard 3.5-18 Double acting 25 MXS 3.5-29 32 Nonrotating rod 40 MXQ MXF Series CVM3/CVM3K 20 Standard MXW Single acting 3.5-34 25 (Spring return) 3.5-47 32 Nonrotating rod (Spring extend) MXP 40 MG Series CV3/CV3K 40, 50 63, 80 100 MGP 3.5-52 Standard Double acting MGQ Nonrotating rod 40, 50 63 3.5-63 MGG MGC Series CVS1/CVS1K 40, 50 63, 80 100 3.5-67 Standard MGF Double

Related Products: Heavy Duty Auto Drain Series ADH4000 1

AT Option: Reference Figure of Assembly ID Piping example of ball valve piping set AMG (45) (41) AFF (54) (100) AM Misc. 14-20-53

Exhaust Cleaner for Vacuum Pump AMV Series

AMV15 SP ZCUK 0.015 Inlet pressure (MPa) AMJ AFJ 0.01 AMV AMV AMV15 AMV160 AMV75 AMV37 AMV6 AMV3 ZH -X185 0.005 Related Products 0 100 200 500 1,000 2,000 5,000 10,000 20,000 Flow rate (L/min [ANR]) Dimensions AMV3, 6, 15, 37 AMV 75, 160 B Exhaust Exhaust A A B Port size IN IN C E 8 x d Flange part Model Port size A 231 305 410 710 562 860 B 123 153 210 210 500 500 C 80.7 105.3 d 19 19 E

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

Description Material Body A Elbow body Handle Body B Needle Needle guide Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring O-ring O-ring Spacer Gasket Note PBT PBT PBT Brass(1) PBT PBT Brass(1) q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 q w e r t y u i o !0 !1 !2 !3 !4 !

AMPSeries

OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2,

Exhaust Cleaner for Clean Rooms AMP Series

OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2,

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

NPN) C76 IC 5 V Grommet C73 B54 C73C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA H7NF 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Yes Connector 12 V 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC Grommet DIN terminal Diagnostic indication (2-color) 3-wire (NPN) 3-wire (PNP) IC 5 V, 12 V Grommet 12 V 2-wire Connector 3-wire (NPN) 2-wire