Siiiil"Tivrc

C N.C. dauto drain (dd AMG 150 sso) D N.O. daulo drain (dd. AMG 650 s5o) AMG 250 N I Body Size.

NVEPA|VEFseies

N272 ElectroPneu matic Valve NVEPA|VEFseies Output Pressure or Flow is Controlled By An Electrical Input Signal Amplifier Supply Voltage is 1 1SVAC or 24yDC Operating Pressure Up To 150 psig 114" lo 314" Port Sizes Base Mount or Body Ported Built-ln PID Controller is Optional NVE NVEP The conventional pneumatic valve syslem consists of ON-OFF valves which are in a deenergized or energized

25

approximately 0.4 MPa. 0.7 0.7 0.7 SUP = 0.7 MPa PA 0.6 0.6 0.6 Discharge pressure (MPa) Discharge pressure (MPa) Discharge pressure (MPa) SUP = 0.7 MPa SUP = 0.7 MPa SUP = 0.5 MPa 0.5 0.5 0.5 SUP = 0.35 MPa SUP = 0.5 MPa SUP = 0.5 MPa PA(P) SUP = 0.2 MPa 0.4 0.4 0.4 SUP = 0.35 MPa SUP = 0.35 MPa PAX 0.3 0.3 0.3 SUP = 0.2 MPa SUP = 0.2 MPa 0.2 0.2 0.2 PB PB 0.1 0.1 0.1 PAF 0 0 0 50 100 150

RB/RBL/RBQ

absorption (mm) 5 6 6 7 11 12 15 25 Collision speed (m/s) 0.05 to 5.0 Max. operating frequency (cycle/min) 80 80 70 70 45 45 25 10 Max. allowable thrust (N) 245 245 422 422 814 814 1961 2942 Ambient temperature range (C) 10 to 80 (No freezing) Extended 1.96 1.96 4.22 4.22 6.86 6.86 8.34 8.83 Spring force (N) Retracted 3.83 4.22 6.18 6.86 15.30 15.98 20.50 20.01 Basic type 15 15 23 23 65 65 150

7.4

Symbol Length Nil 150 mm 3 300 mm 6 600 mm 10 1000 mm Base Mounted Part no. Type S0700-S-M5 For internal pilot S0700-S-M5-R For external pilot Note) Standard wire length of valve with plug connector is 300 mm. When ordering a lead wire length of 600 mm or longer, list the part numbers for the valve without connector and the connector assembly.

NARM Series

.19 (4.5) (25) (34) (21) (18) (56) (16) (9) (18) (19) (52) (9) (11.5) (4.8) NARM2000 .18 1.36 1.69 1.10 1.06 2.76 .79 .45 .94 1.10 2.60 .45 .65 .19 (4.5) (34.5) (43) (28) (27) (70) (20) (11.5) (24) (28) (66) (11.5) (16.5) (4.8) Dimensions by number of stations Model Symbol A C E F G H J K M P NARM1000 L1 1.42 2.17 2.91 3.66 4.41 5.16 5.91 6.65 7.40 8.15 (36) (55) (74) (93) (112) (131) (150

3 Port Solenoid Valve/

0.25 to 0.7 MPa (Same as operating pressure) Maximum operating frequency 30 times/minute Minimum operating frequency 1 time/week Operating and ambient temperature 14 to 122F [10 to 50C] (No freezing) Ambient humidity 20 to 90%RH (No condensation) Manual override None Pilot exhaust Individual exhaust Lubrication Not required Mounting orientation Unrestricted Impact/Vibration resistance 150

VCC

Operating fluid Eliminate all solid material larger than 150 m in the fluid to avoid valve failure. Piping Caution 1. Piping to pilot port Condensation may be formed in the piping to the pilot port, due to factors such as its length. The life of the valve will be shortened if condensed moisture enters the pilot port.

VCW

D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 T : Thread type 2 5.5 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 (44) W T R Z (Y) L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93 231

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

10 400 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 Symbol Specifications Manufacture of intermediate strokes at 1 mm intervals is possible.

3 Port Solenoid Valve Series VQ100

[dm3/(sbar)] 0.045 0.083 SYJ Valve specifications Electricity specifications b 0.28 2 3 0.28 Cv 0.012 0.021 VK ON: 3.5 ms, OFF: 2 ms ON: 3.5 ms, OFF: 2.5 ms Response time (1) VZ (2) 10 to 50C Ambient and fluid temperature Not required Lubrication VT (3) Non-locking push type/Locking type (Tool required) Manual override VP Unrestricted Mounting orientation Shock/Vibration resistance (4) 150

3 Port Solenoid Valve Series VQ100 1

[dm3/(sbar)] 0.045 0.083 SYJ Valve specifications Electricity specifications b 0.28 2 3 0.28 Cv 0.012 0.021 VK ON: 3.5 ms, OFF: 2 ms ON: 3.5 ms, OFF: 2.5 ms Response time (1) VZ (2) 10 to 50C Ambient and fluid temperature Not required Lubrication VT (3) Non-locking push type/Locking type (Tool required) Manual override VP Unrestricted Mounting orientation Shock/Vibration resistance (4) 150

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

Lubrication Dustproof [Degrees of protection 0] (4) VZ Enclosure Shock/Vibration resistance (m/s2) Electrical entry 150/50 (5) Grommet, DlN terminal VT Standard 100, 200 VAC, 50/60 Hz; 24 VDC 220, 110, 48, and 24 VAC (50/60 Hz) 100, 48, and 12 VDC Coil rated voltage VP Option 15 to 10% of rated voltage Allowable voltage fluctuation Coil insulation type VG Class B or equivalent (130C) (6)

In-line Air Filter

200 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC74 6 ZFC75 8 0.1 MPa 0.3 MPa 0.5 MPa 0.1 MPa 0.3 MPa 30 30 Differential pressure [kPa] Differential pressure [kPa] 0.5 MPa 0.7 MPa 20 20 0.7 MPa 10 10 0 50 100 150 250 200 0 0 0 100 200 300 400 500 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] ZFC76 10 ZFC77 12 0.1 MPa 0.3 MPa 0.1 MPa 0.3 MPa 30 30 0.5 MPa 0.5 MPa 20 20 0.7 MPa 0.7

How to Order MGQ M Cylinder stroke (mm) Refer to “ Standard Stroke ” on page 339. Slide bearing Ball bushing bearing Bearing type M L 12 mm 16 mm 20 mm 25 mm 32 mm Bore size 12 16 20 25 32 40 mm 50 mm 63 mm 80 mm 100 mm 40 50 63 80 100 M9BW 2 pcs. 1 pc. n

MGQ 12, 16 M L 10, 20, 30, 40, 50, 75, 100 20, 30, 40, 50, 75, 100 125, 150, 175, 200 M L MGQ 20, 25 MGJ MGQ 32, 40 50, 63 80, 100 25, 50, 75, 100, 125 150, 175, 200 M L MGP MGQ OUT(N) IN(N) Theoretical Output (N) Bore size (mm) MGG Operating pressure (MPa) Rod size (mm) Piston area (mm2) Operating direction 1.0 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 MGC Made to Order Specifications (For details

Non-rotating Double Power Cylinder ø20, ø25, ø32, ø40, ø50, ø63, ø80 Series MGZ

-X1247 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500 600, 700, 800 20, 25 32, 40, 50 63, 80 75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Intermediate strokes and strokes shorter than 75 mm are also available.

Slide Unit/Double Rod Type Series CX2 Slide Bearing: ø10, ø15, ø25

Bore size/Stroke (mm) 10 25, 50, 75, 100 Cushion (Option) 15 25, 50, 75, 100, 125, 150, 175, 200 With adjusting bolt (2 pcs.) Nil 25 25, 50, 75, 100, 125, 150, 175, 200 B With shock absorber (2 pcs.) For 15 and 25, strokes up to 300 are available as made-to-order. (-XB11) BS With shock absorber (1 pc.)

Fine Lock Cylinder with Guide Series MLGC ø20, ø25, ø32, ø40 2

Part No. 25 350, 400, 450, 500 75, 100, 125, 150, (Band and screw are included.) 32 350, 400, 450, 500, 600 Ball bushing bearing MLGCL 200, 250, 300 Bore size (mm) Auto switch model D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 40 350, 400, 450, 500, 600, 700, 800 20 25 32 40 BMA2 -020 BA -01 BA -02 BA -32 BA -04 BM1 -01 BM1 -02 BM1 -32 BM1 -04 Intermediate strokes and short strokes other

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Clean Room Specification 11-LEFS Series LEFS16, 25, 32, 40

1000 Manufacturable stroke range [mm] 11-LEFS16 V V V V V V V V V V 50 to 500 11-LEFS25 V V V V V V V V V V V V 50 to 600 11-LEFS32 V V V V V V V V V V V V V V V V 50 to 800 11-LEFS40 V V V V V V V V V V V V V V V V V V 150 to 1000 *Please consult with SMC for non-standard strokes as they are produced as special orders.

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

Applicable Stroke Table : Standard Model Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Manufacturable stroke range [mm] LEFS16 50 to 500 LEFS25 50 to 600 LEFS32 50 to 800 LEFS40 150 to 1000 * Please consult with SMC for non-standard strokes as they are produced as special orders. The actuator and controller/driver are sold as a package.