Precision Cylinder Series MTS

8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

Rotary Cylinder Series MRQ Size: 32, 40 1

4 !5 !6 !7 !8 !

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

Compact Vacuum Ejector Series ZQ

port (P port) Note 4) (M3 x 0.5, piping not required) (68.4) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 PE 29.4 (M5 x 0.8) 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-K2 L-F.

RLQ

13 4-11 4-6.6 Spring washer 4 pcs.

ZQ

ZQ1053M-K1Y5L-D31C 4 pcs. (Stations 1 to 4) ZQ1103M-K1Y5L-D31C 4 pcs. (Stations 5 to 8) ZY Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) ZQ 20 -80 -80 The stations are sequentially numbered.

VK300

Refer to pages 4-5-4 to 4-5-9 for external dimensions in mounting.

Power Valve: Economy Valve Series VEX5

2449. 1/4 (P2) Port size Refer to page 2449.

LECP6_C

30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18 6 A6 B6 5 10.2 B1 A1 2 1 B3 A3 (5.7) 15 16 11 30.7 114 [820m] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 8 8m COM-A/COM B-3 3 COM-B/ A-3 4 A

BP1000

10 40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

Compact Cylinder with Air Cushion and Lock Series RLQ

depth 8 4-13 4-11 4-6.6 Spring washer 4 pcs.

Compact Cylinder with Air Cushion

Example) Bolt M5 x 50l 4 pcs.

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Fittings & Tubing Air Cylinders Rotary Actuators Lead wire length 300 mm 1(P), 3(R) port 4-Rc1/8 Indicator light 7 2-4.5 (Mounting hole) 57 5.3 5.3 50.5 52 0.6 P 1 R 3 4 4 4 4 4 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches

Series 10-, 21- AW-B Filter Regulator

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 40 60 30 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N Note 2) F Note 3) Thread type Rc NPT G e + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 5) H Note 4) a Without mounting option

VPA4

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4n-Rc 1/2, 3/4 Port size (Rc 3/4, 1) ( ) for VVPA460 Individual EXH: VVPA450Station 2Port size VVPA460Station 2Port size 2-Rc 3/4 Port size (Rc 1) 2-Rc 1/8 2-Rc 1/8 Pilot port Pilot port Mounting hole Rc 1/8 Pilot port 4n-Rc 1/2, 3/4 2n-Rc 3/4 Port size (Rc 1) Port size (Rc 3/4, 1) L Dimension

VK3000

VK300-82-2-01 100 VAC V100 VK300-82-2-03 110V 110 VAC 200 VAC 220 VAC VK300-82-2-02 200V VK300-82-2-04 220V S070 240V 6V 12V 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC VK300-82-2-07 VK300-82-4-51 VK300-82-4-06 VK300-82-3-05 VK300-82-3-53 DIN terminal VQD VQD-V Light (Built-in connector) Marking Circuit with light AC Circuit diagram 12 VDC or less Circuit diagram 24 VDC or more Circuit

Dedicated Controller

ALARM 24 Alarm output NO. 3 13 NO. 4 4 COM 12, 25 Common The output terminal common.

VKF300

VK300-37-2-01 VK300-37-2-02 VK300-37-2-07 VK300-37-4-51 VK300-37-4-06 VK300-37-3-05 VK300-37-3-53 Rated voltage 100VAC 200VAC 240VAC 6VDC 12VDC 24VDC 48VDC Rating symbol A1 A2 A3 LW06 LW2 LD4 LD8 DIN terminal Circuit diagram for connector with light The bushing may be damaged if the tightening torque of 0.8Nm is exceeded.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

Series Dimensions Lateral load resisting/Basic type (Through hole & Double end tapped): MQQLB 10, 16, 20 H effective thread depth C 2-M5 x 0.8 2 x 4-OB 2 x 4-OA effective depth RA Y Q F Depth of counterbore RB I 4-N through 4-N through M0.2 D E K B + Stroke L M0.2 A + Stroke E 25, 30, 40 H effective thread depth C 2 x 4-OA effective depth RA 2-Rc1/8 (NPT1/8, G1/8) 2 x 4-OB Y Q F Depth of