10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?
Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option
Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: w/o Option, Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: Units Selection Function, Calibration Certificate: None, Certificate in both English and Japanese, Flow Direction: R (Right to Left)
Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: D [w/Common Release Pressure Supply (PD) Port], Manifold Individual Supply: w/o Option
Stations: 01, Systems, Port Combinations: P [Vacuum Pump System, ø8 (Common PV), ø6 (Common PS)], Exhaust: 2 (Individual Exhaust), Wiring: P (Flat Ribbon Cable Connector), Bracket: B (w/DIN Rail Mounting Bracket), Common Release Pressure Supply: w/o Option, Manifold Individual Supply: w/o Option
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: Q (Lead Wire and M12-M12 Connector, 3m), Unit Specification: M (SI Unit Only)
Manifold with Stainless Steel Plate: S, Wiring, Connection: F (Connector Entry Direction Adjustable, D-sub Connector, 25 Pins), Lead Wire Length: None, Wiring Type: All Double Wiring, Valve Stations: 12 (12 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: F (G), Option: P (Trim Plate)
Manifold with Stainless Steel Plate: S, Model: 51S (EX260), SI Unit: 0 (without SI Unit), Wiring Type: All Double Wiring, Valve Stations: 08 (8 Stations, All Double Wiring), Port Size: 01 [4(A)/2(B) Port: 1/8; 1(P)/3(EB), 5(EA) Port: 1/4], Thread Type: F (G), Option: P (Trim Plate)
Model: 51 (Bottom Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P,E Port Location: D Side, A,B Port Size: 01 (1/8), Thread: N (NPT)
Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only)
Valve; Stop Valve: None), Return Port Size: 03 (3/8), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector)
Valve; Stop Valve: None), Return Port Size: 06 (3/4), Flow Switch Output Specifications: L2T [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate/Temp.: Switch Output (N/P); Temperature Sensor: Yes], Lead Wire: N (w/o Lead Wire and M8 Connector)
p>Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 2 (Lateral), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P,E Port Location: D Side, A,B Port Size: 01 (1/8), Thread: N (NPT)
Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P,E Port Location: U Side, A,B Port Size: 01 (1/8), Thread: N (NPT)
Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P,E Port Location: U Side, A,B Port Size: 01 (1/8), Thread: N (NPT), Mounting: D (DIN Rail Mounting w/DIN Rail)
Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P,E Port Location: U Side, A,B Port Size: 01 (1/8)
Model: 50 (Side Ported), Connector Type: P (Flat Ribbon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 6 Stations, P,E Port Location: B (Both Sides), A,B Port Size: 01 (1/8), Thread: N (NPT), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)