Digital Gap Checker ( compatible)

Detection nozzle: 1.5 Piping: F type: 4 x 2.5 tube 1 m, 3 m, 5 m Test conditions G, H type: 6 x 4 tube 1 m, 3 m, 5 m Supply pressure: 200 kPa ISA3-F ISA3-G Piping length: 1 m, 3 m, 5 m Piping length: 1 m, 3 m, 5 m : In the default condition, the value can be displayed as 0. : In the default condition, when the distance is below 9, 0 will be displayed.

Air Slide Table Series MXP

This could cause auto switch malfunction. 7.5 M Max. 15 Stroke: S MXP12-15B Width across flats 12 A H 4 x M4 x 0.7, depth 4.5 M8 x 1 14.3 8.5 MA 40.8 7.1 14.4 8 4 11 20.3 25 24 8.5 3 0 +0.030, depth 3 3 0 +0.030, depth 3 A Piping port 2 x M5 x 0.8 (Plug: M-5P) 19 1.5 4 x M5 x 0.8 Pilot hole diameter 4.2 220.05 20 W Piping port D B 80.05 2 x M5 x 0.8 10 33 J 3 0 +0.030, depth 1.5 5 12 9.5

MLGC

160 176 125 165 M 8 160 115 4 11 12 142 95 18 19 96 42 35 67 190 210 135 200 M10 194 P GL GQ GR I J K L M N O Q R S T U V W Bore size (mm) 20 25 32 40 93 60 5.5 80 M5 x 0.8 4 4 35 50 25 14 26 16 53 50 105 M6 x 1 112 103 70 9 95 M5 x 0.8 7 7 40 60 32 14 31 20 63 60 125 M8 x 1.25 132 104 70 9 95 Rc 1/8 Rc 1/8 7 7 40 60 32 13 38 20 63 60 125 M8 x 1.25 132 115 82.5 11 115 8 8 45 75 38 14 47

MLGC

160 176 125 165 M 8 160 115 4 12 11 142 95 19 18 67 190 210 135 96 200 M10 42 194 35 J K L U I O T GR N S W P GL GQ M Q R V Bore size (mm) 20 25 32 40 93 60 5.5 80 35 16 4 25 26 50 M5 x 0.8 4 50 14 53 105 M6 x 1 112 103 70 9 95 40 20 7 32 31 60 M5 x 0.8 7 60 14 63 125 M8 x 1.25 132 104 70 9 95 40 20 7 32 38 60 Rc 1/8 Rc 1/8 7 60 13 63 125 M8 x 1.25 132 115 82.5 11 115 45 25 8 38 47 70 8

Series VCS

R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

Rotary Cylinder Series MRQ

i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl u an m t ad en ju m st Friction fittings Note) Can be adjusted 5 at the rotating ends.

Rotary Cylinder Series MRQ Size: 32, 40 1

F: Angle adjustment range 5 m u im ax 0 M 7 M 1 in e i gl m n u a m 0 nt a e M dj m us t 19 ax e im gl Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u an m t ad en ju m st Friction fittings Note) The diagram shows the rotation angle with a reference position set

Clean Gas Filter

Construction q t e r w IN Description No.

PEEK

3 Sleeve 7 SUY Spacer 8 PBT r Return spring 9 Stainless steel w Board assembly 10 e Casing 11 PBT q Plug 12 NBR O-ring 13 NBR 6 Series LVM10/100 Construction: Base Mounted LVM10R3 LVM10R4 LVM10R6 !2 !0 !2 !0 !2 !0 !1 !1 !1 y y y t t t u u i i u i o o !3 !3 o !3 r r r e e w w e w q !4 !4 q q !4 LVM105R Description No. Material Component Parts: LVM10R3, 10R4, 10R6, 105R !2 !

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 249 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

F/ISE

pressure ZSE50 02 M F L 22 For compound pressure Piping specifications Option 02 T2 G2 R 1/4 (M5 with female screw), Piping in backward direction None Nil NPT 1/4 (M5 with female screw), Piping in backward direction Bracket A G 1/4 (M5 with female screw), Piping in backward direction Optional A Input/output specifications 22 30 62 NPN open collector 2 output + Analog output Bracket D NPN

ZQ-OM01301

*Refer to the Operation Manual for details on setting the ZSE10 (for ZSE10 series). 5.2.2 Pressure switch for vacuum with energy saving function NPN (1 output) PNP (1 output) Pressure switch (NPN specifications) Pressure switch (PNP specifications) (PNP ) (NPN ) Brown + Brown + B r o w n Lord OUT1 Black Black Load OUT1 B l a c k Gr ay Main circuit Lord OUT2 M a i n c i r c u i t Main circuit

Thermo-chiller

Applicable model HRL-BB002 HRLE050-m-m HRL-BB001 HRLE090-m-m y u t Parts List r i No. Description Material Applicable model Size Qty.

CJ2X/CUX/CQSX/CQ2X/CM2X

1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 8-21-37 for details.

Guide Cylinder Series MGG

Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

Digital Pressure Switch

"M" in the part number means that the units cannot be changed.

MLU

3 Only for use with M(D)LUB25 Release piston seal NBR M(D)LUB40, 50 Lead-bronze casting !

Series CE1

OUT1 to OUT3 Noise filter M Extension Cable How to Order Extension cable CE1-R CE1-Rl Stroke reading cylinder side connector (unit) Cable length Cable suffix R04-J8M7.3 (Made by TAJIMI ELECTRONICS CO., LTD.)

10% or less)150 mA or lessIP650 to 50C (with no freezing and condensation)1000 VAC for 1 min. between external terminal and case50M (500 VDC Mega) between external terminal and case10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller.490 m/s2 in X, Y, Z directions 3 times each1000 Vp-p, Pulse width 1 ?