SMC Corporation of America
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block gauge pressure supply block L side L side switch block Nil A B C D E F G H J K L M N O P Q R F.R.L.

Note 5) For ZSE40F (compound pressure) with "psi" indication, zero clear is in the range of 0.01 psi. 100.0 to 100.0kPa 100.0 to 100.0kPa 101.3 to 101.3kPa 10.0 to 101.3kPa 0.1 to 1.000MPa 1.000 to 1.000MPa Internal circuits and wiring examples ZSE40 (F) ISE40-m-22 (L)-(M) ZSE40 (F) ISE40-m-62 (L)-(M) DC (+) (Brown) DC (+) (Brown) Analog output (Gray) Analog output (Gray) OUT1 (Black) OUT2

) PTFE PTFE, Polypropylene (PP) FKM Material FLUID IN Built-in solenoid valve Discharge Note 1) Average discharge pressure Pilot air pressure Air consumption Suction head Note 1) 8 to 2000 mL/min 8 to 1000 mL/min Note 2) 0 to 0.6 MPa 0.2 to 0.7 MPa 40 L/min (ANR) or less Up to 2.5 m (dry state inside the pump) 64 dB (A) or less (Option: With silencer AN120-M5) FLUID OUT AIR SUP AIR EXH Noise

(mm) D2 L A M D1 Applicable tubing KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S M5 x 0.8 M6 x 1 38.5 11 13 39 35 8 10.4 16 2.5 4.0 4.0 4 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 1 8 M5 x 0.8 M6 x 1 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42

5D (M) 100D (M) M10 x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l x 165l x 190l CHQB80 10D (M) 10D (M) 15D (M) 15D (M) 20D (M) 20D (M) 25D (M) 25D (M) 30D (M) 30D (M) 7 35D (M) 35D (M) 14.5 40D (M) 40D (M) 45D (M) 45D (M) 50D (M) 50D (M) 75D (M) 75D (M) x 165l 100D (M) 100D (M) M5 x 75l x 80l x 85l CHQB100 10D (M) M10 x 105l x 110l x 115l x 120l x 125l x 130l x 135l x 140l

M L Slide bearing Ball bushing bearing Nil S n 2 pcs. 1 pc. n pcs.

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Please consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Nil (Example) M9NW 1 m M (Example) M9NWM * Solid state auto switches marked with v are produced upon receipt of order. 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ * Since there are other applicable auto switches than listed above, refer to page 185 for details. * The D-A9l/M9l/M9lW/M9lA auto switches are shipped together, but not assembled.

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

Matsushita Electric Industrial Co., LTD For side mount type, motor specifications L, M, N, and P are used.

Dual rod cylinder 6, 10, 15, 20, 25, 32 Series CXS 10-/11-/1221-/22How to Order Clean series 10 11 12 CXSM,CXSL CXSM,CXSL CXSL Relief type Vacuum suction type Relief type (with specially treated sliding parts) Dual rod cylinder 10 CXS M 15 30 Y59A 21 CXS L 15 30 Y59A Number of auto switches Bearing type L M Ball bushing bearing Slide bearing Nil S n 2 pcs. 1 pc. n pcs.

EXH port EXH port Flat Ribbon Cable Assembly Cable length (L) 10 pins 20 pins 26 pins 1.5 m 3 m 5 m AXT100-FC10-1 AXT100-FC10-2 AXT100-FC10-3 17.2 AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 30 AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 37.5 Series Assembly part no. Port size Series Assembly part no.

Particle diameter (m) Particle diameter (m) Front matter 23 Comparison of Cleanliness Standards ISO 14644-1 ISO Cass 1 to 9 Intermediate classes available U descriptor: Particles smaller than 0.1 m M descriptor: Particles larger than 5.0 m Standard Fed.Std.209E British unit: Class 1 to 100.000 SI unit: Class M1 to M7 U descriptor: Particles diameter smaller than 0.1 m (SI unit) (British

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Since there are other applicable auto switches than listed, refer to page 1581 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

I = I + I kgm m, m: Mass of loads I and I kg r, r: Diameters of loads I and I m L: Distance from the rotational axis to load I center of gravity m Calculation example When m 2.5kg, m = 0.5kg, r = 0.1m, r = 0.02m, L = 0.08m I = 2.5 x = 1.25 x 102 0.1 kgm 2 0.02 I = 0.5 x + 0.5 x 0.08 = 0.33 x 10kgm I = (1.25 + 0.33) x 10= 1.58 x 10kgm 16 Technical Data/Moment of Inertia Specific Application

I = I + I kgm m, m: Mass of loads I and I kg r, r: Diameters of loads I and I m L: Distance from the rotational axis to load I center of gravity m Calculation example When m 2.5kg, m = 0.5kg, r = 0.1m, r = 0.02m, L = 0.08m I = 2.5 x = 1.25 x 102 0.1 kgm 2 0.02 I = 0.5 x + 0.5 x 0.08 = 0.33 x 10kgm I = (1.25 + 0.33) x 10= 1.58 x 10kgm 16 Technical Data/Moment of Inertia Specific Application

Holding point L (mm) 120 80 160 200 20 40 60 Holding point L (mm) 80 0 20 40 60 Holding point L (mm) 80 100 120 MHW2-25D MHW2-40D MHZ2 160 50 Pressure 0.7MPa Pressure 0.7MPa 140 MHZJ2 0.6 0.6 40 120 Holding force (N) Holding force (N) 0.5 0.5 MHQ 100 30 0.4 0.4 80 0.3 MHL2 0.3 20 60 0.2 0.2 40 10 MHR 20 0 20 40 60 Holding point L (mm) 100 80 20 40 60 Holding point L (mm) 80 100 120 140 160