Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, relief port JIS class 2 +1.0 0 mm M5 x 0.8 M5 x 0.8 11 Clean Room Series Microspeed Cylinder Series 10/11 -CM2X Series 10/11 -CM2X How to Order Clean room series 10 11 Mounting Relieving type Vacuum type B L F G BZ Basic Type Axial foot type Front flange type Rear flange type Boss-cut basic type C(D)M2X L 40 10 150 C73 With auto switch (with built-in magnet) Boss-cut front flange type

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

Auto Switch Guide

mounting screw M5 x 0.8 x 16 l 1.

Solid State Auto Switches

x 0.8 x 16 M5 x 0.8 x 20 M5 x 0.8 x 25 ( ): Denotes the values of D-A44C Dimensions (mm) D-A3C D-A44C 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland 2 x M5 x 0.8 x 12 Hexagon socket head cap bolt Tightening gland G 1/2 G 1/2 4 x Z 4 x Z (Applicable cable O.D. 6.8 to 9.6) (Applicable cable O.D. 6.8 to 11.5) Hexagon socket head cap bolt Hexagon socket head cap bolt Indicator

Integrated Controller

Workpiece fixed Model Screw size Max. tightening torque [Nm] L (Max. screw-in depth) [mm] EQFS16 M4 x 0.7 1.5 6 EQFS25 M5 x 0.8 3.0 8 EQFS32 M6 x 1 5.2 9 EQFS40 M8 x 1.25 12.5 13 L To prevent the workpiece retaining screws from touching the body, use screws that are 0.5 mm or shorter than the maximum screw-in depth.

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

pressure 0.5 MPa Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations 15-9-76 3 Speed Controller Adjustable by Flat Head Screwdriver With One-touch Fitting, Elbow Type/Universal Type Construction Universal type Meter-out type Elbow type Meter-out type M5 type U10/32 port M5 type U10/32 port AS ASP

MVGQ

x 0.8 M5 x 0.8 Series SYJ3000 20, 30, 40, 50, 75, 100, 125, 150, 175, 200 20 30 M5 x 0.8 M5 x 0.8 M5 x 0.8 10 36 64 17 26 74 47 30 72 2 4 46 52 18 8 13 37 10 60 19 13 MVGQ Note 1) It is possible to manufacture the intermediate strokes other than the standard strokes by means of installing a spacer.

Applicable Auto Switch Model

(Tolerance 30%) Dimensions Bore size (mm) Z Auto switch part number H H' HW C T T' D-G39C-4, D-K39C-4 D-G39C-5, D-K39C-5 D-G39C-6, D-K39C-6 D-G39C-8, D-K39C-8 D-G39C-10, D-K39C-10 40 50 63 80 100 57 58 60.5 64 67 69 77 91 107 121 44 52 64 78 92 49.5 50.5 52 53.5 56.5 7.5 8.5 10.5 12.5 15.5 6.5 6.5 7.5 9.5 9.5 M5 X 0.8 X 16 M5 X 0.8 X 20 M5 X 0.8 X 25 5.3-38 Solid State Switch/Direct Mounting

VFR

0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) ARBF5050-00-A ARBF3050-00-A ARBF4050-00-A 0.6 Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa Inlet pressure 0.7 MPa 0.5 Outlet pressure (MPa) 0.4 0.3 0.2 0.1 0 1000 2000 3000 4000 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) 3-5-6 7 Series VFR2000/3000/4000/5000/6000 Caution

Modular Type Air Filter Series AF

P1 = 0.1MPa 0.04 0.04 0.02 0.02 00 00 500 1000 1500 5000 10 15000 Flow rate L/min (ANR) Flow rate L/min (ANR) AF30 Rc 3/8 AF60 Rc 1 0.10 0.10 P1 = 0.7MPa P1 = 0.5MPa P1 = 0.1MPa 0.08 0.08 P1 = 0.7MPa P1 = 0.3MPa Pressure drop MPa Pressure drop MPa P1 = 0.5MPa P1 = 0.3MPa 0.06 0.06 P1 = 0.1MPa 0.04 0.04 0.02 0.02 00 2000 1000 3000 4000 00 5000 10 15000 Flow rate L/min (ANR) Flow rate L/min

Title not found

Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (

Non-contact Gripper

P PL M ML C D XT661-2A-(R, L) M5 x 0.8 5 M2 x 0.4 3.2 20 XT661-4A-(R, L) M5 x 0.8 5 M4 x 0.7 5 32.8 40 XT661-6A-(R, L) M5 x 0.8 5 M4 x 0.7 5 47 60 XT661-8A-(R, L) Rc 1/8 M4 x 0.7 5 47 80 XT661-10A-(R, L) Rc 1/8 M4 x 0.7 5 47 100 ZP2 ZP2V ZP ZPT ZPR Dimensions [Low Profile Cyclone Type] XT661 XT661 XT661-3A-(R, L)-X260 XT661-2A-(R, L)-X260 1.6 Air supply port 1.6 Air supply port 20 1.8

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 M5 x 0.8 M3 x 0.5 10.5 16 M6 x 1.0 M4 x 0.7 11.5 20 M8 x 1.25 M5 x 0.8 13.5 25 M10 x 1.25 M6 x 1.0 16.5 30, 40 M14 x 1.5 M8 x 1.25 22.5 Clevis pin d Dd9 m m l t L t Applicable bore size (mm) Applicable snap ring Part no.

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

VQ110-L-M5 36.6 30.2 Manual override 4.9 4.9 12.4 15 E 22.7(Mounting hole) 2.5 12 17 About 300 (In case of latching) (Lead wire length) About 300 (Lead wire length) Lead wire color : Red Lead wire color : Black In case of latching type In case of locking knob type 42 40.7 35.6 11 SMC VQ110 -*L 30.7 JAPAN (4.1) (5.9) 5 (5.9) 5 5 A P 7 3 M5 (M3) 8.5 4.9 4.9 30.2 36.6 ( ) : In case of M3 Dimensions

IDG

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com M5 female thread (A) IDG30M/50M IDG30HM/50HM IDG30LM/50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female thread HA AT With float type auto-drain With drain guide Drain Discharge ID AMG (P) (N) AFF N.C.: Gray N.O.: Black Thread size: 1/4 (Without valve mechanism) Applicable tubing O.D

Secondary Batteries

pre-wired connectorSDPC M9BWSDPC *Order part numbers for auto switches alone are D-M9BW(V)L-900, D-M9BW(V)SDPC-900 and DY7BW(V)L-900.

LEC-OM02704CN

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

240

side) Motor cable mounting direction: Nil (Top entry) Rod operating range Note 1) 2 x M5 x 0.8 thread depth 9 [1] 1 20 Motor cable length 300 2 x 5 Origin Note 2) Stroke end [Origin] Note 3) 20 [Stroke end] M5 x 0.8 thread depth 9 Manual override screw 21 42 28 12 Note 5) 28 Motor cable mounting direction: L (Entry on the left side) A 7 12 Stroke L2 L1 Mounting surface 18 5.5 12 Note 5)