SMC Corporation of America
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) Circumferential jet bar nozzle (straight type) Bender tube nozzle Long nozzle 6 C O N T E N T S Nozzle Type Ionizer IZN10E Series Technical Data Static Neutralization Characteristics p. 8 Blow Velocity Distribution p. 8 Flow Rate Characteristics p. 9 Ozone Concentration p. 9 Energy saving static neutralization nozzle How to Order p. 10 Specifications p. 11 Accessories p. 12 Repair

Ref er t o t he SM C w ebsi t e ( U RL ht t p: //w w w . sm cw orl d. com ) f or m ore i nf orm at i on about t roubl eshoot i ng. Thi s operat i on m anual ref ers t o general di gi t al i nput t ype ( m odel : X93) and i s part i al l y appl i cabl e t o anot her speci al m odel s.

Please contact P/A if necessary. Note 2) Refer to page 7 for further information of options.

The overall length is longer than the cylinder with air cushion as follows because the bumpers are attached to the both sides of the piston; 32, 40: +6mm, 50, 63: +8mm, 80, 100: +10mm, 125: +12mm 32 40 50 63 80 100 90 90 102 141 145 164 102 124 124 164 200 200 125 235 132 Stroke range (mm) Bore size (mm) Width across flats S ZZ Effective thread length A C B D Ee11 F G H MA MB J K MM N P V

K 45" Male Elbow . . . KF 45' Female Elbow Y M a l e R u n T e e . . . . . T Male Branch Tee . , T Union Tee , . . . . . . , TF Female Branch Tee E Bulkhead Connector E Bulkhead Union . . , U Male Branch 'Y" . . . U Union "Y" . . . . . . . .

GB Y Y 4MM depth M XAH7 depth XL + 0.2 0 I D 2 x 4J E MB MC KA MA C N K N S + Stroke H B ZZ + Stroke Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63

Air pressure lock-up Spring with air pressure lock-up An pressure Air pressure s'-pp,y exhausl I t Afpressure An p@ssure supPry 4rEst ! l Aiipresure Airpressure ertausr st)Ppty t l AirPrssure Airprasure erhast slppiy t l Lock releasing Locking Lock releasing Locking Air pressure drives the brake piston. Air pressure and spring force combine to drive brake piston.

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | SolenT NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

HOW TO ORDER N V F 1 1 0 H s D Z O 0 1 T F T T Opo.afing Pressure -J I 0 100 psi (CrP.055) | ' H 0 r 150 psi (C\p.05) | SolenT NPTF (Std.) N _ N P T Ii ; o Electrical Corinsctioi G 12'Lead (Sd.) D .

Description AMP320 AMP220 AMP420 AMP-EL220 AMP-EL320 AMP-EL420 Element assembly With O-ring 4 Note) The first and second elements are integrated, and cannot be replaced separately. 4 Exhaust Cleaner for Clean Rooms Series AMP Dimensions (mm) 1in = 25.4mm N Optional specifications O T: With element service indicator P R Q S SMC M D IN C Bracket (accessory) G L J I H K B A IN Bracket mounting

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

L M N P Q R S T Model VNC2-10A VNC2-15A VNC3-20A VNC4-25A 3 8 1 2 3 4 1 63 63 80 90 42 42 50 60 28 28 35 40 14 14 17.5 20 72.5 72.5 84 100 80.5 80.5 92 108 87 87 92 93 180.5 180.5 192 208 148 148 159.5 175.5 52 52 62 72 26 26 31 36 4.5 4.5 5.5 6.5 24.3 24.3 28.3 33.3 2.3 2.3 2.3 2.3 25 25 30 35 34 34 43 49 55 55 60.5 73 LVA LVH LVD Threaded Type Port size: 32A, 40A, 50A LVQ Electrical entry

Model no. of NPT thread is AN101-N01 and AN110-N01. It can operate in temperatures between 10 to 150C if there is no risk of the moisture in the air freezing.

If you turn on the power supply for the first time, refer to "LECSS2-T Operation Manual, chapter 4. -16- 6.2.1 Start up the Setup software (MR Configurator2TM) Connect the PC and LECSS2-T using the USB cable. Turn on the power of the LECSS2-T. Start application MR Configurator2.

Siit:;, ,; f'I":1' Reed Switch White o--~~c:O::T--~o Black ~ $ 't. " I CDQ2 J>;,:: 9 9 10 U Response Range The range where auto SWitch turns on. 6SIIIC 11 Series CDQ2BP High Magll8tic Field Resistance Hs D-P7 P8 Auto Switch Mounting Position Minimum Allowable Stroke c MInimum No. of Auto swilehes . oetup pooIIion Symbol _(mml . 063 e80 I 060 1 pc

Air pressure lock-up Spring with air pressure lock-up An pressure Air pressure s'-pp,y exhausl I t Afpressure An p@ssure supPry 4rEst ! l Aiipresure Airpressure ertausr st)Ppty t l AirPrssure Airprasure erhast slppiy t l Lock releasing Locking Lock releasing Locking Air pressure drives the brake piston. Air pressure and spring force combine to drive brake piston.

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

ITVH N Bracket dimensions With auto drain Model Port size A M L K J H G F E D C B L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 U (Body) V (Adapter) 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 144 166 188 230 182 215 281 325 21.5 18 16 18.5 37 37 42 42 3.2 3.2 4.5 4.5 32 40 48 56 28 37 37 44 51 61 66 81 101 121 131 161 10 10 45 70 260 302

When actually mounting an auto switch, adjust the position after confirming the operating state of the auto switch. 95 Guide table10-MGF Dimensions 10-MGF40/63/100 4-N V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2-P(Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4-M K KB KC 6-K (6 positions) 9 9