VNB

G E C T D DL S Z L 1, 2, 3, 4 (Only G)(Except G) 5, 6, 7 (Except DL)(Only T) (Only T) 17-4-13 2 Series VNB How to Order Seal material Body option Nil V Standard Vacuum pilot A B C NBR seals FKM seals EPR seals Thread type Bracket (valve size: 1/2/3/4.)

PF3A7xxH_eng

Reset to the default settings [ oFF] Not used (3) Press the S button to complete the setting. 1: Setting is only possible for models with the units selection function. 2: 1 to 5 V or 0 to 10 V can be selected when the analogue voltage output type is used.

End Lock Cylinder Series CBG1

With front lockR (mm) Bore size (mm) W P WA WB WH 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 Dimensions inside ( ) are for long strokes.

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

NPN) C76 IC 5 V Grommet C73 B54 C73C A33A A34A A44A B59W H7A1 H7A2 H7B H7C G39A K39A H7NW H7PW H7BW H7BA H7NF 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Yes Connector 12 V 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC Grommet DIN terminal Diagnostic indication (2-color) 3-wire (NPN) 3-wire (PNP) IC 5 V, 12 V Grommet 12 V 2-wire Connector 3-wire (NPN) 2-wire

Process Gas Diaphragm Valve

Select compatible materials of construction for the gas Vacuum to 125 psig (0.9 MPa) 200 psig (1.4 MPa) 375 pisg (2.7 MPa) -10 to 71C (No freezing) 0.29 0.5 Inboard leakage Outboard leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across

EXxx-OMW0014CN

(EX245-EA2-1) No. 1 SI ON/OFF 2 IO-Link IO-Link 3 4 5 SI 6 . 1-1 12 No.EX-OMW0014CN-A 2. . 2-1 EX245 DC24 V 1 msec IP65(,) (IEC 60529 ) CE/UKCA UL(CSA) RoHS EN505812012 AC500 V1 FE 10 M -FE DC500 V -1050 -2060 35%85%RH 1057 Hz0.75 mm p-p 57150 Hz49 m/s 2 XYZ 2 (IEC60068-2-6) 147 m/s 2 XYZ 3 () (IEC60068-2-27) 13 No.EX-OMW0014CN-A 3. 3.1. 6 2M5( = 1.5 Nm

Smooth Cylinder Series CA2Y ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CA2 .

NPN) Reed switch Solid state switch Z76 5 V IC Grommet Z73 A54 A59W Y59A Y7P J51 Y59B Y7NW Y7PW Y7BW Y7BA F59F 100 V 12 V Relay, PLC 100 V, 200 V 2-wire 24 V Diagnostic indication (2-color) Grommet 3-wire (NPN) 3-wire (PNP) 24 V 5 V, 12 V IC Grommet 100 V, 200 V 12 V 2-wire 3-wire (NPN) 3-wire (PNP) IC Relay, PLC 5 V, 12 V Diagnostic indication (2-color) 12 V 2-wire 24 V Water

Miniature Guide Rod Cylinder Series MGJ

Load voltage at OFF = Leakage current x 2 pcs. x Load impedance = 1 mA x 2 pcs. x 3 k = 6 V = 24 V 4 V x 2 pcs. = 16 V Example: Power supply is 24 VDC. Internal voltage drop in switch is 4 V. Example: Load impedance is 3 k.

Series AS-FM/AS-M/ASD-FM

Symbol JIS symbol 1 Series AS-FM How to Order AS 2 2 1 1 F M 01 06 Body size Option 1 2 M5 standard 1/8, 1/4 standard Nil S None With sealant M5 and U10/32 are not available with sealant.

PF2D

Real-time switch output ( ) Unit switching Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ZSE ISE ON YES OFF P-1 P-2 GPM gal (US) PSE Real-time flow rate GPM = gal (US)/min P Window comparator mode H: Hysteresis Z I SE3 Note) Fixed SI unit (l/min, l, m3 or m3 x 10) will be set for the type without the unit switching function.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Model Uni thread size Metric size Inch size Elbow type 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Gasket AS22l1FSl-U01 1/8 V V V V V V V V V AS22l1FSl-U02 1/4 V V V V V V V V V V Female thread AS32l1FSl-U02 1/4 V V V V V V V Rc, G NPT, NPTF Uni thread AS32l1FSl-U03 3/8 V V V V V V V AS42l1FSl-U04 1/2 V V V V V Shape of Uni thread ridge Use of the chamfered surface of the female thread

76

(50 Hz) Three-phase 200 V (50 Hz) Three-phase 200/220 V (60 Hz) IDU37E R1 1/2 37 215.4 201.3 IDU55E 55 346.0 296.6 R2 IDU75E 75 441.4 388.4 Refer to the separate catalog.

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

10%, Ripple (p-p) 10% or less (with power supply polarity protection)45 mA or lessNPN or PNP open collector 2 outputs (Selectable)80 mA28 V (at NPN output)1 V or less2.5 ms (with anti-chattering function: 20, 100, 500, 1000, 2000 ms)Yes?0.2% F.S. ?1 digitVariable (0 or above) Note 1)Variable (0 or above) Note 1)0.6 to 5 V ?2.5% F.S.?1% F.S. or lessApprox. 1 k 2.4 to 20 mA ?2.5% F.S.?

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

PFA/PFW

Table 1 Table 2 Output type ON YES Hysteresis mode For air OFF P-1 P-2 Display Instantaneous flow rate l/min Cumulative flow rate l Large flow rate "P" H H H (fixed hysteresis) = 3 digits CFM x 10-2 ft3 x 10-1 ON CFM = ft3/min Window comparator mode NO OFF P-1 P-2 For water Large flow rate OUT1 Output mode Display Instantaneous flow rate l/min Cumulative flow rate l ON YES OUT2 is the

LFE-OMZ0012

For example, when analogue output is 1 to 5 V, F.S.=5[V] 1[V]=4[V]. (Reference: 1%F.S. = 4[V] 1% = 0.04[V]) F F.S. (full span / full scale) Fluid contact part A part that comes into physical contact with the fluid. I Instantaneous flow The flow passing per unit of time. If it is 10 L/min, there is a flow of 10 L passing through the device in 1 minute.

8

In the case of Fig. (3), ripple 10% means V' V" V'/V x 100 = 10% When no pulsation has occurred, ripple is 0%. V ZSE ISE Vacuum breaking pressure Positive pressure added for releasing the work or quickly returning to atmospheric pressure after breaking the vacuum condition. V' V" PSE V Vibration resistance The amount of vibration a device can withstand without damage.

Process Pump

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-S Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-S (Union elbow) 1 LQ1U22-S (Union) 1 LQ1E21-S Union elbow Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

I

|vF3l3O (B) (A) ' 0 1 c 2 Clo6td C.l49r rd d#{Ft ffi# E I S E 2 {R2XPXB1) Low power consumption -1.8WDc (F2)(P)(F1l NVF3S3O Exh.Bt C.ii.. i{VF3,(3O (B) (A) c1 c2 ryffTfl-TTrl,* Er\llt'lll/'Es) EI SE2 Pr.aqa ConL. NVF353O f l Operating prs6sur range 2 pGiEon singb 20 -129 PSI S(1.5 -gkgF) 2 pssition double-15-128 P$l (1 -gkgflcm'?)