Air Cylinder

Material: Polyacetal One-touch Connecting Pin for Double Clevis Rod End Cap Material: Stainless steel Round type/CJ-CR Flat type/CJ-CF L Dd9 W2 W1 W H [mm] Part no. Applicable bore size A D L MM N R W Flat type Round type CJ-CF006 CJ-CR006 6 6 8 11 M3 x 0.5 5 8 6 [mm] CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 Part no.

Fluoropolymer Piping Equipment

W is width across flats dimension. (E) Class 6 Class 2 to 5 Metric sizes Inch sizes Connection threads Rc/NPT E H L M Min. port size W Y Connection threads Rc/NPT E H L M Min. port size W Y Model Applicable tubing O.D. Model Applicable tubing O.D.

Air Cylinder

N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N L CBM2T

EX120/121/122

w w e r e r w No.

Mechanically Jointed Rodless Cylinders

Combination description Holder mounting bracket X416 X417 1 2 1 1 1 1 1 X416 on one side Note 2) L, H, LS, SL, HS, SH Nil W Z L H LZ HZ Nil W L H X416 on both sides L, H X416 on left side, X417 on the other side Note 2) 1 X416 X416 on L unit side X416 on H unit side LH, HL 1 1 1 2 1 1 X416 on L unit side, X417 on the other side X416 on H unit side, X417 on the other side X417 on one side

MHZ

W End boss type One-touch fitting K End boss type with M5 port M Specifications Type Bore size (mm) Action Fluid Flat finger type 10, 16, 20, 25 Double acting, Single acting (Normally open, Normally closed) Air Dimensions 4-MM thread depth L (Thread for mounting attachment) A D G D W B B A C S O (mm) C D L MM G Open Closed 5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 W B Model A 0 0.4 0 0.4 0 0.4 0 0.4

MHZ

W End boss type One-touch fitting K End boss type with M5 port M Specifications Type Bore size (mm) Action Fluid Flat finger type 10, 16, 20, 25 Double acting, Single acting (Normally open, Normally closed) Air Dimensions 4-MM thread depth L (Thread for mounting attachment) A D G D W B B A C S O (mm) C D L MM G Open Closed 5.7 5.7 6.6 6.6 7.2 7.2 8.8 8.8 W B Model A 0 0.4 0 0.4 0 0.4 0 0.4

Integrated Controller

(Excludes when the stroke exceeds 2000 mm) Table Displacement (Reference Value) 0.08 EQFS32 (L = 30 mm) W L EQFS40 (L = 37 mm) 0.06 Displacement [mm] EQFS25 (L = 25 mm) 0.04 EQFS16 (L = 20 mm) 0.02 0 0 100 200 300 400 500 Load W [N] This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table. Check the clearance and play of the guide separately.

SX

(g) n: Stations W = 30n + 50 W = 37n + 63 W = 61n + 101 W = 79n + 127 W = 100n + 151 Note) For more than 10 stations, supply pressure to P port on both sides and exhaust from EA and EB port on both sides.

Compact Manifold Regulator Series ARM5

End plate L 11 1 No.

ZP

If the leakage volume is 30 L/min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 L/min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

SYJ3000/5000/7000

entry L plug connector D DO With connector Without connector DIN terminal 3 Note) Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Size End width L: 2.0 to 2.4 [mm] End thickness W: 0.5 to 0.6 [mm] W Magnified view of the end of the screwdriver L 584 a Programless Controller (With Stroke Study) LECP2 Series Dimensions Screw mounting (LECm2mm-m) 38 36.2 18.1 85 4.5 for body mounting 1.2 4.5 110 101 86 4.5 for body mounting DIN rail mounting (LECm2mmD-m) CN4 I/O connector 38 36.2 85 (11.5) SL CN3 encoder connector CN2

Thermo-chiller

Total hardness [mg/L] 200 or less Ammonium ion (NH4+) [mg/L] 0.1 or less Calcium hardness (CaCO3) [mg/L] 150 or less Residual chlorine (Cl) [mg/L] 0.3 or less Ionic state silica (SiO2) [mg/L] 50 or less Free carbon (CO2) [mg/L] 4.0 or less Iron (Fe) [mg/L] 1.0 or less Reference item In the case of [Mcm], it will be 0.003 to 0.01.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

215 775 1200 470 (423 to 517) [Unit: mm] (Note) Model D H T E d W T D L Max.

Slider Type Ball Screw Drive/11-LEFS Series

LEY LES Table Displacement (Reference Value) LEPY LEPS 0.08 LER W L LEF32 (L = 30 mm) LEH 0.06 Displacement [mm] LEY -X5 LEF25 (L = 25 mm) 11LEFS 0.04 LEF16 (L = 20 mm) LEF40 (L = 37 mm) 11LEJS 0.02 25ALEC 0 0 100 200 300 400 500 LEC S Load W [N] LEC SS-T Note 1) This displacement is measured when a 15 mm aluminum plate is mounted and fixed on the table.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A A1 RR1 A1 E1 L1 MM RR1 U1 NZ L Part no.

7.5

Release pressure side filter y t r q e u w !

58

0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: Head flange: 0.3 301 267 330 F G L, F 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: Head flange: 0.3 433 386 476 F G L, F 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 5 Series CS2 Construction !

CA2

C0.5 file chamfer R sphere TP R sphere H W1 T H H Symbol: A12 Symbol: A13 Symbol: A14 Symbol: A15 Symbol: A16 Symbol: A17 Symbol: A18 Symbol: A19 MM 30 MM 30 MM 30 H A H A H A MM 30 30 L RD C B A H A L K H W MM DA 30 MM DA 30 MM MM AL H LB K A AL H AL L K H L A H Symbol: A28 Symbol: A29 Symbol: A30 30 DA 30 30 MM L W MM W A L H AL A H A T T MM H 65 Series CA2 Made to Order Specifications