Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

Made to Order

CDQ2-XC88 -XC89 Both ends tapped: CDQ2A O1 thread R R Both Ends Tapped Through-hole (Standard): CDQ2B (mm) Bore size (mm) 32 40 50 O1 R M6 x 1.0 M6 x 1.0 10 10 14 Minimum lead wire bending radius 10 Auto switch H thread effective depth C 4 x N through 8 x O counterbore M8 x 1.25 F Q 2 x P (Rc, NPT, G) (Port size) Th9 D M E Z 10 E M K B + Stroke L A + Stroke J W (mm) With Boss on Head End

Proposals for Energy Saving

R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 KK3S-01MS -02MS KK4S-01MS -02MS -03MS -04MS KK6S-03MS -04MS -06MS KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KK6P-03MS -04MS -06MS 1/8 1/8 1/4 1/4 1/2 1/2 Female thread type Female thread type Body size Port size Part no. Body size Port size Part no.

Modular F.R.L. Units

(Switch body only)] Digital pressure switch *5 NPN output, Wiring top entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] PNP output, Wiring bottom entry ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output, Wiring top entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] *1 Assembly of a bracket and set nuts.

ZP

Applicable pad 04U/06U/08U Applicable pad 10U/16U Applicable pad 25U/32U Applicable pad 40U/50U 4.9 30 R 30 R R 25 30 R R R R 10.5 9.5 2 8 9 25 R 2 0.5 6 7 7 8 R R R R R R 45 45 45 2.7 1 R R 2.5 4.5 5 6.6 R 2.5 3.8 4.9 3.5 5 6 7.9 R 4.5 8 9 11.7 11.7 Note) R part has to be smooth with no corners.

Electric Actuator/Slider Type

M J D 4 x O1 thread depth R M Y K Note 2) L B + Stroke 4 x O1 M S A + Stroke thread depth R EH Note 1) Range within which the rod can move.

Shock Absorbers and Rate Controls

18 5 x 2 0.88 2.7 5 3.00 | .06 3.53 2.25 2.78 0tlll3.0lf,r 5 15.72 16.49 3.88 M 8 5 x 2 0.88 2.7 5 3.00 8.50 4.28 2.15 2.15 0tl{l3.0ttlx6.5 t9.46 20.13 3.88 M 8 5 r 2 0.88 3. r9 3.19 10.06 5.03 2.25 2.t8 0tlll4.0tlx2 t2.32 r3,20 5.00 Ml l5 x ?

JXCx-OMT0023

Program end 500[r/min] 200[ms] 300[ms] 600[10STMm] 300[10STMm] 700[r/min] 700[10STMm] 300[10STMm] a) b) c) d) e) f) a) Incremental move command (600 10STM m) 900 10STM m (a) MOVI (600) +e) TRIPI (300)) b) 300 10STM m d) Incremental continuous move command (700 10STM m) Forward rotation 0r/min Servo motor speed ON Program output 1 (OUT1) OFF c) f) 13 38 13.

Table of Contents

AC 110 12 2 12 3 q e w e t y 220 10 1 10 1.5 440 6 1 3 1 550 5 0.8 2 0.5 r b contact w a contact r q DC 24 3 2.5 3 2.5 C C 48 1.5 1.2 1.5 1.25 When rising pressure q w = ON e r = OFF When rising pressure q e r y = ON q w r t = OFF 110 0.5 0.25 0.5 0.2 220 0.25 0.1 0.25 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 2000 VAC/1 min. 16-9-5 2 Series

Hydraulic

CHQB100 10D (M) CH QB40 5D (M) 15D (M) 10D (M) 20D (M) 15D (M) x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 145l x 170l 25D (M) 20D (M) 30D (M) 25D (M) 35D (M) 30D (M) 13.5 10 40D (M) 35D (M) 45D (M) 40D (M) 50D (M) 45D (M) 75D (M) 50D (M) x 195l 100 (M) 75D (M) 100D (M) M6 x 90l x 95l x 100l x 105l x 110l x 115l x 120l x 125l x 130l x 155l CH QB50 10D (M) 15D (M) 20D (M) 25D (M) 30D

KQ2

One-touch Fittings Series KQ2 Applicable Tubing: Metric Size Connection Thread: M, R, Rc How to Order KQ 2 H 06 S 01 Made to Order Refer to page 58 for details.

Battery-less

Sphere Position of rotation shaft: Diameter a b r r r I = m 12 a2 + b2 I = m 2 r2 I = m 5 2r2 I = m 4 r2 9. When a load is mounted on the end of the lever 10. Gear transmission (A) Number of teeth = a (B) r a2 a1 1. Find the moment of inertia IB for the rotation of shaft (B). 2. Then, replace the moment of inertia IB around the shaft (A) by IA, m2 + m2a22 + K 3 a12 I = m1 m1 (Ex.)

VQZ1000/2000/3000

plug connector (M) (Option) 100 VAC 200 VAC 110 VAC 220 VAC VQZ1000 M plug connector (M) 0.54 0.71 (A) 4 Locking type (Tool required) DIN terminal (YZ) DIN terminal (Y) 1 (P) 5 (R) Except VQZ1000 ) ( VQZ2000 N.C. 1.4 1.6 (B) 2 1 (P) 3 (R) Except VQZ1000) ( N.O.

0.4

port] C10: 10 One-touch fitting Flat ribbon cable connector assembly (26P) AXT100-FC26-1: 1.5 m AXT100-FC26-2: 3 m AXT100-FC26-3: 5 m DIN rail clamp screw EXH R EXH R B B B B B B B B P X X P 49 31.6 24.5 9.5 16 A A A A A A A A (7.5) (12) C4, C6, C8 [4(A), 2(B) port] C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting P = 16 41 23 C10 [1(P) SUP port] C10: 10 One-touch

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

-r-.-~ Light Cable:0.24(6)an surge vo ag Pg 035(9) d It e suppressor \ 0.31 (6)Oia " 'l\i 'r--y ~ f=rLight ~ m -+Ao. "'~ ' _M ~~ ~Ig ":8 " ~ ": ~ r M M -W-$-~ 3.56(90.5) J Conduit (1/4) Terminal:NVFR211o-0T 4.69(119) Wilh indicalor lighl Cable:0.24 (6)Pg.0.35(9) and surge voltage suppressor 0.31 (8)Oia ( / ~-'rnf-r-,.7( '. ' Li ht ) 3.58(91) 4.70(119.5) Series NVFR2000:Base Mounted Type Non

Valve Single Unit

A: Orange B: Green SX M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) 3 4 5 3 4 5 L plug connector (L): SX5 40(R)-L 02 M plug connector (M): SX5 40(R)-M-02 Manual override (Press and turn for the locking type.)

Valve Single Unit

SX (Mounting hole) A: Orange B: Green M5 x 0.8 M5 x 0.8 (External pilot port) (Pilot EXH port) (Light/Surge voltage suppressor) (Lead wire length) G: 300 H: 600 (Piping port) L plug connector (L): SX3240(R)-L-01 M plug connector (M): SX3240(R)-M-01 Manual override (Press and turn for the locking type.)

5 Port Solenoid Valve Series VQZ1000/2000/3000

Note 2) For one-touch fittings for P/R port and silencer part no., refer to page 978. 5 1 15 VQ5 3 P 4 1/8 [1(P) port] G1/16 [5(R1), 3(R2) port] VQC VQZ VQZ2 2 (R)-G1-M5 1 8 9 M-type plug connector (M): VQZ2 2 (R)-M1-C4, C6 0 1 1 8 9 0 1 SQ Approx. 300 (Lead wire length) VFS 83.7 [85.9] M5 x 0.8 4(A), 2(B) port 78.7 VFR 12 VQ7 25 40.1 [47.1] Unless otherwise indicated, dimensions are the

Table of Contents

Inch Size H (Hexagon width across flats) Connection thread NPT Effective area (mm2) Weight (g) A R, NPT> L M Applicable tubing O.D.

0.55

Refer to back cover for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for Common Precautions. 30 Series VPA300/500/700 Construction Standard u y t r e w q JIS symbol N.C. N.O. (A) 2 (A) 2 12 12 Standard 1 (P) 3 (R) 1 (P) 3 (R) i (A) 2 (A) 2 2(A) 3(R) o For vacuum 12 12 3 (R) 1 (P) 1 (P) 3 (R) X 1(P) For vacuum u y t r e w q i 2(A) 3(R) o X Component Parts No.