Precautions 1

020B, Y-032B Material: Rolled steel Y-040B Material: Cast iron R1 R1 Y (Max.)

CJ2

Component Parts No. q w e r t y No. u i o !0 !

Air Cylinder Series CA2

3 y e q w !7 r !4 !8 !6 !2 t u !5 o !1 !

Programless Controller Series LECP1

m For three phase 200 VAC For single phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N () W M N W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power supply should be

DeviceNet-E

P o w er su p p ly co n n ecto r key Communication connector key 6 Sw i t ch set t i ng Saf et y I nst ruct i ons f or Set t i ng Turn of f t he pow er suppl y w hi l e set t i ng t he sw i t ch. I f t here i s f orei gn m at t er or w at er dropl et s around t he sw i t ch cover, cl ean i t of f bef ore openi ng t he cover.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No. Description Material Note Component Parts (For single acting) No.

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

LVQ

LQ1 Construction LVN 90 Degree turn type t TL/TIL LQ3 q e A B r w t y Multi-turn type (with indicator) A B A B Description No.

MY1

1 u t q w e y !2 i r #3 !4 !0 !9 !8 !5 !

SL5200

No code 0 FV4 V3 L 1 e w q w q -30in.Hg to 30psig -30in.Hg to 60psig -30in.Hg to 100psig -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa With pressure gauge 2PW 3PW qIN wOUT eGauge port(Outlet) 2) Refer to gauge guide (P.94) for gauge specifications.

High Vacuum Angle Valve

Construction/Operation Auto switch (Option) Heater (Option) q Bonnet assembly (Maintenance parts)1 Indicator (Option) (Including w, e, y, u, i, o) Port 1(P) (Pressure port) Magnet (Option) Pilot port !

Electric Actuators

Press MANUAL button ( ) once for sizing operation (speed, sizing amount are specified values) P P MOVE Test P P P Return to ORIG Compatible Compatible P Operation of the specified step data P P Test drive Compatible Compatible (Continuous operation) P Forced output Compatible ON/OFF of the output terminal can be tested.

3 Port Solenoid Valve

01 02 SS073A Stations C L2 0.1 W with power saving circuit L1 1.8 18 5 23.5 21 P = 7.2 11 22 3.5 3.5 8 R1.7 7 25.5 3.4 28.5 3.5 150 (lead wire AWG#26) 27 5 150 (lead wire AWG#26) 3.5 6 barb fitting 1 (SUP) port n U side 1 2 3 4 5 D side 6 barb fitting 3 (EXH) port (18) 12 7 5 5 3.5 3.2 3.5 P = 7.2 12.8 n-3.2, 4 barb fitting 2 (OUT) port Dimensions Formulas: L1 = n 7.2 + 14.8, L2 = n 7.2

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Wall mounting z y P. 8-13-5 Wb: MGGLB25-200 (4.35 kg) x y x z Wa: Connection plate t =10 (880 g) MY2H40G-500 3. Ceiling mounting P. 8-13-5 4.

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

Example) AW30-03C-2R-X2622A y t r e w q Stainless steel 316 specification Symbol Description K q Body size 30 40 IP K w Thread type Nil Rc N NPT F G + IW 02 1/4 03 3/8 04 1/2 06 3/4 + 1301 K e Port size AW AW IL1 K r Option i a Float type auto drain Nil Without option C Note 1) Float type auto drain (N.C.

Digital Pressure Switch ( compatible)

2nd letter Y U8 0 Refer to Figure "2nd to 4th letter (7seg) of Line name communication data". 0x071E (1822) 0 R/W Line name 3rd letter Y U8 0 Lower level screen 0x071F (1823) 0 R/W Line name 4th letter Y U8 0 0x0720 (1824) 0 R/W Line name Left side bot Y U8 0 0: OFF (dot OFF) 1: ON (dot ON) 0x0721 (1825) 0 R/W Line name Center bot Y U8 0 0x0722 (1826) 0 R/W Line name Right side bot Y U8

VFRA3000

-9200-www.stevenengineering.com 5 3 position pressure center Port size VR W/o sub-plate (Pilot port: Rc) W/o sub-plate (Pilot port: Other than Rc) 1/4 3/8 Nil VH 00 VHS 02 03 How to Order Manifold Base 10 1 2 VV5FRA3 n Port size Thread type Indicate the same part number as VFR3000 manifold.

Digital Flow Switch (Integrated display type) ( compatible)

0 Y 1820 0x071C 0 R/W 1821 0x071D 0 R/W Line name 2nd letter U8 0 Y Refer to "Line name: communication data".

IDX-OM-Y002

[Note] It is recommended to install valves and pressure gauges to clean the Y shaped strainer easily. By fully closing the valves, it is not necessary to stop the facility water system while cleaning the Y shaped strainer.