1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Rotate the lever assembly w to align the holes on the lever assembly w and the base e. Insert the lever pin q into the holes to fix the lever assembly w. 1 y Tubing !1 Holder assembly replacement screw i Holder assembly r Insert pin assembly u Fitting nut t Insert bushing Place the insert bushing t on the insert pin assembly r. 2 !

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

Assembly of check valve body assembly, check valve cover and 2 screws Please consult SMC for special application specifications. 8 Series ARP20/30/40 Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A 1 I N 2 OUT C SM A w w Inlet pressure Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber (IN side) (IN side) r r IN (Inlet pressure) OUT (Outlet

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Assembly of check valve body assembly, check valve cover and 2 screws Please consult SMC for special application specifications. 8 Series ARP20/30/40 Working Principle (Regulator with Backflow Function) ARP20K/30K/40K w A-A A 1 I N 2 OUT C SM A w w Inlet pressure Pressure in diaphragm chamber Inlet pressure Pressure in diaphragm chamber (IN side) (IN side) r r IN (Inlet pressure) OUT (Outlet

I/O Configurator (NFC version)

R/W undetected: NFC reader/writer driver is installed. NFC reader/ writer is not identified or USB is not connected. R/W detection/ R/W no-detection button 5 R/W detected: NFC communication with the wireless unit is available. When the Advanced Card Systems Ltd. ACR1251U/ACR1252U is used. No driver: NFC reader/writer is not identified or USB is not connected.

I/O Configurator (NFC version)

R/W undetected: NFC reader/writer driver is installed. NFC reader/ writer is not identified or USB is not connected. R/W detection/ R/W no-detection button 5 R/W detected: NFC communication with the wireless unit is available. When the Advanced Card Systems Ltd. ACR1251U/ACR1252U is used. No driver: NFC reader/writer is not identified or USB is not connected.

Pin Cylinders Series CJP2/CJP

CS2 Panel mount type Embedded type i e u q r w t y Component Parts No.

AC Servo Motor Driver (MECHATROLINK-II type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur. 2.

AC Servo Motor Driver (MECHATROLINK-III type)

Example: Set 20 W (100 W 20%) for the 100-W external Regenerative resistor with natural convection cooling method: Pn600 = 2 (unit: 10 W) Note 1. If Pn600 is not set to the optimum value, alarm A.320 will occur . 2.

Mist Separator Regulator

AW-OMZ0061 PRODUCT NAME Mist Separator Regulator MODEL / Series / Product Number AWM20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWM30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWM40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3. Standard Specifications 9 4.

Ｍ icro Mist Separator Regulator

AW-OMZ0062 PRODUCT NAME icro Mist Separator Regulator MODEL / Series / Product Number AWD20-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AWD30-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AWD40-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D Contents Page 1. Safety Instructions 2-8 2. Application 9 3.

SMC Pneumatic Clean Series

With air cushion WB 2-P (Rc, NPT, G) WA GB Relief port M5 x 0.8 10 GA W W RA Relief port Width across flats B1 MM H1 D MAX.

HRX-OM-Q033

. 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command:LOC Key-lock setting (R) . 5-19 5.8.5 Command:LOC Key-lock setting (W) . 5-20 5.8.6 Command:STR Saves data (W) . 5-21 5.9 Negative response . 5-22 Chapter 6 Communication alarm function . 6-1 6.1 Communication alarm occurs . 6-1 6.2 Communication alarm reset . 6-2 6.3 Setting and checking . 6-2 6.3.1 Setting

HRX-OM-S010

. 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command:LOC Key-lock setting (R) . 5-19 5.8.5 Command:LOC Key-lock setting (W) . 5-20 5.8.6 Command:STR Saves data (W) . 5-21 5.9 Negative response . 5-22 Chapter 6 Communication alarm function . 6-1 6.1 Communication alarm occurs . 6-1 6.2 Communication alarm reset . 6-2 6.3 Setting and checking. 6-2 1.1 Communication

3

2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

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l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

RQ

Mounting bolt C D Mounting bolt Mounting bolt Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

Step Motor Driver （ Pulse input type ）

XX W-AREA1 Stroke(-)to Stroke (+) of the basic parameter If W-AREA1 >W-AREA2, the alarm Parameter ALM will be activated.(However,no alarm is generated if W-AREA1= WAREA2= 0, the WAREA output will be turned OFF) XX W-AREA2 ORG Correct [Link Offset] Fixed value This is the fixed value for this driver.

HRX-OM-R028

.5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W).5-18 5.8.4 Command:LOC Key-lock setting (R) .5-19 5.8.5 Command:LOC Key-lock setting (W).5-20 5.8.6 Command:STR Saves data (W) .5-21 5.9 Negative response.5-22 Chapter 6 Communication alarm function . 6-1 6.1 Communication alarm occurs .6-1 6.2 Communication alarm reset.6-2 6.3 Setting and checking.6-2 6.3.1 Setting and checking

Electric Actuator/Rod Type LEY16, 25, 32 Series LEY Step Motor (Servo/24 VDC) Servo Motor (24 VDC)

Applicable stroke table Manufacturable stroke range [mm] Stroke [mm] 400 450 500 350 300 250 200 150 100 50 Model 30 P P P P P P P P P P P P P P P P P P P P P LEY16 LEY25 LEY32 P P P P P P 10 to 300 15 to 400 20 to 500 Consult with SMC for the manufacture of intermediate strokes other than those specified on the above. w For the servo motor (24 VDC) specification, EMC compliance was

HRX-OM-T004

. 5-17 5.8.3 Command:SV1 Circulating fluid set temperature (W) . 5-18 5.8.4 Command:LOC Key-lock setting (R) . 5-19 5.8.5 Command:LOC Key-lock setting (W) . 5-20 5.8.6 Command:STR Saves data (W) . 5-21 5.9 Negative response . 5-22 Chapter 6 Communication alarm function . 6-1 6.1 Communication alarm occurs . 6-1 6.2 Communication alarm reset . 6-2 6.3 Setting and checking . 6-2 6.3.1 Setting