Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Bracket, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Body Ported, 2 Port, N.O., Port 3 IN, Port 2 OUT, Tubing Type, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Standard, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Symbol: Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT, Function: Power-saving Circuit, Voltage: 24 VDC, Wetted Part Material: Plate: PEEK; Diaphragm: Kalrez®, Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: Manual Override, Lead Wire Length: Plug Connector, 300mm, CE Compliant: CE Compliant

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance.

System: Q (Vacuum Pump System for Manifold), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), IO-Link compatible vacuum pressure switch: 3 (-100 to 100 kPa, w/ Unit Selection, w/out Energy Saving), Connector: H (300mm Lead wire with M12 connector for IO-Link), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 pilot port 2-Mounting hole Port size Rc (EXH port) Port size 2-Rc (IN, OUT port) IN, OUT EXH Port size Rc A Model Mounting hole C D E F G H K L B J 3 8 1 2 3 4 VPA3145 71 3 4 85 14 52 55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

0.01

Stations Stations 3 2 1 IISA2CSL-3B5DLCE21 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number) IISA2VPR-3B5DLC1 set (3 stations manifold part number) ISA2-GE41 3 sets (Air catch sensor part number) Prefix the part number of the air catch sensor with an asterisk ().

High Purity Fluoropolymer Fittings/Needle Valve/Tubing

Series Appearance Class Metric size Inch size 1/4" 3/8" None 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 2 3 Panel mount union LQ2P 4 P. 28 5 2 3 Union LQ2U 4 P. 28 5 Note) Basic size With reducer Insertion Tool Needle Valve P. 36 P. 32 Type Class Series Applicable tubing O.D. 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" Metric size LQ-GJ LQ-GK 1, 2 LVN Inch size J type K type LQ-GL

3M/SMseries

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I

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Air cooled Thermo-con (Compact type)

COMMUNICATION FORMAT -3-1 3.1 TYPE OF MESSAGE -3-1 3.2 CONTENT OF COMMUNICATION -3-1 3.3 COMPOSITION OF REQUIRED MESSAGE (FROM MASTER TO THE PRODUCT) -3-2 3.4 COMPOSITION OF RESPONSE MESSAGE (FROM THE PRODUCT TO MASTER) -3-3 3.5 EXPLANATION OF CODE -3-4 3.6 CAUTIONS FOR COMMUNICATION -3-6 3.7 COMMUNICATION EXAMPLE -3-7 3.8 CONNECTION -3-9 3.9 IDENTIFICATION CODE LIST -3-9 3.10 ASCII CODE

Air cooled Thermo-con (Compact type)

COMMUNICATION FORMAT -3-1 3.1 TYPE OF MESSAGE -3-1 3.2 CONTENT OF COMMUNICATION -3-1 3.3 COMPOSITION OF REQUIRED MESSAGE (FROM MASTER TO THE PRODUCT) -3-2 3.4 COMPOSITION OF RESPONSE MESSAGE (FROM THE PRODUCT TO MASTER) -3-3 3.5 EXPLANATION OF CODE -3-4 3.6 CAUTIONS FOR COMMUNICATION -3-6 3.7 COMMUNICATION EXAMPLE -3-7 3.8 CONNECTION -3-9 3.9 IDENTIFICATION CODE LIST -3-9 3.10 ASCII CODE

Clean Regulator

: 0.55 MPa, Fluid: Air 0.5 r Outlet pressure MPa 0.4 0.3 OUT IN 0.2 33 0.1 2 x Rc 3/4 to 1 0.0 t e y q 0 1000 2000 3000 4000 Flow rate L/min (ANR) Component parts Material No.

NCY2 series

(l) 3 Vertical movement '1 .9+lo 13.23 o".2.55 l"+3 a 5.25 l"+35 a.17.5 44.O 3.4+l; aa.2 _ 4.2+la lo: D$tance iiom mounling sudace to cenler ,q'60 lo+6.0 cr.105 lo+7[ o:Drslance I'on moJnLnq sLnace Io load s co.1er ol . Nore) Priicipally, itbe@ms imposible 10 operal.

Air Cylinder NCY2 Series Magnetically Coupled Rodless Cylinder

(l) 3 Vertical movement '1 .9+lo 13.23 o".2.55 l"+3 a 5.25 l"+35 a.17.5 44.O 3.4+l; aa.2 _ 4.2+la lo: D$tance iiom mounling sudace to cenler ,q'60 lo+6.0 cr.105 lo+7[ o:Drslance I'on moJnLnq sLnace Io load s co.1er ol . Nore) Priicipally, itbe@ms imposible 10 operal.