IDX-OM-Z004

. i-8 1 1.1 . 1-1 1.2 . 1-2 1.2.1 C . 1-2 1.2.2 G . 1-2 1.2.3 K . 1-2 1.2.4 P . 1-2 1.2.5 R . 1-2 1.2.6 V . 1-2 1.2.7 . 1-2 1.2.7 . 1-2 1.3. . 1-3 2.1 . 2-1 2.2 . 2-2 2.2.1 . 2-2 2.2.2 . 2-3 2.2.3 . 2-4 2.2.4 . 2-4 2.2.5 . 2-5 2.2.6 . 2-6 1 IDX-OM-Z004 2.2.7 . 2-7 2.3 . 2-9 2.3.1 . 2-9 2.4 . 2-9 3 / 3.1 . 3-1 3.2 . 3-1 3.3 . 3-2 3.4 . 3-2 3.5 . 3-2 3.6 . 3-3

LECP6_C

[SW] 1 1 1 0. [] 02 1. a [a ] 2. b [b ] SW 21 21 1 33 - 8 81 ( 82 0 / 34 - 83 1 1 INP ON / 2 ( INP OFF 3 INP OFF INP ON 35 - INP ON ( ) 84 PLC 15ms30ms 85 2 EMG EMG OFF () RESET RESET () HOLD HOLD EMG RESET OUT OFF 36 - 9 91 )100mm/s 50mm (No.1 ) 50mm 50mm/s 10mm 5 100mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 50.00 1000 1000 0 0 0 100

CG1-OM0227

P4 1-1. 2. P4 2-1. 2-2. 2-3. 2-4. 2-5. 2-6. 2-7. 2-8. 3. P18 3-1. 3-2. 3-3. 3-4. 4. (XC85,X446) P25 4-1. 4-2. PTFE 5. P26 6.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

Indicate part numbers of valve and option beneath the manifold part no. 643 A Manifold specifications 10-V100 Common SUP / Common EXH S41 type How to Order Applicable solenoid valve Note) VV100 S41 05 10 M5 10-V11410-V114A10-V12410-V124AApplicable blanking plate assembly V100-77-1A Stations 2 stations 2 port size M5 M5 x 0.8 Clean series 02 2 1 20 20 stations 3 2 Port 1 M5 x 0.8 Port 3

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

Non-locking push type Slotted locking type, Knob locking type Note 2) Manual override 2 to 10 stations: W = 26n + 172 11 to 16 stations: W = 26n + 199 2 to 10 stations: W = 54n + 227 11 to 16 stations: W = 54n + 264 Note 3) SY3000 Weight W (g) n: Stations (D-sub connector) Main valve/pilot valve common exhaust type Internal pilot External pilot Pilot exhaust type Pilot valve individual exhaust

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PSI:1 Min. dISplay dilferenllal kgf/cm2 :O.02. bar:O.D2 kgf/cm2:O. 1, bar:O.1 mmHg:l 0. kPa:2. PSI:O.2 Can be programmed for a hysteresis mode, window comparator mode. or reversed output of these respective modes.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

) (2 pcs.) (1 pc.) Note 2) Note 1) Standard Mounting nut Note 1) Rod end nut Clevis pin With pin T-bracket Option Note 1) Mounting nut is not included with integral clevis, single clevis and double clevis types. Note 2) Pin and snap ring are packed with double clevis type. Mounting Bracket Part No.

Modular Type Lubricator Series AL

F AL20 Port size Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

PF2M7.eng

Press the SET button for 2 to 5 seconds.

Series DXT474

When using sealing tape, leave 1.5~2 threads exposed on the end of pipe/fitting.

ISE7xG.eng

System error Displayed if an internal data error has occurred. , The direct current power supply to be used should be UL approved as follows: Circuit (of Class 2) which is of maximum 30 Vrms (42.4 V peak), with UL1310 Class 2 power supply unit or UL1585 Class 2 transformer.

ISE70_71-AB.eng

The direct current power supply to be used should be UL approved as follows: Circuit (of Class 2) which is of maximum 30 Vrms (42.4 V peak), with UL1310 Class 2 power supply unit or UL1585 Class 2 transformer. The product is a UL approved product only if it has a mark on the body.

CG1-SMV13_en

Poloneza 89 Page 2 of 2

Process Pump <Fluororesin Type> Series PA3000

Suction port 2 Series PA3000 How to Order PA 3 3 1 0 03 Assembly environment Standard Clean room Nil P Option Body material Nil Body only With foot With silencer (for automatic operation type only) 3 Fluororesin B N* Diaphragm material 1 PTFE * With silencer AN200-02 for AIR EXH. AN200-N02 for NPT.

Vacuum Regulator Series IRV

50 2-Rc 1/8 Vacuum gauge port IRV3000 IRV3000 54 70 50 66 SMC P K U C S O H L 10.5 x 8.5 2-Rc 1/8 Vacuum gauge port Approx. 130 G 43 74 SET VAC SET Pad side Vacuum pump side 22 Approx. 68 Rc 1/2 2-Rc 1/4, 3/8, 1/2 Connection port 66 2

Stations: 2 Stations, Port Size: 02 (1/4), Thread: N (NPT), S Kit: SEA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Polarity: N (Negative Common)

Body Size: 20, Thread: N (NPT), Port Size: 02 (1/4), Option: Standard, Attachment: Standard, Semi-Standard 1: Standard, Semi-Standard 2: NZ (N + Z)

Size: 3 (30), Valve Type: 2 (Normally Open), Body Material: S (Stainless Steel), Seal Material: N (NBR), Port Size: 02 (Thread; 1/4), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Size: 3 (30), Valve Type: 2 (Normally Open), Body Material: C (Brass), Seal Material: N (NBR), Port Size: 02 (Thread; 1/4), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet)

Body Size: 30, Back Flow: K (w/Backflow), Thread: N (NPT), Port Size: 02 (1/4), Mounting Option: Without Mounting, Float Type Auto Drain Option: C (N.C.