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Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

B B For D-F8 Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch (Lm) 11-6-10

ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port A port B port A port 90 A 5 n gl ge e an ad t r ju en st m 180 Note) The drawings show the rotation range for the shaft's single flat.

the External Pilot VEX1 3 3 B A M5 G 1.

Body Needle V seal Lock nut Adjustment handle Insert bushing Nut Collar A 1 2 3 4 5 6 7 8 PFA PCTFE PTFE PVDF PVDF PFA PFA PFA Body class 2 y u y u B Dimensions A (B) (max.S) D H Port A 2 x G SMC (J) SMC C E F K Port B E A B C D E F G H J K S Model 48 60 72 LVN20 LVN30 LVN40 24 30 36 12 18 22 88 110 124 34.5 43 52 6 9 11 4 5 6 14 25 25 20 26 33 18 24 30 2.4 7.5 8.0 940 LQ1/LQ3/LVN/LQHB Series

B B B p AW3001 220.5 213.5 219.5 240.5 AW4001 272 265 271 292 IN-OUT reversal mounting "'" DimenSions except B are same as the standard type.

C D E F 8 6 4 2 40 38 36 34 32 30 28 26 24 22 20 18 16 14 12 10 Input/output connector (CS0) 3 7 5 1 39 37 35 33 31 29 27 25 23 21 19 17 15 13 11 9 Power supply terminal block 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS1) 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8

In this example, the moving distance is 30 mm. The table moves 30 mm each from the current position. It does not mean that the target position is 30 mm away from the origin position. < [A] Speed> Transfer speed to the target position. < [A] Position> Target position. -5JXC-OMU0010-A < [B] Acceleration> The parameter which defines the starting speed to be gradually or rapidly.

Refer to front matters 58 and 59 for Safety Instructions and pages 3 to 7 for 3/4/5 Port Solenoid Valve Precautions. 3 position pressure center Operating pressure (MPa) SYA SYJA Flow Characteristics/Mass VZA Flow characteristics 14/2(PA/B) 4/25/3(A/BEA/EB) Function Port size Pilot port size Mass (kg) b Cv b Cv Valve model VFA 2 position single 2 position single 2 position double 3 position

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating

B act as multipliers for the Analog Input Value x is a System Analog Input (Choose A01, A02, A03, etc.)

PSE56-C01 24 B PSE56-A2 A B Model 8.2 12 9.2 12.2 15.5 9.5 A PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-B2 A 24 B 16-3-28 7 Series PSE Specific Product Precautions 1 Be sure to read before handling. Pressure Sensor Handling Air Supply Warning Warning ZSE ISE 1.

30 20 20 50 25 10 10 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 1.0 2.0 3.0 4.0 5.0 6.0 Supply pressure [MPa] Supply pressure [MPa] Flow rate Characteristics Flow rate characteristics Supply pressure: 0.4MPa Supply pressure: 0.4MPa 100 90 100 90 Vacuum pressure [kPa] Vacuum pressure [kPa] 80 80 70 70 60 60 50 50 40 40 30 30 20 20 10 10 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220

Bushing Connecting bracket B Restrictor assembly Connecting bracket A Flow direction arrow Connecting bracket B r Mount the connecting bracket A, and tighten the hexagon socket head cap screw with the following torque.

:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of

(Values at the initial period) VG JIS Symbol VP S070 VQ Model Valve model VKF VS3145 VS3135 P A C [dm3(sb Cv b Cv b Cv b Cv Flow characteristics 6.1 7.3 9.0 0.3 0.2 0.2 1.6 1.8 2.4 0.4 0.2 0.3 1.5 1.8 2.3 1/4 3/8 1/2 3/4 6.1 7.2 9.0 0.27 0.21 4.8 5.1 16 15 0.34 0.46 4.1 4.5 18 20 VZ VS AC DC 30 or less

Nominal thread size Appropriate tightening torque Rc(NPT)3/8 22 to 24 Nm Rc(NPT)1/2 28 to 30 Nm Rc(NPT)3/4 28 to 30 Nm Rc(NPT)1 36 to 38 Nm If the tightening torque is exceeded, the product can be damaged. If the tightening torque is insufficient, the piping may become loose. The product body is made of resin.

D)B 1.7-6 20-M(D)B Standard 20-M(D)BW Double rod SMB-l 1.7-16 20-M(D)BB With end lock 1.7-30 5.5-2 Copper-free Actuators Air Cylinder Series Application Bore size (mm) Name of CAD file Page in Vol.2 Standard Copper-free 6 8 12 (10) 16 (15) 20 25 32 40 50 63 80 100 125 140 160 Series/Variation Air cylinder Series C(D)A1 Standard 1.9-2 20-CA1nN Double rod 1.9-16 20-CA1WnN SCA1l Non-rotating

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

Configurations P R O D U C T S Q Q Q Table of Contents Q Q Q Q Features & Benefits .pages 4-5 Q Preferred Option Program.page 7 Q Specifications.page 9 Q SYJ300 .pages 10-12 SYJ500 .pages 13-15 SYJ700 .pages 16-18 Q Q How To Order .page 19 Q SYJ300 .pages 20-21 SYJ500 .pages 22-23 SYJ700 .pages 24-25 SYJA .pages 26-27 Q Q Q Drawings.page 29 Q SYJ300 .pages 30