High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

HEC-OM-S008

03 32 3C 0D 06 32 OD Set at 25.0 deg.C 32 Reading internal sensor 2 01 32 05 32 36 39 0D 01 32 02 32 32 35 30 32 03 32 3F 0D Answer 25.02 deg.C 33 Reading external sensor 2 01 32 05 33 36 3A 0D 01 32 02 33 33 30 30 32 03 32 3C 0D Answer 30.02 deg.C 34 Reading alarm status 2 01 32 05 34 36 3B 0D 01 32 02 34 30 38 30 03 30 30 0D Answer ERR11 Reading offset 2 01 32 05 36 36 3D 0D 01 32 02 36

Vacuum Module Series ZX

How to Order W 1 05 ZX1 PV, V port size Nozzle diameter Nil 05 07 10 0.5 mm 0.7 mm 1.0 mm M5 x 0.8 M6 x 1 (Option) Y Ejector exhaust method 1 2 Silencer Individual exhaust Rc 1 8 Dimensions: ZX1-W 1 2 48.2 JIS Symbol Port exhaust 47 EXH port (EXH.)

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: 40 (Common SUP, Common EXH, Bottom Ported), Stations: 5 Stations, Port Size: M5 (M5X0.8)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M5T (M5X0.8 NPTF)

Piping: 40 (Base Mounted Common SUP Common EXH), Stations: 5 Stations, A B Port Size: M5 (M5X0.8)

Solenoid Direction: Type 40: A Port Bottom Ported; Type 42: Opposite Side of A Port, Piping: A Port Bottom Ported, Stations: 5 Stations, Port Size: Rc 1/8, Thread: -, Bracket: -, CE Approval: -

Piping: Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: M5X0.8 NPTF

Piping: Base Mounted Common SUP Common EXH, Stations: 5 Stations, A B Port Size: M5X0.8

Piping: Base Mounted, Stations: 5 Stations, A, B Port: NPT1/8, Bracket: -

Piping: Base Mounted, Stations: 5 Stations, A, B Port: M5X0.8, Bracket: -

Piping: Base Mounted, Stations: 5 Stations, A, B Port: NPT1/8

Valve Mounting Direction: Solenoid on the Side Opposite to A,B Ports, Passage: Common SUP, Common EXH, Bottom Ported, Stations: 5 Stations, Port Size: M5X0.8, Thread: -

Piping: 40 (Base Mounted), Stations: 5 Stations, A, B Port: 01N (NPT1/8)

Piping: 40 (Base Mounted), Stations: 5 Stations, A, B Port: M5 (M5X0.8)

Piping: 40 (Base Mounted), Stations: 5 Stations, A, B Port: 01N (NPT1/8)

Fieldbus system DeviceNet TM compatible SI unit

V 5=15 V 6=020 mA 7=420 mA A8h Get/Set I-Ch0 analogue range USINT 01h to 10h 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA A9h Get/Set I-Ch1 analogue range USINT 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA AAh Get/Set O-Ch0 analogue range USINT 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA ABh Get/Set O-Ch1 analogue range USINT 0=Offset Binary 1=Sign and Magnitude 2=2s complement 3= Scaled ACh Get/Set Analogue

Base mounted VFS3000/5000/6000 series: ③ Base mounted VFS3000 to 6000 series
Manifold/01 type (with attachment plug lead wire): ④ Type 01 with attachment plug lead wire
Manifold/01T

Single/Base mounted VFR2000 to 6000 series: ① VFR series
Manifold/01T type (with terminal block): ② Type 01T with terminal block
Manifold/01C type (with multi-connector