Table of Contents

29 or less 2 position 3 position Single VQ1131 Rubber seal 0.91 0.19 0.21 1.0 0.21 0.25 15 or less 20 or less 34 or less 57 VQ1230 Metal seal 0.77 0.14 0.18 0.84 0.14 0.19 12 or less 15 or less 29 or less Double (Latching) VQ1231 Rubber seal 0.91 0.19 0.21 1.0 0.21 0.25 15 or less 20 or less 34 or less VQ1330 Metal seal 0.67 0.13 0.16 0.73 0.13 0.17 20 or less 26 or less 40 or less Closed

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

167 180 200 210.5 3 41 54 75 85.5 5 62 75 100 110.5 6 72.5 85.5 112.5 123 4 51.5 64.5 87.5 98 L1 L2 L3 L4 30 Base Mounted Type Series VQZ Dimensions: VQZ200 Dimensions: VQZ200 (mm) VV3QZ25C Stations Port size (35) Scale: 30% 38 (11) Grommet (G) 2-4.5 Mounting holes (5.5) 30 (7.5) DIN rail clamp screw N3T: One-touch fitting for 5/32" n-N3T, N7T, N9T, 01T (3.5) 21.5 N7T: One-touch fitting

REC

20 19 25 M10 x 1.25 Up to 700 22 19.5 17 9 10 10 26 13 10 45 6 37.5 5.5 30 20 19 32 M10 x 1.25 Up to 1000 22 19.5 17 9 10 12 26 13 11 45 6 46.5 5.5 30 22 19 40 M14 x 1.5 Up to 1000 24 21 22 10 15 14 32 16 12.5 50 8 56.2 7 39 26.5 30 NN P RR S U Z ZZ NA Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 9 146 14 217 226 30 25 M26 x 1.5 Up to 700 1/8 9 146 14 221 230 34.5 32 M26 x 1.5 Up to

CXT

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30 70 176.5 , 40 70 On the type for the AMC220, an R 1/4 fitting can be attached by removing the drain cock.

Refrigerated Air dryer Series IDU/IDF

(C) 15 10 5 15 10 5 15 10 5 15 10 5 15 10 5 1.01 0.72 0.43 1.18 0.84 0.50 1.39 1.00 0.60 1.68 1.20 0.72 2.10 1.50 0.90 25 0.90 0.64 0.39 1.05 0.75 0.45 1.24 0.89 0.53 1.50 1.07 0.64 1.87 1.34 0.80 30 0.84 0.60 0.36 0.98 0.70 0.42 1.16 0.83 0.50 1.40 1.00 0.60 1.75 1.25 0.75 32 0.76 0.54 0.32 0.88 0.63 0.38 1.05 0.75 0.45 1.26 0.90 0.54 1.58 1.13 0.68 35 0.51 0.36 0.21 0.59 0.42 0.25 0.69

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

AC Servo Motor Driver (Pulse input type/Positioning type)

100 1200 800 400 1500 1000 500 1350 2100 Home position return position data (m) PE08 0 -2000 (<1000 stroke)/-200 (>1000 stroke) Stopper type home position return stopper time (msec) PE10 100 200 Stopper type home position return torque limit value (%) PE11 15 30 Regenerative option PA02 000 000 (Non)/002 (LEC-MR-RB-032)/003 (LEC-MR-RB-12) Rotation direction selection PA14 0 1 0 (+Counter

Support Guide/11-LEFG Series

10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 LES Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 LEPY LEPS 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] LER Z 500 500 500 500 LEH Mep m LEY -X5 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 11LEFS Calculation of Guide Load

Electric Actuator Triple Axis P&P Unit

Please inform P/A of any changes in the motor specifications. 6) For motor details, please refer to Applicable motors on page 23. 9 Triple Axis P&P Unit Dimensions (reference drawing for assembling) 30 40 30 Stroke+240(Table movement range) 200 180 2-8H7depth10 4-M8 x 1.25 thread depth 16 Urethane stopper 110 280 (150) (Refer to 4) (Refer to 4) Home position gauge (Refer to 4) L 15 15 110

V

15 40.5 6.5 3.3 ZPT16 U C 16 18 12.5 17.5 20 38.5 25 43.5 3.5 1.2 ZPT50U C 50 53 19.5 25.5 3 15 51.5 4.5 15 41.5 7.5 3.8 D E E P T Y P E D E E P T Y P E G:M5x0.8 G:M6x1 Model A B C D E F E F Y H:M6x1 H:M6x1 H O W T O O R D E R S E E N E X T P A G E Model A B D E Y C F G C F G ZPT10D 10 12 15 20 20 41 25 46 6 ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT16D 16 18 16 21 20 42 25 47 7 Courtesy

VM

Voltage AC125V 2 2 4 4 15 10 15 10 AC250V 1.5 1.5 3 3 15 10 15 10 DC8V 1.5 2.5 3 5 15 15 15 15 DC14V 1.5 2.5 3 5 15 10 15 10 DC30V 1.5 2.5 3 5 6 5 6 5 DC125V 0.3 0.05 0.3 0.05 0.5 0.05 0.5 0.05 DC250V 0.2 0.03 0.2 0.03 0.25 0.03 0.25 0.03 JIS Symbol Construction Precautions Component Parts Be sure to read before handling.

MGC

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

Multi-Axis Step Motor Controller

PLC VElectric actuators *1 Power supply for I/O signal 24 VDC VI/O cable (Option) p. 15 Part no.

Modular F.R.L. Unit

Approx. 500 15 23 Pressure switch C JIS symbol B Center of F.R.L. body A D Specifications A 11 13 15 17 22 B 76 86 95 99 92.5 C 66 72 77 79 68.5 D 28 30 36 44 53 Model IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Applicable model AC20 AC25, AC30 AC40 AC40-06 AC50, AC55, AC60 Fluid Proof pressure Maximum operating pressure Set pressure range (off) Differential Ambient and fluid temperature

0.5

15 Discharge time [s] Discharge time [s] 15 15 15 15 Air flow level: 1 Discharge time [s] Discharge time [s] Discharge time [s] Discharge time [s] Air flow level: 1 Air flow level: 1 Air flow level: 1 10 10 Air flow level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200

VQ7-6/7-8

) 50 (63) 5 3 1 32 (42) 38 (53) 1 23 (30) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc1/8 Port X (PE) 30 (42) 30 (42) 2-Rc3/8, 1/2, 3/4 Ports R1, R2 Rc3/8, 1/2, 3/4 Port P Rc1/8 Port X (PE) 30 (42) 30 (42) Rc3/8, 1/2, 3/4 Port P Dimensions inside ( ) are for Rc3/4 Dimensions inside are for rubber seals Dimensions inside ( ) are for Rc3/4 19 Series VQ7-8 Prewired Connector Type 2 position/Single : VQ7

Industrial Filters

732 752 19 15 (1/2B) 210 380 458 479 23 20 (3/4B) 250 2 210 380 474 490 23 25 (1B) 210 385 477 499 23 2 MPa FGC2 JPI 300LbSO,RF 15 (1/2B) 210 645 723 744 27 20 (3/4B) 500 3 210 645 734 755 27 25 (1B) 210 650 742 764 27 15 (1/2B) 210 375 465 488 26 20 (3/4B) 250 2 210 375 476 499 26 25 (1B) 210 380 485 507 26 4 MPa FGC4 JPI 600LbSO,RF 15 (1/2B) 210 640 730 753 30 20 (3/4B) 500 3 210 640 741

48

, 50 100, 150 38 27.5 8 7.5 3 22 12.5 7.5 11 83 11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U