Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: WO (M8 Connector w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: M5 (Body Ported M5X0.8), Thread: Rc (or

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: D (Screwdriver Operated Style), Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: D (DIN Terminal w/Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: E (Manually Operated), Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)

Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: H (Grommet Lead Wire 0.6m), Surge Suppressor: None, Manual Override: None, Port Size: C6 (ø6 One-touch Fitting), Thread: M Thread, Rc, Option: F (Bracket), CE Compliant: Q (CE Compliant)

Function: 2 Position Single, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: L Plug Connector w/Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Screwdriver Operated Style, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: CE Compliant

Function: 2 Position Single, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: DIN Terminal w/Connector, Surge Suppressor: Light & Surge Suppressor, Manual Override: Manually Operated, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: CE Compliant

Function: 2 Position Single, Piping: Body Ported, Exhaust: Common, Specifications: Standard, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.6m, Surge Suppressor: None, Manual Override: None, Port Size: ø6 One-touch Fitting, Thread: M Thread, Rc, Option: Bracket, CE Compliant: CE Compliant

Series: 1 (VQZ1000), Configuration: 4 (3 Position Exhaust Center), Seal Type: 1 (Rubber Seal), Function: Standard (0.35W DC, AC), Coil Voltage: 5 (24VDC), Lead Wire: LO (L Plug w/o Connector, w/Light & Surge Suppressor), Manual Override: Non-locking Push Style, IP65 Compliant: No, Port Size: M5 Thread, Thread: Rc, Foot Bracket: None, CE Compliant: Q (CE Marked)

Manifold Type: 41 (Base Mounted), Valve Stations: 5 Stations, A, B Port: M5 (M5X0.8), CE Marked: Q (CE Marked)

AS

Release ring How to Order Slide range 0P AS 0 06 06 20 Body size q qSlide down the release ring, and push the release bushing to the end.

AU

None Float type auto-drain 00 11 q Replacement Parts AU100 has no auto-drain type. Element Bowl guard Material Model Port size Description No.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Assembly example qResidual pressure relief 3 port solenoid valve VP517Y-5DZ1 1 pc. wAir combination AC30C-03DG 1 pc. eSpacer with bracket Y300T-A1 pc. tPiping adapter *1 *2 rSpacer Y300-A1 pc. tPiping adapter E300-03-A1 pc. q Residual pressure relief 3 port solenoid valve Applicable Combinations/Attachment Part Nos.

VXH

VXB Solenoid Specifications VXE Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C) (Rated voltage) 7.5 6 60 50 Frequency (Hz) 50 53 18 60 44 12 Power source VXP AC VXR VXH VXH How to Order VXF VXH2230 02 1 G Symbol 2 VX3 CE-compliant VXA 2 port valve for high pressure CE-compliant Nil Q 1 For DIN terminal only Bracket Valve/Body None With bracket Nil

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Manifold Regulator ARM1000/2000 Series

Connecting thread IN 1 OUT 2 2 OUT 01 male thread, M5 female thread 8 1 Thread type Nil N Rc NPT Note) A standard model is equipped with a backflow function. A main valve opens when the inlet pressure is released, and then an outlet pressure backflows into the inlet side. Note) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown.

Manifold Regulator Modular Type ARM2500/3000 Series

SRF Flow rate (L/min (ANR)) Example of mounting ITV Pressure Characteristics (Representative Value) Initial setting P1 = 0.7 MPa P2 = 0.2 MPa Q = 20 L/min (ANR) Bracket IC ITVH Set nut Outlet pressure (MPa) ITVX PVQ VY1 VBA VBAT Model Part no.

HRX-OM-S004

How to see the serial number S O 001 January 2014 S O 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2014 S Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in 2015 T 2 P alphabetical order, with O for January and Z for December 2016 U 3 Q Fig. 1-1 Position of the product label HRS Series 1.4Product Label 1-3 HRX-OM-S004 Chapter 1 Safety Instructions 1.5 Safety

HRX-OM-W060

(IEC 60417-5032-1) How to see the serial number X S 001 May 2019 X R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2019 X Repeated from A to Z in alphabetical order 2020 y 2 P 2021 Z 3 Q Fig. 1-1 Position of the product label HRL Series 1.4 Product Label 1-3 HRX-OM-W060 Chapter 1 Safety Instructions

HRX-OM-Y098

(IEC 60417-5032-1) How to see the serial number Z o 001 (Jan 2021) X R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2021 Z Repeated from A to Z in alphabetical order 2022 A 2 P 2023 B 3 Q Fig. 1-1 Position of the product label HRL Series 1.4 Product Label 1-3 HRX-OM-Y098 Chapter 1 Safety Instructions

HRX-OM-X037

(IEC 60417-5032-1) How to see the serial number Z R 001 APR 2021 Z R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2021 Z Repeated from A to Z in alphabetical order 1 o Repeated from O to Z in alphabetical order, with O for January and Z for December 2022 A 2 P 2023 B 3 Q Fig. 1-1 Position of the product label HRL Series 1.4 Product Label 1-3 HRX-OM-X037 Chapter 1 Safety Instructions