INFORMATION Step Motor Controller 5 types of communication protocols New New

bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes Terminating resistor Not included Memory EEPROM LED indicator PWR, RUN, ALM, ERR PWR, ALM, MS, NS PWR, ALM, SF, BF PWR, ALM, MS, NS PWR, ALM, COM Cable length [m] Actuator cable: 20 or less Cooling system Natural air cooling Operating temperature

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

46 16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65 73 92 103 36 40 48 56 65 73 36 40 48 56 65 73 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 0 50 342 87 435 255 100 56 4.6 106 150 4 x M10 x 1.5 23 40 (1 1/2B) 50 (2B) 0 60 450 94 545 356 120 70 6.4 120 155 4 x M12 x 1.75 28 0 219

CG5-S

(Same side) A HS Number of switches 20 25 32 40 50 63 80 100 31.5 26 24 Mounting surface Port surface Port surface Port surface 31.5 28.5 24 32.5 33 25 37 36.5 28 45.5 42 36 45.5 48.5 36 Switch type 56 57.5 46 Minimum stroke (mm) 10 15 75 57 68 46 15

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

Aluminum High Vacuum Angle Valve

Heater: 422 A XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve

Heater: 422 B XLC/XLCV Series Aluminum High Vacuum Angle Valve Dimensions XLC16, 25, 40/ Air operated (b) E C D E C E Fn (KF flange) (a) Heater (Option) (c) Auto switch (Option) H J B G A A (mm) J A B C D E Note 1) Fn G H Model XLC-16 XLC-25 XLC-40 40 110 38 1 30 17 40 26 50 121 48 1 12 40 26 39 28 65 171 66 2 11 55 41 63 36 Note 1) Dimension E applies when heater option is included.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

With switch unit + Auto switch R73, Rotation 180, Side port location MDSUB20-180S-R73 Refer to page 11-11-36 for detailed solid state switches with pre-wire connectors.

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I AL A MM Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

MK

40 46.8 52 36 40 0.15 0.15 Note 1) Above figure is for D-A73/A80.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

24.5 28 17 27 38 Data 34 (32.5) 30 (28.5) 36 31.5 28 24 34 38 44 (42.5) 35 (33.5) 46 6.5 38 29 39 48 As for auto switch mounting dimensions, auto switch mounting method and its operating range, those are the same as basic type.

PFxx-OMK0003CN

PF-OMK0003CN-E A 1L(2) L () M315L L () / ZS-36-A1 1 L (2 ) (M315 L)2 ZS-36-A2 2 L (2 ) (M325 L)2 ZS-36-A3 3 L (2 ) (M335 L)2 ZS-36-A4 4 L (2 ) (M345 L)2 ZS-36-A5 5 L (2 ) (M355 L)2 -11No. PF-OMK0003CN-E DIN -12No. PF-OMK0003CN-E F 15[V]F.S.=5-1=4[V] (1%F.S.=40.01=0.04[V]) F.S. (full spanfull-scale) 90 -13No. PF-OMK0003CN-E 3%F.S.

PF-OMM0004_C

) -24No.PF-OMM0004-D 3 1 [P_1][n_1] 1 1 OUT1OUT2[P_2][n_2] [ tn][ tp] [F 1]OUT1(60)[F 2]OUT2(36) 30 (26) -25No.PF-OMM0004-D 2 [F 1] [F] 2 [F 1] OUT1 60 ON OFF 50% 5% ON OFF [F 2] OUT2 36 ON OFF 50% 5% OUT1 ON OFF 50 5 -26No.PF-OMM0004-D / [F3] 42 1 [F10] 43 [F20] 47 [F22] 48 OFF [F30] 50 OFF[] [F80] 51 [] [F81] 52 OFF [F82] 53 [*] [F90] 54 OFF [

LEF-OM002xx

Electric actuators / Common precautions . 35 5.1 Design and selection . 35 5.2 Mounting . 36 5.3 Handling . 36 5.4 Operating environment. 37 5.5 Maintenance . 38 5.6 Precautions for actuator with lock . 38 6.

LEF-OM006xx

LEF-OM00601 / / / LEF Series LECSeries /LEC6 . 2 1/. 4 . 4 . 5 . 7 2 . 9 LEF / . 9 LEF/ . 12 . 14 . 15 3 . 17 . 17 . 18 . 21 . 27 4 . 30 5 . 31 51 . 31 52 . 32 53 . 32 54 . 33 55 . 34 56 . 34 6. 35 61 . 35 62 . 35 63 . 36 64 . 36 65 . 38 . 39 LEF Series/ (ISO/IEC) (JIS)1)2) *1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

LEH_C

/LEHS .20 4.1 . 20 4.2 . 21 4.3 . 22 5.23 5.1 . 23 5.2 . 24 5.3 . 27 . 27 . 29 (1). 31 (2). 32 (3). 33 . 34 5.4 . 36 . 36 . 38 1 - 6.39 7.40 7.1 . 40 7.2 . 41 7.3 . 41 7.4 . 42 7.5 . 44 7.6 . 44 8.45 8.1 . 45 8.2 . 46 8.3 . 50 8.4 . 53 .54 2 - LEH Series / (ISO/IEC)(JIS)1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General

JXCx-OMU0004

LEHS 3 5mm/s LEHS10 LEHS20 LEHS LEHS 40 32 2.2 1.4 9 7 36 52 3.9 2.5 15.5 12 63 91 [N] 5.5 3.5 22 17 90 130 *LEHS10 30%F.S.LEHS20 25%F.S.LEHS3240 20%F.S.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

- 0OFF 1ON 0OFF 1ON Step No IN5 IN4 IN3 IN2 IN1 IN0 Step No OUT5 OUT4 OUT3 OUT2 OUT1 OUT0 32 1 0 0 0 0 0 32 1 0 0 0 0 0 33 1 0 0 0 0 1 33 1 0 0 0 0 1 34 1 0 0 0 1 0 34 1 0 0 0 1 0 35 1 0 0 0 1 1 35 1 0 0 0 1 1 36 1 0 0 1 0 0 36 1 0 0 1 0 0 37 1 0 0 1 0 1 37 1 0 0 1 0 1 38 1 0 0 1 1 0 38 1 0 0 1 1 0 39 1 0 0 1 1 1 39 1 0 0 1 1 1 40 1 0 1 0 0 0 40 1 0 1 0 0 0 41 1 0 1 0 0 1 41 1 0 1 0 0 1

LEYx-OMZ0015

Scket width across flats Max.thread depth [mm] Model Bolt tightening torque [Nm] [mm] LEY25 M8x1.25 12.5 13 17 LEY32 M8x1.25 12.5 13 22 LEY63 M16x2 106 21 36 Soket LEY100 M20x2.5 204 27 27 Work fixed / Rod end male thread Max.

Electric Actuator / Low profile slider type

Electric actuators / Low profile slider type Common precautions. 36 6.1 Design and selection . 36 6.2 Handling . 37 6.3 Mounting . 38 6.4 Precaution on maintenance . 41 7. Trouble shooting . 43 LEM Series / Low profile slider type Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

mb1

(Drill through) Note) Dd9 L l d m H B C CJ1 D Cotter pin 3 x 18l 4 x 25l 4 x 35l 0.040 0.076 0.050 0.093 0.065 0.117 NT-03 NT-04 NT-05 NT-08 NT-10 CD-M03 CD-M05 CD-M08 10 14 22 32 40 50, 63 80 100 32, 40 50, 63 80, 100 3 4 4 44 60 82 36 51 72 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 4 4.5 5 6 8 11 13 16 17 22 27 32 41 19.6 25.4 31.2 37.0 47.3 16.5 21 26 31 39 CJP CJ2 Note) When