Number of Ports: 3 Port, Piping Direction, Bar Height: Side Ported, Short, Tube O.D.: ø1/8", Actuator Type: 30 [Push Button (Mushroom)], Suffix: Push Button Selector Color Red, Indicator: -, Bracket: -

Number of Ports: 3 Port, Piping Direction, Bar Height: Side Ported, Short, Tube O.D.: ø6, Actuator Type: 30 [Push Button (Mushroom)], Suffix: Push Button Selector Color Red, Indicator: -, Bracket: -

Number of Ports: 2 Port, Piping Direction, Bar Height: Side Ported, Short, Tube O.D.: ø6, Actuator Type: 30 [Push Button (Mushroom)], Suffix: Push Button Selector Color Red, Indicator: -, Bracket: -

Number of Ports: 3 Port, Piping Direction, Bar Height: Side Ported, Short, Tube O.D.: ø5/32", Actuator Type: 30 [Push Button (Mushroom)], Suffix: Push Button Selector Color Red, Indicator: -, Bracket: -

Cylinder (Tube) Inner Diameter(φ): 15, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Double rod, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: With bumper on both

Cylinder (Tube) Inner Diameter(φ): 15, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: With bumper on both

Cylinder (Tube) Inner Diameter(φ): 20, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: With bumper on both

Cylinder (Tube) Inner Diameter(φ): 25, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: High rigidity / high precision high class guide / Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, End Locking: [Included] Presence, Cushion: With bumper on both

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 37, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 58, Gripping Force (Open Side at 0.5 Mpa)(N): 59, Environment, Applications: Standard / Cleanroom Environment, Additional Function

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 37, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 58, Gripping Force (Open Side at 0.5 Mpa)(N): 59, Environment, Applications: Standard / Cleanroom Environment, Additional Function

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 37, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 58, Gripping Force (Open Side at 0.5 Mpa)(N): 59, Environment, Applications: Standard / Cleanroom Environment, Additional Function

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 37, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 58, Gripping Force (Open Side at 0.5 Mpa)(N): 59, Environment, Applications: Standard / Cleanroom Environment, Additional Function

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 37, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 58, Gripping Force (Open Side at 0.5 Mpa)(N): 59, Environment, Applications: Standard / Cleanroom Environment, Additional Function

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 37, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 58, Gripping Force (Open Side at 0.5 Mpa)(N): 59, Environment, Applications: Standard / Cleanroom Environment, Additional Function

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 37, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 58, Gripping Force (Open Side at 0.5 Mpa)(N): 59, Environment, Applications: Standard / Cleanroom Environment, Additional Function

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 37, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 58, Gripping Force (Open Side at 0.5 Mpa)(N): 59, Environment, Applications: Standard / Cleanroom Environment, Additional Function

How Grip: Pinch, Chuck Type / Open, Chuck Type, Number of Fingers: 2 Pcs., Open Dimension L1(mm): 37, Closed Dimension L2(mm): 19, Type: [Main Body] Body, Operation Method: Double Acting, Main Body Shape: Cylindrical Shape, Gripping Force (Closed Side at 0.5 Mpa)(N): 58, Gripping Force (Open Side at 0.5 Mpa)(N): 59, Environment, Applications: Standard / Cleanroom Environment, Additional Function

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

PF-OMN0009_C

20 40 11 21 0.5~4 L/min 2~16 L/min 5~40 L/min 10~100 L/min 50~250 L/min 2 04 20 40 11 21 R 04 20 40 11 21 S 250L/min G L/min(gal/min) / : SI : G : 1[L/min]=0.2642[gal/min] 1[gal/min]=3.785[L/min] 1=9/5+32 L/min 100L/min250L/min Rc N NPT F G IS0228 1 N M8(3m) 04 20 40 11 21 03 3/8 04 1/2 06 3/4 10 1/1 12 11/4 14 11/2 / OUT1 OUT2 1 1~5 V 2 4~20 mA 1T 1~5 V 1~5 V (PF3W3)1~5V (-1-1T

DOC1003626

Example 1) ASCII mode Received function code: 04(0 0100)ASCII code 30h34h Abnormal function code: 84(1000 0100)ASCII code 38h34h Example 2) RTU mode Received function code:04 (0 0100) Abnormal function code:84 (1000 0100) 2) Error Code Assign error code below. 01: Function code of a command is outside the standard. 02: The specified address of register is outside the range. 03: Data field