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Operating temperature range 41 to 122F (5 to 50C) Operating humidity range [%RH] 90 or less (No condensation) Weight [g] 350 (Except cable) Note) CE-compliance The EMC compliance of the teaching box was tested with the LECP6 series step motor controller (servo/24 VDC) and an applicable actuator.

Electromagnetic Digital Flow Switch

Apply a wrench Width across flats of attachment 3/8 24 mm 1/2 28 mm 3/4 35 mm 1 41 mm Moment load Turn the piping OK Flexible piping Vibration Refer to the tightening torque in the right table for connecting steel piping. Torque lower than the value in the table leads to fluid leakage. For mounting the fittings on the market, refer to the torque specified for each.

30

49.5 60 74.5 20 25, 32 40 50, 63 Semi-standard type Pneumatic: to 1 MPa (mm) Maximum thread depth P Allowable eccentricity U Maximum operating tensile and compressive force N Applicable cylinder bore size Model Nominal size Pitch Center of sphere R M A B D E F G H Weight kg 20 25 32 32, 40 40 32, 40 50 50, 63 44 49.5 49.5 60 60 60 71.5 71.5 17.5 19.5 19.5 20 20 20 22 22 21 24 24 31 31 31 41

S Couplers

R 3/8 32.9 32.9 39.4 KKA4P-02M 17 R 1/4 28.3 36.2 42.2 -03M 1/4 R 3/8 18.9 6.9 26.4 36.6 36.7 43.2 T A -04M 22 R 1/2 65.9 38.2 46.2 KKA6P-03M R 3/8 60.3 40.6 47.1 24 -04M 1/2 R 1/2 20.4 10.0 54.2 69.2 39.9 47.9 -06M 30 R 3/4 119.0 40.4 49.9 KKA7P-04M R 1/2 173.9 58.1 66.3 32 -06M 3/4 R 3/4 27.6 13.5 99.6 209.6 59.9 69.4 L2 H -10M 36 R 1 275.0 59.5 69.9 L1 KKA8P-06M R 3/4 362.8 73.4 82.9 41

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 ARP30(K) 27.8 44 41 70 41 40 44 6.5 8 53 2.3 31 38.5 19 7 ARP40(K) 27.8 44 45 74 50 54 54 8.5 10.5 70 2.3 35.5 42.5 21 7 Note 1) The

Slider Type Ball Screw Drive/11-LEFS Series

LEY -X5 LEFB/Belt Drive 11LEFS Horizontal 11LEJS 14 LEFB32 25A12 LEC 10 Work load: W [kg] LEC S 8 LEC SS-T LEFB25 6 LEC Y 4 Motorless LEFB16 2 0 LAT 0 500 1000 1500 2000 Speed: V [mm/s] LZ LC3F2 41 LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication SpeedWork Load Graph (Guide) Servo Motor (24 VDC) The following graph shows the values when moving force is 250%

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

34 M42 x 1.5 1 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 28 27.8 42.5 35 45 74 50 54

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y 28 27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 28 27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 28 27.8 42.5 35 45 74 50 54

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S T U V W Y l28 l27.8 37.5 29.5 40 66 30 34 47 5.4 15.4 55 2.3 28 28.5 14 6 l28 l27.8 37.5 30.5 41 67 41 40 44 6.5 8 53 2.3 31 38.5 19 7 l28 l27.8 42.5 35 45 74 50

PSE200.eng

OUT2 ( ) ( ) ( ) ( ) For compound For vacuum For low pressure For positive pressure 101 kPa -101 kPa [Default setting] 101 kPa 1 MPa During the zero clear operation, pressure above 5%F.S. (2.5%F.S. for compound pressure) has been applied. After 2 s, the mode will reset to the measurement mode. The set values are displayed in auto-preset as follows.

MQQ

REC TH CX CY TY TX MQQ M TV TW 2-TC RHC ZZ + Stroke MK(2) Bore size (mm) BB CD CX GB H NB R U Z ZZ S RS Q G 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 RS H A 16 18 5 6.6 24 30 30 10 114 128 74 8 RZQ T-bracket Dimensions Note) Applicable bore size (mm) Part no.

CC

35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4 66 107 116 135 50

MQQ

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 12 3.3 3.3 17.5 27.5 22 8 106 117 6 70.5 5 12 3.3 3.3 19 28 24 8 101 112 10 65 5 18 5 6.6 24 30 30 10 114 128 16 74 8 T-bracket related dimensions Note) Applicable bore size (mm) Part no.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TH TY TX TV TW 2-TC ZZ + Stroke (mm) Bore size (mm) BB CD CX GB H NB R U Z ZZ S 6 12 3.3 3.3 17.5 27.5 22 8 106 117 70.5 5 10 12 3.3 3.3 19 28 24 8 101 112 65 5 16 18 5 6.6 24 30 30 10 114 128 74 8 T-bracket Related Dimensions Note) Applicable bore size (mm) Part no.

PC Wiring System Series PCW

100 4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33 25 29 27 31 35 39 37 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Power supply terminal block 108 109 110 111 112 113 114 115 100 101 102 103 104 105 106 107 2 6 4 8 10 12 14 16 18 20 Input/output connector (CS1) 1 5 3 7 11 9 15 13 17 19 Green Red F E D C B A 9 8 7 6 5 4 3

I

www.stevenengineering.com I 7.23 INSTRUMENTATION ELECTRO-PNEUMATIC REGULATOR D I M E N S I O N S S E R I E S VY110 0 101 02 D I M E N S I O N S S E R I E S VY120 0 101 02 D I M E N S I O N S S E R I E S VY130 0 102 03 04 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

ZFC Series

ZFC200-08 No. 0.0001 1 10 100 ZFC200, 201 ZFC100, 101 S14 S10 O-ring Accessory BP-17S BP-16S Bracket Flow rate l/min (ANR) O-rings are already installed in spare elements. A bracket is included with the product. 4 Air Suction Filter Series ZFC In-line Type with One-touch Fittings Dimensions (mm) 1in=25.4mm Applicable tubing O.D.

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

ZFC200, 201 ZFC100, 101 Flow rate ( /min (ANR)) O-ring S14 S10 q Bracket Accessory BP-17S BP-16S O-ring is a set with spare element (I-S-A). A bracket is included with the product. 13-10-8 3 Series ZFC Air Suction Filter In-line Type with One-touch Fittings Dimensions Applicable tubing O.D.

Air-hydro Unit

CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107

VXA31/32

./ Material 17-3-101 The VX series will be revised shortly. Series VX Applicable Fluids Check List 3 Port Direct Air Operated Series VXA31/32 Common (C.O.) Refer to pages 17-3-54 and 17-3-55 for specifications and models.